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Dynamic evolution of internal stress, grain growth, and crystallographic texture in arc-evaporated AlTiN thin films using in-situ synchrotron x-ray diffraction
Authors:
Sanjay Nayak,
Tun-Wei Hsu,
Robert Boyd,
Jens Gibmeier,
Norbert Schell,
Jens Birch,
Lina Rogström,
Magnus Odén
Abstract:
Understanding the nucleation and growth of polycrystalline thin films is a long-standing goal. Polycrystalline films have many grains with different orientations that affect thin-film properties. Numerous studies have been done to determine these grain size and their preferred crystallographic orientation as well as stress in films. However most past studies have either employed an ex-situ methodo…
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Understanding the nucleation and growth of polycrystalline thin films is a long-standing goal. Polycrystalline films have many grains with different orientations that affect thin-film properties. Numerous studies have been done to determine these grain size and their preferred crystallographic orientation as well as stress in films. However most past studies have either employed an ex-situ methodology or only monitor the development of macroscopic stress in real-time. There has never been any research done on the simultaneous determination of crystallographic texture, grain size, and microscopic stress in polycrystalline thin films. In this study, we simultaneously monitored the generation and temporal evolution of texture, grain size, and internal stress in cathodic arc evaporated Al0.50Ti0.50N thin films using a bespoke deposition apparatus designed for use with 2-dimensional synchrotron x-ray diffraction technique. The influence of the substrate temperature is investigated in terms of the emergence and development of texture, grain size and stress evolution. A dynamic evolution of the crystallographic texture is observed as the overall film thickness varies. We clearly resolved two regime of films growth based on stress evolution. Beyond a threshold grain size (~ 14 nm), the stress scales inversely to the average grain sizes, and as the film thickness increases, immediate compressive stress relaxation was seen. An extensive ex-situ evaluation of thin films using electron microscopies and electron diffraction was performed to support the in-situ x-ray diffraction results.
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Submitted 20 December, 2023;
originally announced December 2023.
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High temperature decomposition and age hardening of single-phase wurtzite Ti$_{1-x}$Al$_{x}$N thin films grown by cathodic arc deposition
Authors:
J. Salamania,
F. Bock,
L. J. S. Johnson,
F. Tasnádi,
K. M. Calamba Kwick,
A. F. Farhadizaeh,
I. A. Abrikosov,
L. Rogström,
M. Odén
Abstract:
We investigated the high temperature decomposition behavior of wurtzite phase Ti$_{1-x}$Al$_{x}$N films using experimental methods and first-principles calculations. Single phase metastable wurtzite Ti$_{1-x}$Al$_{x}$N (x = 0.65, 0.75, 085 and 0.95) solid solution films were grown by cathodic arc deposition using low duty cycle pulsed substrate-bias voltage. First-principles calculated elastic con…
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We investigated the high temperature decomposition behavior of wurtzite phase Ti$_{1-x}$Al$_{x}$N films using experimental methods and first-principles calculations. Single phase metastable wurtzite Ti$_{1-x}$Al$_{x}$N (x = 0.65, 0.75, 085 and 0.95) solid solution films were grown by cathodic arc deposition using low duty cycle pulsed substrate-bias voltage. First-principles calculated elastic constants of the wurtzite Ti$_{1-x}$Al$_{x}$N phase show a strong dependence on alloy composition. The predicted phase diagram shows a miscibility gap with an unstable region. High resolution scanning transmission electron microscopy and chemical map** demonstrate decomposition of the films after high temperature annealing (950$^{\circ}$C), which resulted in nanoscale chemical compositional modulations containing Ti-rich and Al-rich regions with coherent or semi coherent interfaces. This spinodal decomposition of the wurtzite film causes age hardening of 1-2 GPa.
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Submitted 30 May, 2023;
originally announced May 2023.
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In-situ real-time evolution of intrinsic stresses and microstructure during growth of cathodic arc deposited (Al,Ti)N coatings
Authors:
Sanjay Nayak,
Tun-Wei Hsu,
Lina Rogström,
Maiara Moreno,
Jon M. Andersson,
Mats P. Johansson-Jöesaar,
Robert Boyd,
Norbert Schell,
Jens Gibmeier,
Jens Birch,
Magnus Odén
Abstract:
The residual stress plays a vital role in determination of the device performance that uses thin films coating and thus the accurate determination of stress and its optimization with process parameters is an ongoing research work for many decades. In line with this, the microscopic origin of the stress at the atomic scale and its development during the thin film deposition is a matter of major sci…
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The residual stress plays a vital role in determination of the device performance that uses thin films coating and thus the accurate determination of stress and its optimization with process parameters is an ongoing research work for many decades. In line with this, the microscopic origin of the stress at the atomic scale and its development during the thin film deposition is a matter of major scientific interests. The development of stress is a complex phenomenon and has a complex dependence to process parameters, film microstructure and its morphology. In this work, by utilizing a custom-designed cathodic arc deposition system and synchrotron radiation based 2D x-ray diffraction (XRD) technique, we determine the real-time evolution of stress, crystallite sizes and their preferential orientations of Aluminum-Titanium-Nitride (AlxTi1-xN) films with varied Al-content (x=0.0, 0.25, 0.50, and 0.67) on Si-100 substrate. The energies of incoming ions and hence stress in the films is tuned by applying different direct current substrate bias (Vs = floating potential, -20, -40, -60, -80, and -100 V). The instantaneous stress is evaluated by the well-known d vs. sin2ψ technique, while crystallite sizes are determined by analyzing line profiles of x-ray diffractograms. The evolution of stress and crystallite sizes are modelled with multiple numerical models from which kinetic parameters associated with the thin film depositions are extracted. The ex-situ microstructure characterizations of AlxTi1-xN coatings are carried out by scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The formation of ex-situ microstructure of the films is discussed considering the results obtained from in-situ XRD data. Finally, we demonstrate that the method utilized here is a powerful approach towards estimation of the fracture toughness of thin film coatings.
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Submitted 10 January, 2023;
originally announced January 2023.
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Structural changes in Ti1-xAlxN coatings during turning: A XANES and EXAFS study of worn tools
Authors:
L. Rogström,
M. Moreno,
J. Andersson,
M. Johansson-Jõesaar,
M. Odén,
K. Klementiev,
L. -Å. Näslund,
M. Magnuson
Abstract:
Structural changes in Ti1-xAlxN coated tool inserts used for turning in 316L stainless steel were investigated by XANES, EXAFS, EDS, and STEM. For coarse-grained fcc-structured Ti1-xAlxN coatings, with 0 \leq x \leq 0.62, the XANES spectrum changes with Al-content. XANES Ti 1s line-scans across the rake face of the worn samples reveals that TiN-enriched domains have formed during turning in Ti0.47…
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Structural changes in Ti1-xAlxN coated tool inserts used for turning in 316L stainless steel were investigated by XANES, EXAFS, EDS, and STEM. For coarse-grained fcc-structured Ti1-xAlxN coatings, with 0 \leq x \leq 0.62, the XANES spectrum changes with Al-content. XANES Ti 1s line-scans across the rake face of the worn samples reveals that TiN-enriched domains have formed during turning in Ti0.47Al0.53N and Ti0.38Al0.62N samples as a result of spinodal decomposition. The XANES spectra reveal the locations on the tool in which the most TiN-rich domains have formed, indicating which part of the tool-chip contact area that experienced the highest temperature during turning. Changes in the pre-edge features in the XANES spectra reveal that structural changes occur also in the w-TiAlN phase in fine-grained Ti0.38Al0.62N during turning. EDS shows that Cr and Fe from the steel adhere to the tool rake face during machining. Cr 1s and Fe 1s XANES show that Cr is oxidized in the end of the contact length while the adhered Fe retains in the same fcc-structure as that of the 316L stainless steel.
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Submitted 8 December, 2022;
originally announced December 2022.
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Elucidating dislocation core structures in titanium nitride through high-resolution imaging and atomistic simulations
Authors:
J. Salamania,
D. G. Sangiovanni,
A. Kraych,
K. M. Calamba Kwick,
I. C. Schramm,
L. J. S. Johnson,
R. Boyd,
B. Bakhit,
T. W. Hsu,
M. Mrovec,
L. Rogström,
F. Tasnádi,
I. A. Abrikosov,
M. Odén
Abstract:
Although titanium nitride (TiN) is among the most extensively studied and thoroughly characterized thin-film ceramic materials, detailed knowledge of relevant dislocation core structures is lacking. By high-resolution scanning transmission electron microscopy (STEM) of epitaxial single crystal (001)-oriented TiN films, we identify different dislocation types and their core structures. These includ…
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Although titanium nitride (TiN) is among the most extensively studied and thoroughly characterized thin-film ceramic materials, detailed knowledge of relevant dislocation core structures is lacking. By high-resolution scanning transmission electron microscopy (STEM) of epitaxial single crystal (001)-oriented TiN films, we identify different dislocation types and their core structures. These include, besides the expected primary full a/2{110}<1$\bar{1}$0> dislocation, Shockley partial dislocations a/6{111}<11$\bar{2}$> and sessile Lomer edge dislocations a/2{100}<011>. Density-functional theory and classical interatomic potential simulations complement STEM observations by recovering the atomic structure of the different dislocation types, estimating Peierls stresses, and providing insights on the chemical bonding nature at the core. The generated models of the dislocation cores suggest locally enhanced metal-metal bonding, weakened Ti-N bonds, and N vacancy-pinning that effectively reduces the mobilities of {110}<1$\bar{1}$0> and {111}<11$\bar{2}$> dislocations. Our findings underscore that the presence of different dislocation types and their effects on chemical bonding should be considered in the design and interpretations of nanoscale and macroscopic properties of TiN.
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Submitted 28 October, 2022; v1 submitted 13 June, 2022;
originally announced June 2022.
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Descriptor for slip-induced crack-blunting in refractory ceramics
Authors:
D. G. Sangiovanni,
A. Kraych,
M. Mrovec,
J. Salamania,
M. Oden,
F. Tasnadi,
I. A. Abrikosov
Abstract:
Understanding the competition between brittleness and plasticity in refractory ceramics is of importance for aiding design of hard materials with enhanced fracture resistance. Inspired by experimental observations of crack shielding due to dislocation activity in TiN ceramics [Int J Plast 27 (2011) 739], we carry out comprehensive atomistic investigations to identify mechanisms responsible for bri…
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Understanding the competition between brittleness and plasticity in refractory ceramics is of importance for aiding design of hard materials with enhanced fracture resistance. Inspired by experimental observations of crack shielding due to dislocation activity in TiN ceramics [Int J Plast 27 (2011) 739], we carry out comprehensive atomistic investigations to identify mechanisms responsible for brittleness and slip-induced plasticity in Ti-N systems. First, we validate a semi-empirical interatomic potential against density-functional theory results of Griffith and Rice stress intensities for cleavage (KIc) and dislocation emission (KIe) as well as ab initio molecular dynamics mechanical-testing simulations of pristine and defective TiN lattices at temperatures between 300 and 1200 K. The calculated KIc and KIe values indicate intrinsic brittleness, as KIc<<KIe. However, KI-controlled molecular statics simulations - which reliably forecast macroscale mechanical properties through nanoscale modelling - reveal that slip-plasticity can be promoted by a reduced sharpness of the crack and/or the presence of anion vacancies. Classical molecular dynamics simulations of notched Ti-N supercell models subject to tension provide a qualitative understanding of the competition between brittleness and plasticity at finite temperatures. Although crack growth occurs in most cases, a sufficiently rapid accumulation of shear stress at the notch tip may postpone or prevent fracture via nucleation and emission of dislocations. Furthermore, we show that the probability to observe slip-induced plasticity leading to crack-blunting in flawed Ti-N lattices correlates with the ideal tensile/shear strength ratio (Iplast) of pristine Ti-N crystals. We propose that the Iplast descriptor should be considered for ranking the ability of ceramics to blunt cracks via dislocation-mediated plasticity at finite temperatures.
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Submitted 17 September, 2023; v1 submitted 1 March, 2022;
originally announced March 2022.
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Interface Bonding of Zr1-xAlxN Nanocomposites Investigated by X-ray Spectroscopies and First Principles Calculations
Authors:
Martin Magnuson,
Weine Olovsson,
Naureen Ghafoor,
Magnus Odén,
Lars Hultman
Abstract:
The electronic structure, chemical bonding and interface component in ZrN-AlN nanocomposites formed by phase separation during thin film deposition of metastable Zr1-xAlxN (x=0.0, 0.12, 0.26, 0.40) is investigated by resonant inelastic X-ray scattering/X-ray emission and X-ray absorption spectroscopy and compared to first-principles calculations including transitions between orbital angular moment…
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The electronic structure, chemical bonding and interface component in ZrN-AlN nanocomposites formed by phase separation during thin film deposition of metastable Zr1-xAlxN (x=0.0, 0.12, 0.26, 0.40) is investigated by resonant inelastic X-ray scattering/X-ray emission and X-ray absorption spectroscopy and compared to first-principles calculations including transitions between orbital angular momentum final states. The experimental spectra are compared with different interface-slab model systems using first-principle all electron full-potential calculations where the core states are treated fully relativistic. As shown in this work, the bulk sensitivity and element selectivity of X-ray spectroscopy enables to probe the symmetry and orbital directions at interfaces between cubic and hexagonal crystals. We show how the electronic structure develop from local octahedral bond symmetry of cubic ZrN that distorts for increasing Al content into more complex bonding. This results in three different kinds of bonding originating from semi-coherent interfaces with segregated ZrN and lamellar AlN nanocrystalline precipitates. An increasing chemical shift and charge transfer between the elements takes place with increasing Al content and affects the bond strength and increases resistivity.
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Submitted 18 March, 2020;
originally announced March 2020.
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Strength, transformation toughening and fracture dynamics of rocksalt-structure Ti1-xAlxN (0 <= x <= 0.75) alloys
Authors:
D. G. Sangiovanni,
F. Tasnadi,
L. J. S. Johnson,
M. Oden,
I. A. Abrikosov
Abstract:
Ab initio-calculated ideal strength and toughness describe the upper limits for mechanical properties attainable in real systems and can, therefore, be used in selection criteria for materials design. We employ density-functional ab initio molecular dynamics (AIMD) to investigate the mechanical properties of defect-free rocksalt-structure (B1) TiN and B1 Ti1-xAlxN (x = 0.25, 0.5, 0.75) solid solut…
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Ab initio-calculated ideal strength and toughness describe the upper limits for mechanical properties attainable in real systems and can, therefore, be used in selection criteria for materials design. We employ density-functional ab initio molecular dynamics (AIMD) to investigate the mechanical properties of defect-free rocksalt-structure (B1) TiN and B1 Ti1-xAlxN (x = 0.25, 0.5, 0.75) solid solutions subject to [001], [110], and [111] tensile deformation at room temperature. We determine the alloys' ideal strength and toughness, elastic responses, and ability to plastically deform up to fracture as a function of the Al content. Overall, TiN exhibits greater ideal moduli of resilience and tensile strengths than TiAlN solid solutions. Nevertheless, AIMD modelingshows that, irrespective of the strain direction, the binary compound systematically fractures by brittle cleavage at its yield point. The simulations also indicate that Ti0.5Al0.5N and Ti0.25Al0.75N solid solutions are inherently more resistant to fracture and possess much greater toughness than TiN, due to the activation of local structural transformations (primarily of B1 -> wurtzite type) beyond the elastic-response regime. In sharp contrast, TiAlN alloys with 25% Al exhibit similar brittleness as TiN. The results of this work are examples of the limitations of elasticity-based criteria for prediction of strength, brittleness, ductility, and toughness in materials able to undergo phase transitions with loading. Furthermore, comparing present and previous findings, we suggest a general principle for design of hard ceramic solid solutions that are thermodynamically inclined to dissipate extreme mechanical stresses via transformation toughening mechanisms.
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Submitted 14 February, 2020; v1 submitted 13 December, 2019;
originally announced December 2019.
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Anharmonicity changes the solid solubility of an alloy at high temperatures
Authors:
Nina Shulumba,
Olle Hellman,
Zamaan Raza,
Jenifer Barrirero,
Björn Alling,
Frank Mücklich,
Igor A. Abrikosov,
Magnus Odén
Abstract:
We have developed a method to accurately and efficiently determine the vibrational free energy as a function of temperature and volume for substitutional alloys from first principles. Taking Ti$_{1-x}$Al$_x$N alloy as a model system, we calculate the isostructural phase diagram by finding the global minimum of the free energy, corresponding to the true equilibrium state of the system. We demonstra…
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We have developed a method to accurately and efficiently determine the vibrational free energy as a function of temperature and volume for substitutional alloys from first principles. Taking Ti$_{1-x}$Al$_x$N alloy as a model system, we calculate the isostructural phase diagram by finding the global minimum of the free energy, corresponding to the true equilibrium state of the system. We demonstrate that the anharmonic contribution and temperature dependence of the mixing enthalpy have a decisive impact on the calculated phase diagram of a Ti$_{1-x}$Al$_x$N alloy, lowering the maximum temperature for the miscibility gap from 6560 K to 2860 K. Our local chemical composition measurements on thermally aged Ti$_{0.5}$Al$_{0.5}$N alloys agree with the calculated phase diagram.
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Submitted 23 September, 2015; v1 submitted 9 March, 2015;
originally announced March 2015.
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Vibrational free energy and phase stability of paramagnetic and antiferromagnetic CrN from ab-initio molecular dynamics
Authors:
Nina Shulumba,
Björn Alling,
Olle Hellman,
Elham Mozafari,
Peter Steneteg,
Magnus Odén,
Igor A. Abrikosov
Abstract:
We present a theoretical first-principles method to calculate the free energy of a magnetic system in its high-temperature paramagnetic phase, including vibrational, electronic, and magnetic contributions. The method for calculating free energies is based on ab-initio molecular dynamics and combines a treatment of disordered magnetism using disordered local moments molecular dynamics (DLM-MD) with…
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We present a theoretical first-principles method to calculate the free energy of a magnetic system in its high-temperature paramagnetic phase, including vibrational, electronic, and magnetic contributions. The method for calculating free energies is based on ab-initio molecular dynamics and combines a treatment of disordered magnetism using disordered local moments molecular dynamics (DLM-MD) with the temperature dependent effective potential (TDEP) method to obtain the vibrational contribution to the free energy. We illustrate the applicability of the method by obtaining the anharmonic free energy for the paramagnetic cubic and the antiferromagnetic orthorhombic phases of chromium nitride. The influence of lattice dynamics on the transition between the two phases is demonstrated by constructing the temperature-pressure phase diagram.
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Submitted 19 March, 2014;
originally announced March 2014.
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Ab-initio elastic tensor of cubic Ti$_{0.5}$Al$_{0.5}$N alloy: the dependence of the elastic constants on the size and shape of the supercell model
Authors:
Ferenc Tasnádi,
Magnus Odén,
I. A. Abrikosov
Abstract:
In this study we discuss the performance of approximate SQS supercell models in describing the cubic elastic properties of B1 (rocksalt) Ti$_{0.5}$Al$_{0.5}$N alloy by using a symmetry based projection technique. We show on the example of Ti$_{0.5}$Al$_{0.5}$N alloy, that this projection technique can be used to align the differently shaped and sized SQS structures for a comparison in modeling ela…
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In this study we discuss the performance of approximate SQS supercell models in describing the cubic elastic properties of B1 (rocksalt) Ti$_{0.5}$Al$_{0.5}$N alloy by using a symmetry based projection technique. We show on the example of Ti$_{0.5}$Al$_{0.5}$N alloy, that this projection technique can be used to align the differently shaped and sized SQS structures for a comparison in modeling elasticity. Moreover, we focus to accurately determine the cubic elastic constants and Zener's type elastic anisotropy of Ti$_{0.5}$Al$_{0.5}$N. Our best supercell model, that captures accurately both the randomness and cubic elastic symmetry, results in $C_{11}=447$ GPa, $C_{12}=158$ GPa and $C_{44}=203$ GPa with 3% of error and $A=1.40$ for Zener's elastic anisotropy with 6% of error. In addition, we establish the general importance of selecting proper approximate SQS supercells with symmetry arguments to reliably model elasticity of alloys. In general, we suggest the calculation of nine elastic tensor elements - $C_{11}$, $C_{22}$, $C_{33}$, $C_{12}$, $C_{13}$, $C_{23}$, $C_{44}$, $C_{55}$ and $C_{66}$, to evaluate and analyze the performance of SQS supercells in predicting elasticity of cubic alloys via projecting out the closest cubic approximate of the elastic tensor. The here described methodology is general enough to be applied in discussing elasticity of substitutional alloys with any symmetry and at arbitrary composition.
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Submitted 2 November, 2011;
originally announced November 2011.
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Significant elastic anisotropy in Ti$_{1-x}$Al$_x$N alloys
Authors:
Ferenc Tasnadi,
Igor A. Abrikosov,
Lina Rogström,
Jonathan Almer,
Mats P. Johansson,
Magnus Oden
Abstract:
Strong compositional-dependent elastic properties have been observed theoretically and experimentally in Ti$_{1-x}$Al$_x$ N alloys. The elastic constant, C$_{11}$, changes by more than 50% depending on the Al-content. Increasing the Al-content weakens the average bond strength in the local octahedral arrangements resulting in a more compliant material. On the other hand, it enhances the directiona…
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Strong compositional-dependent elastic properties have been observed theoretically and experimentally in Ti$_{1-x}$Al$_x$ N alloys. The elastic constant, C$_{11}$, changes by more than 50% depending on the Al-content. Increasing the Al-content weakens the average bond strength in the local octahedral arrangements resulting in a more compliant material. On the other hand, it enhances the directional (covalent) nature of the nearest neighbor bonds that results in greater elastic anisotropy and higher sound velocities. The strong dependence of the elastic properties on the Al-content offers new insight into the detailed understanding of the spinodal decomposition and age hardening in Ti$_{1-x}$Al$_x$N alloys.
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Submitted 18 October, 2010;
originally announced October 2010.
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Telecommunications and rural economies: Findings from the Appalachian region
Authors:
Sharon Strover,
Michael Oden,
Nobuya Inagaki
Abstract:
This research investigates the relationship between telecommunications infrastructure, economic conditions, and federal and state policies and initiatives. It presents a detailed look at the telecommunications environment of the Appalachian region, particularly focusing on broadband technologies. A strong, positive association exists between telecommunications infrastructure and economic status.…
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This research investigates the relationship between telecommunications infrastructure, economic conditions, and federal and state policies and initiatives. It presents a detailed look at the telecommunications environment of the Appalachian region, particularly focusing on broadband technologies. A strong, positive association exists between telecommunications infrastructure and economic status. The effects of federal and state universal service policies are examined, as well as some of the ways states have leveraged their own infrastructure to improve telecommunications capabilities in their region. Other state and local telecommunications-related programs are noted.
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Submitted 24 September, 2001;
originally announced September 2001.
