Subwavelength grating metamaterial waveguides and ring resonators on a silicon nitride platform
Authors:
Cameron M. Naraine,
Jocelyn N. Westwood-Bachman,
Cameron Horvath,
Mirwais Aktary,
Andrew P. Knights,
Jens H. Schmid,
Pavel Cheben,
Jonathan D. B. Bradley
Abstract:
We propose and demonstrate subwavelength grating (SWG) metamaterial waveguides and ring resonators on a silicon nitride platform for the first time. The SWG waveguide is engineered such that a large overlap of 53% of the Bloch mode with the top cladding material is achieved, demonstrating excellent potential for applications in evanescent field sensing and light amplification. The devices, which h…
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We propose and demonstrate subwavelength grating (SWG) metamaterial waveguides and ring resonators on a silicon nitride platform for the first time. The SWG waveguide is engineered such that a large overlap of 53% of the Bloch mode with the top cladding material is achieved, demonstrating excellent potential for applications in evanescent field sensing and light amplification. The devices, which have critical dimensions greater than 100 nm, are fabricated using a commercial rapid turn-around silicon nitride prototy** foundry process using electron beam lithography. Experimental characterization of the fabricated device reveals excellent ring resonator internal quality factor (2.11x10^5) and low propagation loss (~1.5 dB/cm) in the C-band, a significant improvement of both parameters compared to silicon based SWG ring resonators. These results demonstrate the promising prospects of SWG metamaterial structures for silicon nitride based photonic integrated circuits.
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Submitted 19 September, 2022;
originally announced September 2022.
A thulium-silicon hybrid microdisk laser
Authors:
Khadijeh Miarabbas Kiani,
Henry C. Frankis,
Cameron M. Naraine,
Dawson B. Bonneville,
Andrew P. Knights,
Jonathan D. B. Bradley
Abstract:
Silicon photonics technology enables compact, low-power and cost-effective optical microsystems on a chip by leveraging the materials and advanced fabrication methods developed over decades for integrated silicon electronics. Silicon foundries now provide many standard building blocks required for high-performance optical circuits, including passive components such as optical waveguides, filters a…
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Silicon photonics technology enables compact, low-power and cost-effective optical microsystems on a chip by leveraging the materials and advanced fabrication methods developed over decades for integrated silicon electronics. Silicon foundries now provide many standard building blocks required for high-performance optical circuits, including passive components such as optical waveguides, filters and (de-)multiplexors and active optoelectronic components such as high-speed modulators, switches and photodetectors. However, because silicon is a poor light emitting material, on-chip light sources are still a significant challenge for foundry offerings. Current light-source integration methods are viewed as complex, requiring incompatible and/or expensive materials and processing steps. Here we report on an ultra-compact silicon photonic laser consisting of a thulium-silicon hybrid microdisk resonator. The microdisk design is straightforward and compatible with the fabrication steps and device dimensions available in all silicon photonics foundries, whereas the gain medium is added in a backend (final step), room temperature sputter deposition. This approach allows for low-cost and high-volume wafer-scale manufacturing and co-integration of light sources with silicon passive and active devices with no adjustment to standard process flows. The hybrid laser is pumped at standard telecom wavelengths around 1.6 μm and emits around 1.9 μm, which is within an emerging spectral region of significant interest for communications, nonlinear and quantum optics, and sensing on silicon.
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Submitted 21 April, 2021;
originally announced April 2021.
