Localised Solid-State Nanopore Fabrication via Controlled Breakdown using On-Chip Electrodes
Authors:
Jasper P. Fried,
Jacob L. Swett,
Binoy Paulose Nadappuram,
Aleksandra Fedosyuk,
Alex Gee,
Ondrej E. Dyck,
James R. Yates,
Aleksandar P. Ivanov,
Joshua B. Edel,
Jan A. Mol
Abstract:
Controlled breakdown has recently emerged as a highly accessible technique to fabricate solid-state nanopores. However, in its most common form, controlled breakdown creates a single nanopore at an arbitrary location in the membrane. Here, we introduce a new strategy whereby breakdown is performed by applying the electric field between an on-chip electrode and an electrolyte solution in contact wi…
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Controlled breakdown has recently emerged as a highly accessible technique to fabricate solid-state nanopores. However, in its most common form, controlled breakdown creates a single nanopore at an arbitrary location in the membrane. Here, we introduce a new strategy whereby breakdown is performed by applying the electric field between an on-chip electrode and an electrolyte solution in contact with the opposite side of the membrane. We demonstrate two advantages of this method. First, we can independently fabricate multiple nanopores at given positions in the membrane by localising the applied field to the electrode. Second, we show we can create nanopores that are self-aligned with complementary nanoelectrodes by applying voltages to the on-chip electrodes to locally heat the membrane during controlled breakdown. This new controlled breakdown method provides a path towards the affordable, rapid, and automatable fabrication of arrays of nanopores self-aligned with complementary on-chip nanostructures.
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Submitted 4 November, 2021;
originally announced November 2021.
Understanding Electrical Conduction and Nanopore Formation During Controlled Breakdown
Authors:
Jasper P. Fried,
Jacob L. Swett,
Binoy Paulose Nadappuram,
Aleksandra Fedosyuk,
Pedro Miguel Sousa,
Dayrl P. Briggs,
Aleksandar P. Ivanov,
Joshua B. Edel,
Jan A. Mol,
James R. Yates
Abstract:
Controlled breakdown has recently emerged as a highly appealing technique to fabricate solid-state nanopores for a wide range of biosensing applications. This technique relies on applying an electric field of approximately 0.6-1 V/nm across the membrane to induce a current, and eventually, breakdown of the dielectric. However, a detailed description of how electrical conduction through the dielect…
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Controlled breakdown has recently emerged as a highly appealing technique to fabricate solid-state nanopores for a wide range of biosensing applications. This technique relies on applying an electric field of approximately 0.6-1 V/nm across the membrane to induce a current, and eventually, breakdown of the dielectric. However, a detailed description of how electrical conduction through the dielectric occurs during controlled breakdown has not yet been reported. Here, we study electrical conduction and nanopore formation in SiN$_x$ membranes during controlled breakdown. We show that depending on the membrane stoichiometry, electrical conduction is limited by either oxidation reactions that must occur at the membrane-electrolyte interface (Si-rich SiN$_x$), or electron transport across the dielectric (stoichiometric Si$_3$N$_4$). We provide several important implications resulting from understanding this process which will aid in further develo** controlled breakdown in the coming years, particularly for extending this technique to integrate nanopores with on-chip nanostructures.
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Submitted 30 March, 2021;
originally announced March 2021.
