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Intrinsic Langevin dynamics of rigid inclusions on curved surfaces
Authors:
Balázs Németh,
Ronojoy Adhikari
Abstract:
The stochastic dynamics of a rigid inclusion constrained to move on a curved surface has many applications in biological and soft matter physics, ranging from the diffusion of passive or active membrane proteins to the motion of phoretic particles on liquid-liquid interfaces. Here we construct intrinsic Langevin equations for an oriented rigid inclusion on a curved surface using Cartan's method of…
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The stochastic dynamics of a rigid inclusion constrained to move on a curved surface has many applications in biological and soft matter physics, ranging from the diffusion of passive or active membrane proteins to the motion of phoretic particles on liquid-liquid interfaces. Here we construct intrinsic Langevin equations for an oriented rigid inclusion on a curved surface using Cartan's method of moving frames. We first derive the Hamiltonian equations of motion for the translational and rotational momenta in the body frame. Surprisingly, surface curvature couples the linear and angular momenta of the inclusion. We then add to the Hamiltonian equations linear friction, white noise and arbitrary configuration-dependent forces and torques to obtain intrinsic Langevin equations of motion in phase space. We provide the integrability conditions, made non-trivial by surface curvature, for the forces and torques to admit a potential, thus distinguishing between passive and active stochastic motion. We derive the corresponding Fokker-Planck equation in geometric form and obtain fluctuation-dissipation relations that ensure Gibbsian equilibrium. We extract the overdamped equations of motion by adiabatically eliminating the momenta from the Fokker-Planck equation, showing how a peculiar cancellation leads to the naively expected Smoluchowski limit. The overdamped equations can be used for accurate and efficient intrinsic Brownian dynamics simulations of passive, driven and active diffusion processes on curved surfaces. Our work generalises to the collective dynamics of many inclusions on curved surfaces.
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Submitted 13 May, 2024;
originally announced May 2024.
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On variants of multivariate quantum signal processing and their characterizations
Authors:
Balázs Németh,
Blanka Kövér,
Boglárka Kulcsár,
Roland Botond Miklósi,
András Gilyén
Abstract:
Quantum signal processing (QSP) is a highly successful algorithmic primitive in quantum computing which leads to conceptually simple and efficient quantum algorithms using the block-encoding framework of quantum linear algebra. Multivariate variants of quantum signal processing (MQSP) could be a valuable tool in extending earlier results via implementing multivariate (matrix) polynomials. However,…
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Quantum signal processing (QSP) is a highly successful algorithmic primitive in quantum computing which leads to conceptually simple and efficient quantum algorithms using the block-encoding framework of quantum linear algebra. Multivariate variants of quantum signal processing (MQSP) could be a valuable tool in extending earlier results via implementing multivariate (matrix) polynomials. However, MQSP remains much less understood than its single-variate version lacking a clear characterization of "achievable" multivariate polynomials. We show that Haah's characterization of general univariate QSP can be extended to homogeneous bivariate (commuting) quantum signal processing. We also show a similar result for an alternative inhomogeneous variant when the degree in one of the variables is at most 1, but construct a counterexample where both variables have degree 2, which in turn refutes an earlier characterization proposed / conjectured by Rossi and Chuang for a related restricted class of MQSP. Finally, we describe homogeneous multivariate (non-commuting) QSP variants that break away from the earlier two-dimensional treatment limited by its reliance on Jordan-like decompositions, and might ultimately lead to the development of novel quantum algorithms.
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Submitted 14 December, 2023;
originally announced December 2023.
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A geometric formulation of Schaefer's theory of Cosserat solids
Authors:
Balázs Németh,
Ronojoy Adhikari
Abstract:
The Cosserat solid is a theoretical model of a continuum whose elementary constituents are notional rigid bodies. Here we present a formulation of the mechanics of a Cosserat solid in the language of modern differential geometry and exterior calculus, motivated by Schaefer's "motor field" theory. The solid is modelled as a principal fibre bundle and configurations are related by translations and r…
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The Cosserat solid is a theoretical model of a continuum whose elementary constituents are notional rigid bodies. Here we present a formulation of the mechanics of a Cosserat solid in the language of modern differential geometry and exterior calculus, motivated by Schaefer's "motor field" theory. The solid is modelled as a principal fibre bundle and configurations are related by translations and rotations of each constituent. This kinematic property is described in a coordinate-independent manner by a bundle map. Configurations are equivalent if this bundle map is a global Euclidean isometry. Inequivalent configurations, representing deformations of the solid, are characterised by the local structure of the bundle map. Using Cartan's magic formula we show that the strain associated with infinitesimal deformations is the Lie derivative of a connection one-form on the bundle, revealing it to be a Lie algebra-valued one-form. Extending Schaefer's theory, we derive the finite strain by integrating the infinitesimal strain along a prescribed path. This is path independent when the curvature of the connection one-form is zero. Path dependence signals the presence of topological defects and the non-zero curvature is then recognised as the density of topological defects. Mechanical stresses are defined by a virtual work principle in which the Lie algebra-valued strain one-form is paired with a dual Lie algebra-valued stress two-form to yield a scalar work volume form. The d'Alembert principle for the work form provides the balance laws, which is shown to be integrable for a hyperelastic Cosserat solid. The breakdown of integrability, relevant to active oriented solids, is briefly examined. Our work elucidates the geometric structure of Cosserat solids, aids in constitutive modelling of active oriented materials, and suggests structure-preserving integration schemes.
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Submitted 25 September, 2023;
originally announced September 2023.
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Characterization of the $σ$-Dedekind complete Riesz space by the subadditivity of its positive part map**
Authors:
A. B. Németh
Abstract:
Two retractions $M$ and $N$ on convex cones $\bf M$ and respectively $\bf N$ of a real vector space $X$ are called mutually polar if $M+N=I$ and $MN=NM=0.$ In this note it is shown, that if the cones $\bf M$ and $\bf N$ are generating, $σ$-monotone complete, $M$ and $N$ are $σ$-monotone continuous, then the subadditivity of $M$ and $N$ (with respect to the order relation induced by $\bf M$ and res…
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Two retractions $M$ and $N$ on convex cones $\bf M$ and respectively $\bf N$ of a real vector space $X$ are called mutually polar if $M+N=I$ and $MN=NM=0.$ In this note it is shown, that if the cones $\bf M$ and $\bf N$ are generating, $σ$-monotone complete, $M$ and $N$ are $σ$-monotone continuous, then the subadditivity of $M$ and $N$ (with respect to the order relation induced by $\bf M$ and respectively $\bf N$) imply that $\bf M$ and $\bf N$ are lattice cones. $(X,\bf M)$ and $(X,\bf N)$ become $σ$-Dedekind complete Riesz spaces, $M$ and $-N$ are the positive part , respectively the negative part map**s in $(X,\bf M)$; $N$ and $-M$ are the positive part, respectively the negative part map**s in $(X,\bf N)$.
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Submitted 10 April, 2023;
originally announced April 2023.
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A Selberg Trace Formula for $\text{GL}_{3}(\mathbb{F}_p)\backslash \text{GL}_{3}(\mathbb{F}_q)/K$
Authors:
Daksh Aggarwal,
Asghar Ghorbanpour,
Masoud Khalkhali,
Jiyuan Lu,
Balázs Németh,
C Shijia Yu
Abstract:
In this paper, we prove a discrete analog of the Selberg Trace Formula for the group $\text{GL}_{3}(\mathbb{F}_q).$ By considering a cubic extension of the finite field $\mathbb{F}_q$, we define an analog of the upper half space and an action of $\text{GL}_{3}(\mathbb{F}_q)$ on it. To compute the orbital sums we explicitly identify the double coset spaces and fundamental domains in our upper half…
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In this paper, we prove a discrete analog of the Selberg Trace Formula for the group $\text{GL}_{3}(\mathbb{F}_q).$ By considering a cubic extension of the finite field $\mathbb{F}_q$, we define an analog of the upper half space and an action of $\text{GL}_{3}(\mathbb{F}_q)$ on it. To compute the orbital sums we explicitly identify the double coset spaces and fundamental domains in our upper half space. To understand the spectral side of the trace formula we decompose the induced representation $ρ= \text{Ind}_Γ^{G} 1$ for $G= \text{GL}_{3}(\mathbb{F}_q) $ and $ Γ= \text{GL}_{3}(\mathbb{F}_p).$
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Submitted 5 January, 2023; v1 submitted 4 January, 2023;
originally announced January 2023.
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Geometry of the proper asymmetric norm
Authors:
A. B. Németh
Abstract:
There is given the geometric characterization of an asymmetric norm $q$ on the real vector space $X$, for which exists an $u\in X$ such that $q(x-q(x)u)=0$, for each $x\in X$. The result is used in the theory of mutually polar retractions on cones.
There is given the geometric characterization of an asymmetric norm $q$ on the real vector space $X$, for which exists an $u\in X$ such that $q(x-q(x)u)=0$, for each $x\in X$. The result is used in the theory of mutually polar retractions on cones.
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Submitted 14 January, 2021;
originally announced January 2021.
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Mutually polar retractions on convex cones
Authors:
A. B. Németh
Abstract:
Two retractions Q and R on closed convex cones M and respectively N of a Banach space are called mutually polar if Q+R=I and QR=RQ=0. This note investigates the existence of a pair of mutually polar retractions for given cones M and N. It is shown that if dim N=1 (or dim M=1) then the retractions are subadditive with respect to the order relation their cone range endow.
Two retractions Q and R on closed convex cones M and respectively N of a Banach space are called mutually polar if Q+R=I and QR=RQ=0. This note investigates the existence of a pair of mutually polar retractions for given cones M and N. It is shown that if dim N=1 (or dim M=1) then the retractions are subadditive with respect to the order relation their cone range endow.
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Submitted 8 December, 2020;
originally announced December 2020.
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Delay and reliability-constrained VNF placement on mobile and volatile 5G infrastructure
Authors:
Balázs Németh,
Nuria Molner,
Jorge Jorge Martín-Pérez,
Carlos J. Bernardos,
Antonio de la Oliva,
Balázs Sonkoly
Abstract:
The ongoing research and industrial exploitation of SDN and NFV technologies promise higher flexibility on network automation and infrastructure optimization. Choosing the location of Virtual Network Functions is a central problem in the automation and optimization of the software-defined, virtualization-based next generation of networks such as 5G and beyond. Network services provided for autonom…
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The ongoing research and industrial exploitation of SDN and NFV technologies promise higher flexibility on network automation and infrastructure optimization. Choosing the location of Virtual Network Functions is a central problem in the automation and optimization of the software-defined, virtualization-based next generation of networks such as 5G and beyond. Network services provided for autonomous vehicles, factory automation, e-health and cloud robotics often require strict delay bounds and reliability constraints, which are influenced by the location of its composing Virtual Network Functions. Robots, vehicles and other end-devices provide significant capabilities such as actuators, sensors and local computation which are essential for some services. Moreover, these devices are continuously on the move and might lose network connection or run out of battery power, which further challenge service delivery in this dynamic environment. This work tackles the mobility, and battery restrictions; as well as the temporal aspects and conflicting traits of reliable, low latency service deployment over a volatile network, where mobile compute nodes act as an extension of the cloud and edge computing infrastructure. The problem is formulated as a cost-minimizing Virtual Network Function placement optimization and an efficient heuristic is proposed. The algorithms are extensively evaluated from various aspects by simulation on detailed real-world scenarios.
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Submitted 23 July, 2020;
originally announced July 2020.
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Subadditive retractions on cones and asymmetric vector norms
Authors:
A. B. Németh,
S. Z. Németh
Abstract:
Asymmetric vector norms are generalizations of asymmetric norms, where the subadditivity inequality is understood in ordered vector space sense. This relation imposes strong conditions on the ordering itself. This note studies on these conditions in the general case, and in the case when the asymmetric vector norm is the metric projection onto the cone engendering the order relation.
Asymmetric vector norms are generalizations of asymmetric norms, where the subadditivity inequality is understood in ordered vector space sense. This relation imposes strong conditions on the ordering itself. This note studies on these conditions in the general case, and in the case when the asymmetric vector norm is the metric projection onto the cone engendering the order relation.
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Submitted 21 May, 2020;
originally announced May 2020.
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Investigating Compilation Errors of Students Learning Haskell
Authors:
Boldizsár Németh,
Eunjong Choi,
Erina Makihara,
Hajimu Iida
Abstract:
While functional programming is an efficient way to express complex software, functional programming languages have a steep learning curve. Haskell can be challenging to learn for students who were only introduced to imperative programming. It is important to look for methods and tools that may reduce the difficulty of learning functional programming. Finding methods to help students requires unde…
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While functional programming is an efficient way to express complex software, functional programming languages have a steep learning curve. Haskell can be challenging to learn for students who were only introduced to imperative programming. It is important to look for methods and tools that may reduce the difficulty of learning functional programming. Finding methods to help students requires understanding the errors that students make while learning Haskell.
There are several previous studies revealing data about Haskell compiler errors, but they do not focus on the analysis of the compiler errors or they only study a certain kind of compiler errors.
This study investigates compilation errors of novice Haskell students and make suggestions on how their learning efficiency can be improved. Unlike previous studies we focus on uncovering the root problems with the student solutions by analysing samples of their submissions.
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Submitted 27 June, 2019;
originally announced June 2019.
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Linear complementarity on simplicial cones and the congruence orbit of matrices
Authors:
A. B. Németh,
S. Z. Németh
Abstract:
The congruence orbit of a matrix has a natural connection with the linear complementarity problem on simplicial cones formulated for the matrix. In terms of the two approaches -- the congruence orbit and the family of all simplicial cones -- we give equivalent classification of matrices from the point of view of the complementarity theory.
The congruence orbit of a matrix has a natural connection with the linear complementarity problem on simplicial cones formulated for the matrix. In terms of the two approaches -- the congruence orbit and the family of all simplicial cones -- we give equivalent classification of matrices from the point of view of the complementarity theory.
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Submitted 27 October, 2016; v1 submitted 31 August, 2016;
originally announced August 2016.
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Isotone projection cones and Q-matrices
Authors:
A. B. Németh,
S. Z. Németh
Abstract:
Proper cones with the property that the projection onto them is isotone with respect to the order they induce are called isotone projection cones. Isotone projection cones and their extensions have been used to solve complementarity problems and variational inequalities. Q-matrices are matrices with the property that all classical linear complementarity problems defined by them are solvable. This…
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Proper cones with the property that the projection onto them is isotone with respect to the order they induce are called isotone projection cones. Isotone projection cones and their extensions have been used to solve complementarity problems and variational inequalities. Q-matrices are matrices with the property that all classical linear complementarity problems defined by them are solvable. This note will use the isotone projection cones to generate a large class of Q-matrices. More specifically, it will be shown that the product between a non-negative matrix with positive diagonal elements and a Stieltjes matrix is a Q-matrix.
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Submitted 7 October, 2016; v1 submitted 24 August, 2016;
originally announced August 2016.
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Order isotonicity of the metric projection onto a closed convex cone
Authors:
A. B. Németh,
S. Z. Németh
Abstract:
The basic tool for solving problems in metric geometry and isotonic regression is the metric projection onto closed convex cones. Isotonicity of these projections with respect to a given order relation can facilitate finding the solutions of the above problems. In the recent note "A. B. Németh and S.Z. Németh: Isotonic regression and isotonic projection. Linear Algebra and its Applications, 494: 8…
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The basic tool for solving problems in metric geometry and isotonic regression is the metric projection onto closed convex cones. Isotonicity of these projections with respect to a given order relation can facilitate finding the solutions of the above problems. In the recent note "A. B. Németh and S.Z. Németh: Isotonic regression and isotonic projection. Linear Algebra and its Applications, 494: 80-89 (2016)" this problem was studied for the coordinate-wise ordering. This study was the starting point for further investigations, such as the ones presented here. The order relation in the Euclidean space endowed by a proper cone is considered and the proper cones admitting isotone metric projections with respect to this order relation are investigated.
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Submitted 15 February, 2016;
originally announced February 2016.
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Sphere covering by minimal number of caps and short closed sets
Authors:
A. B. Németh
Abstract:
A subset of the sphere is said short if it is contained in an open hemisphere. A short closed set which is geodesically convex is called a cap. The following theorem holds: 1. The minimal number of short closed sets covering the $n$-sphere is $n+2$. 2. If $n+2$ short closed sets cover the $n$-sphere then (i) their intersection is empty; (ii) the intersection of any proper subfamily of them is non-…
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A subset of the sphere is said short if it is contained in an open hemisphere. A short closed set which is geodesically convex is called a cap. The following theorem holds: 1. The minimal number of short closed sets covering the $n$-sphere is $n+2$. 2. If $n+2$ short closed sets cover the $n$-sphere then (i) their intersection is empty; (ii) the intersection of any proper subfamily of them is non-empty. In the case of caps (i) and (ii) are also sufficient for the family to be a covering of the sphere.
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Submitted 20 December, 2015;
originally announced December 2015.
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Family of closed convex sets covering faces of a simplex
Authors:
Horst Kramer,
A. B. Németh
Abstract:
It is considered a special, convex variant of Sperner lemma type .
It is considered a special, convex variant of Sperner lemma type .
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Submitted 20 October, 2015;
originally announced October 2015.
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Isotonic regression and isotonic projection
Authors:
A. B. Németh,
S. Z. Németh
Abstract:
The note describes the cones in the Euclidean space admitting isotonic metric projection with respect to the coordinate-wise ordering. As a consequence it is showed that the metric projection onto the regression cone (the cone defined by the general isotonic regression problem) admits a projection which is isotonic with respect to the coordinate-wise ordering.
The note describes the cones in the Euclidean space admitting isotonic metric projection with respect to the coordinate-wise ordering. As a consequence it is showed that the metric projection onto the regression cone (the cone defined by the general isotonic regression problem) admits a projection which is isotonic with respect to the coordinate-wise ordering.
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Submitted 2 June, 2015; v1 submitted 29 March, 2015;
originally announced March 2015.
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Lattice-like subsets of Euclidean Jordan algebras
Authors:
A. B. Németh,
S. Z. Németh
Abstract:
While studying some properties of linear operators in a Euclidean Jordan algebra, Gowda, Sznajder and Tao have introduced generalized lattice operations based on the projection onto the cone of squares. In two recent papers of the authors of the present paper it has been shown that these lattice-like operators and their generalizations are important tools in establishing the isotonicity of the met…
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While studying some properties of linear operators in a Euclidean Jordan algebra, Gowda, Sznajder and Tao have introduced generalized lattice operations based on the projection onto the cone of squares. In two recent papers of the authors of the present paper it has been shown that these lattice-like operators and their generalizations are important tools in establishing the isotonicity of the metric projection onto some closed convex sets. The results of this kind are motivated by metods for proving the existence of solutions of variational inequalities and methods for finding these solutions in a recursive way. It turns out, that the closed convex sets admitting isotone projections are exactly the sets which are invariant with respect to these lattice-like operations, called lattice-like sets. In this paper it is shown that the Jordan subalgebras are lattice-like sets, but the converse in general is not true. In the case of simple Euclidean Jordan algebras of rank at least three the lattice-like property is rather restrictive, e.g., there are no lattice-like proper closed convex sets with interior points.
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Submitted 5 February, 2014; v1 submitted 15 January, 2014;
originally announced January 2014.
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Lattice-like operations and isotone projection sets
Authors:
A. B. Németh,
S. Z. Németh
Abstract:
By using some lattice-like operations which constitute extensions of ones introduced by M. S. Gowda, R. Sznajder and J. Tao for self-dual cones, a new perspective is gained on the subject of isotonicity of the metric projection onto the closed convex sets. The results of this paper are wide range generalizations of some results of the authors obtained for self-dual cones. The aim of the subsequent…
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By using some lattice-like operations which constitute extensions of ones introduced by M. S. Gowda, R. Sznajder and J. Tao for self-dual cones, a new perspective is gained on the subject of isotonicity of the metric projection onto the closed convex sets. The results of this paper are wide range generalizations of some results of the authors obtained for self-dual cones. The aim of the subsequent investigations is to put into evidence some closed convex sets for which the metric projection is isotonic with respect the order relation which give rise to the above mentioned lattice-like operations. The topic is related to variational inequalities where the isotonicity of the metric projection is an important technical tool. For Euclidean sublattices this approach was considered by G. Isac and respectively by H. Nishimura and E. A. Ok.
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Submitted 4 June, 2013; v1 submitted 18 December, 2012;
originally announced December 2012.
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A Geometrical Approach to Iterative Isotone Regression
Authors:
Arnaud Guyader,
Nicolas Jégou,
Alexander B. Németh,
Sándor Z. Németh
Abstract:
In the present paper, we propose and analyze a novel method for estimating a univariate regression function of bounded variation. The underpinning idea is to combine two classical tools in nonparametric statistics, namely isotonic regression and the estimation of additive models. A geometrical interpretation enables us to link this iterative method with Von Neumann's algorithm. Moreover, making a…
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In the present paper, we propose and analyze a novel method for estimating a univariate regression function of bounded variation. The underpinning idea is to combine two classical tools in nonparametric statistics, namely isotonic regression and the estimation of additive models. A geometrical interpretation enables us to link this iterative method with Von Neumann's algorithm. Moreover, making a connection with the general property of isotonicity of projection onto convex cones, we derive another equivalent algorithm and go further in the analysis. As iterating the algorithm leads to overfitting, several practical stop** criteria are also presented and discussed.
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Submitted 19 November, 2012; v1 submitted 16 November, 2012;
originally announced November 2012.
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Self-dual cones, generalized lattice operations and isotone projections
Authors:
A. B. Németh,
S. Z. Németh
Abstract:
By using the metric projection onto a closed self-dual cone of the Euclidean space, M. S. Gowda, R. Sznajder and J. Tao have defined generalized lattice operations, which in the particular case of the nonnegative orthant of a Cartesian reference system reduce to the lattice operations of the coordinate-wise ordering. The aim of the present note is twofold: to give a geometric characterization of t…
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By using the metric projection onto a closed self-dual cone of the Euclidean space, M. S. Gowda, R. Sznajder and J. Tao have defined generalized lattice operations, which in the particular case of the nonnegative orthant of a Cartesian reference system reduce to the lattice operations of the coordinate-wise ordering. The aim of the present note is twofold: to give a geometric characterization of the closed convex sets which are invariant with respect to these operations, and to relate this invariance property to the isotonicity of the metric projection onto these sets. As concrete examples the Lorentz cone and the nonnegative orthant are considered. Old and recent results on closed convex Euclidean sublattices due to D. M. Topkis, A. F. Veinott and to M. Queyranne and F. Tardella, respectively are obtained as particular cases. The topic is related to variational inequalities where the isotonicity of the metric projection is an important technical tool. For Euclidean sublattices this approach was considered by G. Isac, H. Nishimura and E. A. Ok.
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Submitted 24 January, 2013; v1 submitted 8 October, 2012;
originally announced October 2012.
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Isotonicity of the projection onto the monotone cone
Authors:
A. B. Németh,
S. Z. Németh
Abstract:
A wedge (i.e., a closed nonempty set in the Euclidean space stable under addition and multiplication with non-negative scalars) induces by a standard way a semi-order (a reflexive and transitive binary relation) in the space. The wedges admitting isotone metric projection with respect to the semi-order induced by them are characterized. The obtained result is used to show that the monotone wedge (…
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A wedge (i.e., a closed nonempty set in the Euclidean space stable under addition and multiplication with non-negative scalars) induces by a standard way a semi-order (a reflexive and transitive binary relation) in the space. The wedges admitting isotone metric projection with respect to the semi-order induced by them are characterized. The obtained result is used to show that the monotone wedge (called monotone cone in regression theory) admits isotone projection.
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Submitted 23 January, 2012;
originally announced January 2012.
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How to project onto the monotone nonnegative cone using Pool Adjacent Violators type algorithms
Authors:
A. B. Németh,
S. Z. Németh
Abstract:
The metric projection onto an order nonnegative cone from the metric projection onto the corresponding order cone is derived. Particularly, we can use Pool Adjacent Violators-type algorithms developed for projecting onto the monotone cone for projecting onto the monotone nonnegative cone too.
The metric projection onto an order nonnegative cone from the metric projection onto the corresponding order cone is derived. Particularly, we can use Pool Adjacent Violators-type algorithms developed for projecting onto the monotone cone for projecting onto the monotone nonnegative cone too.
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Submitted 20 January, 2012; v1 submitted 11 January, 2012;
originally announced January 2012.
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Rapid heuristic projection on simplicial cones
Authors:
A. Ekárt,
A. B. Németh,
S. Z. Németh
Abstract:
A very fast heuristic iterative method of projection on simplicial cones is presented. It consists in solving two linear systems at each step of the iteration. The extensive experiments indicate that the method furnishes the exact solution in more then 99.7 percent of the cases. The average number of steps is 5.67 (we have not found any examples which required more than 13 steps) and the relativ…
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A very fast heuristic iterative method of projection on simplicial cones is presented. It consists in solving two linear systems at each step of the iteration. The extensive experiments indicate that the method furnishes the exact solution in more then 99.7 percent of the cases. The average number of steps is 5.67 (we have not found any examples which required more than 13 steps) and the relative number of steps with respect to the dimension decreases dramatically. Roughly speaking, for high enough dimensions the absolute number of steps is independent of the dimension.
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Submitted 19 January, 2010; v1 submitted 12 January, 2010;
originally announced January 2010.
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Characterisation of the Etching Quality in Micro-Electro-Mechanical Systems by Thermal Transient Methodology
Authors:
P. Szabo,
B. Nemeth,
M. Rencz,
B. Courtois
Abstract:
Our paper presents a non-destructive thermal transient measurement method that is able to reveal differences even in the micron size range of MEMS structures. Devices of the same design can have differences in their sacrificial layers as consequence of the differences in their manufacturing processes e.g. different etching times. We have made simulations examining how the etching quality reflect…
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Our paper presents a non-destructive thermal transient measurement method that is able to reveal differences even in the micron size range of MEMS structures. Devices of the same design can have differences in their sacrificial layers as consequence of the differences in their manufacturing processes e.g. different etching times. We have made simulations examining how the etching quality reflects in the thermal behaviour of devices. These simulations predicted change in the thermal behaviour of MEMS structures having differences in their sacrificial layers. The theory was tested with measurements of similar MEMS devices prepared with different etching times. In the measurements we used the T3Ster thermal transient tester equipment. The results show that deviations in the devices, as consequence of the different etching times, result in different temperature elevations and manifest also as shift in time in the relevant temperature transient curves.
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Submitted 21 November, 2007;
originally announced November 2007.
