Showing 1–4 of 4 results for author: Mumlyakov, A M

Technology of fabrication superconducting free-standing structures (FSS)

Authors: M. A. Tarkhov, A. M. Mumlyakov, M. V. Shibalov, N. V. Porokhov, N. A. Vovk, P. A. Nekludova, I. V. Trofimov, I. A. Filippov

Abstract: In this study, a method for fabrication of superconducting microstructures that are partially or completely isolated from the substrate has been proposed. Two configurations of suspended microbridges have been suggested, i. e., the first structure that features a T-shaped etching of the substrate and the second structure which is completely separated from the substrate through periodically positio… ▽ More In this study, a method for fabrication of superconducting microstructures that are partially or completely isolated from the substrate has been proposed. Two configurations of suspended microbridges have been suggested, i. e., the first structure that features a T-shaped etching of the substrate and the second structure which is completely separated from the substrate through periodically positioned supports. The creation of suspended structures is based on the principle of gas-phase etching of amorphous silicon oxide in a mixture of hydrogen fluoride (HF) and ethanol gases. In the course of the experiments, it has been discovered that suspending micro-structures in the configuration of a micro-bridge results in a slight reduction in superconducting characteristics, ranging from 10 to 15% of the initial parameters. It has also been demonstrated that the thermal coupling between the film and the substrate significantly affects the dissipation of thermal energy. The power dissipated into the substrate at room temperature can vary by up to 250 times based on the value of the micro-bridge undercutting. △ Less

Submitted 2 July, 2024; originally announced July 2024.

Influence ScN protective thin layer on the superconducting properties of ultrathin NbN films

Authors: N. V. Porokhov, A. A. Anikanov, A. P. Sirotina, E. A. Pershina, A. A. Shibalova, M. V. Shibalov, G. D. Diudbin, A. M. Mumlyakov, I. V. Trofimov, N. A. Vovk, M. A. Tarkhov

Abstract: The present study delves into exploring the impact of a thin protective layer of scandium nitride (ScN) on the superconductive properties of thin films of niobium nitride (NbN) generated through reactive magnetron deposition. This is the first time such an investigation has been carried out. The article offers a comprehensive investigation of the morphological, microstructural, and electrophysical… ▽ More The present study delves into exploring the impact of a thin protective layer of scandium nitride (ScN) on the superconductive properties of thin films of niobium nitride (NbN) generated through reactive magnetron deposition. This is the first time such an investigation has been carried out. The article offers a comprehensive investigation of the morphological, microstructural, and electrophysical features of thin films that have undergone high-temperature annealing in an oxygen-rich environment. The dependence of the critical transition temperature of the NbN thin film on the annealing temperature of the samples in an oxygen medium, with and without ScN coating, was determined. According to X-ray reflectometry studies, it has been observed that the ScN film serves as a protective layer, even when exposed to annealing temperatures of approximately 450°C, without significantly affecting the NbN layer density or thickness. It has been shown that adding a ScN coating to a thin NbN film increases its resistance to corrosive media compared to a film without the coating. △ Less

Submitted 13 May, 2024; v1 submitted 27 April, 2024; originally announced April 2024.

Superconducting single-photon detector integrated in DBR with optical microconnector for MM or SM fiber

Authors: Maksim V. Shibalov, Ilya M. Asharchuk, Evgeniy O. Epifanov, Igor V. Trofimov, Alexander M. Mumlyakov, Nikita V. Minaev, Yuri V. Anufriev, Michael A. Tarkhov

Abstract: This paper presents the development of a superconducting nanowire single-photon detector (SNSPD) integrated into a distributed Bragg reflector (DBR) with a design center wavelength of 830 nm and a width of 200 nm. This SNSPD is made of a superconducting niobium nitride (NbN) thin film that is produced using plasma-enhanced atomic layer deposition (PEALD). The DBR is made of 15 alternating layers o… ▽ More This paper presents the development of a superconducting nanowire single-photon detector (SNSPD) integrated into a distributed Bragg reflector (DBR) with a design center wavelength of 830 nm and a width of 200 nm. This SNSPD is made of a superconducting niobium nitride (NbN) thin film that is produced using plasma-enhanced atomic layer deposition (PEALD). The DBR is made of 15 alternating layers of silicon nitride and silicon oxide that are produced through plasma-enhanced chemical vapor deposition (PECVD). The reflection efficiency of the mirror is 90% at a wavelength of 830 nm. For sufficient optical coupling, an optical micro-connector optimized for multimode or single-mode optical fibers with a diameter of 128 μm was formed using two-photon polymerization techniques. The niobium nitride film was deposited onto the DBR surface in-situ in two separate reactors connected by a vacuum transfer. The in-situ technique of deposition of a superconducting niobium nitride film and a distributed Bragg reflector has allowed achieving a detection efficiency of 90% at a wavelength of 830 nm and a dark count rate of 10 s-1 at a temperature of 2.5 K. Additionally, the detector jitter was 50 ps. △ Less

Submitted 12 February, 2024; originally announced February 2024.

Enchanced reflectance SiN$_x$ / SiO$_x$ DBR mirror based on TEOS precursor fabricated by PECVD method

Authors: I. M. Asharchuk, M. V. Shibalov, A. M. Mumlyakov, P. A. Nekludova, G. D. Diudbin, E. V. Zenova, N. V. Minaev, A. A. Pavlov, M. A. Tarkhov

Abstract: In this study, we investigated the influence of silicon oxide roughness produced from the gas precursor monosilane (SiH$_4$) and the silicon-organic precursor tetraethoxysilane (TEOS) on the optical qualities of a distributed Bragg reflector (DBR). A significant influence of the precursors from which SiOx is deposited on the optical qualities of DBR mirrors is demonstrated in this study. It has be… ▽ More In this study, we investigated the influence of silicon oxide roughness produced from the gas precursor monosilane (SiH$_4$) and the silicon-organic precursor tetraethoxysilane (TEOS) on the optical qualities of a distributed Bragg reflector (DBR). A significant influence of the precursors from which SiOx is deposited on the optical qualities of DBR mirrors is demonstrated in this study. It has been shown experimentally that a mirror produced from the TEOS precursor is endowed with better qualities than a mirror produced using SiH4, that is, the reflectivity increased by 20% and optical losses decreased by half. The roughness average (Ra) of the SiN$_x$/SiO$_x$ / (TEOS) mirror surface decreased by a factor of five compared to that of the SiN$_x$/SiO$_x$ / (SiH4) mirror △ Less

Submitted 22 December, 2021; originally announced December 2021.