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Showing 1–28 of 28 results for author: Muhonen, J T

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  1. arXiv:2209.06029  [pdf, other

    physics.optics cond-mat.mes-hall quant-ph

    Single-laser feedback cooling of optomechanical resonators

    Authors: Arvind Shankar Kumar, Joonas Nätkinniemi, Henri Lyyra, Juha T. Muhonen

    Abstract: Measurement-based control has emerged as an important technique to prepare mechanical resonators in pure quantum states for applications in quantum information processing and quantum sensing. Conventionally this has required two separate channels, one for probing the motion and another one acting back on the resonator. In this work, we analyze and experimentally demonstrate a technique of single-l… ▽ More

    Submitted 28 September, 2022; v1 submitted 13 September, 2022; originally announced September 2022.

    Comments: 8 pages, 6 figure + supplementary with 4 pages and 4 figures

  2. arXiv:2209.05807  [pdf, other

    physics.optics cond-mat.mes-hall

    Quadrature-averaged homodyne detection for cavity parameter estimation

    Authors: Giada R. La Gala, Arvind S. Kumar, Rick Leijssen, Ewold Verhagen, Juha T. Muhonen

    Abstract: Balanced homodyne interferometry is a well-known detection technique that allows for sensitive characterization of light fields. Conventionally a homodyne interferometer is operated by locking the relative phase of a reference beam to the signal beam by means of an active feedback loop. A less often used method is to perform a slow continuous modulation of the reference beam arm length that corres… ▽ More

    Submitted 13 September, 2022; originally announced September 2022.

    Comments: 8 pages, 7 figures

  3. Strain effects in phosphorous bound exciton transitions in silicon

    Authors: Teemu Loippo, Antti Kanniainen, Juha T. Muhonen

    Abstract: Donor spin states in silicon are a promising candidate for quantum information processing. One possible donor spin readout mechanism is the bound exciton transition that can be excited optically and creates an electrical signal when it decays. This transition has been extensively studied in bulk, but in order to scale towards localized spin readout, microfabricated structures are needed for detect… ▽ More

    Submitted 10 January, 2023; v1 submitted 7 July, 2022; originally announced July 2022.

    Comments: 7 pages, 8 figures and a supplementary

    Journal ref: Phys. Rev. Materials 7, 016202 (2023)

  4. arXiv:2109.13856  [pdf, other

    physics.optics cond-mat.mes-hall cond-mat.mtrl-sci

    The effects of ion implantation damage to photonic crystal optomechanical resonators in silicon

    Authors: Cliona Shakespeare, Teemu Loippo, Henri Lyyra, Juha T. Muhonen

    Abstract: Optomechanical resonators were fabricated on a silicon-on-insulator (SOI) substrate that had been implanted with phosphorus donors. The resonators' mechanical and optical properties were then measured (at 6 kelvin and room temperature) before and after the substrate was annealed. All measured resonators survived the annealing and their mechanical linewidths decreased while their optical and mechan… ▽ More

    Submitted 28 September, 2021; originally announced September 2021.

  5. arXiv:2101.07882  [pdf

    cond-mat.mes-hall quant-ph

    Roadmap on quantum nanotechnologies

    Authors: Arne Laucht, Frank Hohls, Niels Ubbelohde, M Fernando Gonzalez-Zalba, David J Reilly, Søren Stobbe, Tim Schröder, Pasquale Scarlino, Jonne V Koski, Andrew Dzurak, Chih-Hwan Yang, Jun Yoneda, Ferdinand Kuemmeth, Hendrik Bluhm, Jarryd Pla, Charles Hill, Joe Salfi, Akira Oiwa, Juha T Muhonen, Ewold Verhagen, Matthew D LaHaye, Hyun Ho Kim, Adam W Tsen, Dimitrie Culcer, Attila Geresdi , et al. (4 additional authors not shown)

    Abstract: Quantum phenomena are typically observable at length and time scales smaller than those of our everyday experience, often involving individual particles or excitations. The past few decades have seen a revolution in the ability to structure matter at the nanoscale, and experiments at the single particle level have become commonplace. This has opened wide new avenues for exploring and harnessing qu… ▽ More

    Submitted 19 January, 2021; originally announced January 2021.

    Comments: Roadmap article with contributed sections and subsections on: 1. Metrology and sensing 2. Quantum light sources, cavities and detectors 3. Quantum computing with spins 4. Nano and opto-mechanics 5. Low-dimensional systems 6. Molecular devices 7. Nanoplasmonics (47 pages, 25 figures). Contains arXiv:1907.02625, arXiv:1907.07087, arXiv:2001.11119, arXiv:2011.13907

    Report number: NBI QDev 2021

    Journal ref: Nanotechnology 32, 162003 (2021)

  6. arXiv:1812.09720  [pdf, other

    quant-ph physics.optics

    State preparation and tomography of a nanomechanical resonator with fast light pulses

    Authors: Juha T. Muhonen, Giada R. La Gala, Rick Leijssen, Ewold Verhagen

    Abstract: Pulsed optomechanical measurements enable squeezing, non-classical state creation and backaction-free sensing. We demonstrate pulsed measurement of a cryogenic nanomechanical resonator with record precision close to the quantum regime. We use these to prepare thermally squeezed and purified conditional mechanical states, and to perform full state tomography. These demonstrations exploit large phot… ▽ More

    Submitted 23 December, 2018; originally announced December 2018.

    Comments: 12 pages, 7 figures

    Journal ref: Phys. Rev. Lett. 123, 113601 (2019)

  7. arXiv:1702.07991  [pdf, other

    quant-ph cond-mat.mes-hall

    Coherent control via weak measurements in $^{31}$P single-atom electron and nuclear spin qubits

    Authors: J. T. Muhonen, J. P. Dehollain, A. Laucht, S. Simmons, R. Kalra, F. E. Hudson, D. N. Jamieson, J. C. McCallum, K. M. Itoh, A. S. Dzurak, A. Morello

    Abstract: The understanding of weak measurements and interaction-free measurements has greatly expanded the conceptual and experimental toolbox to explore the quantum world. Here we demonstrate single-shot variable-strength weak measurements of the electron and the nuclear spin states of a single $^{31}$P donor in silicon. We first show how the partial collapse of the nuclear spin due to measurement can be… ▽ More

    Submitted 26 February, 2017; originally announced February 2017.

    Comments: 6 pages main text + 3 pages supplementary

    Journal ref: Phys. Rev. B 98, 155201 (2018)

  8. arXiv:1612.08072  [pdf, other

    quant-ph physics.optics

    Nonlinear cavity optomechanics with nanomechanical thermal fluctuations

    Authors: Rick Leijssen, Giada La Gala, Lars Freisem, Juha T. Muhonen, Ewold Verhagen

    Abstract: The inherently nonlinear interaction between light and motion in cavity optomechanical systems has experimentally been studied in a linearized description in all except highly driven cases. Here we demonstrate a nanoscale optomechanical system, in which the interaction between light and motion is so large (single-photon cooperativity $C_0 \approx 10^3$) that thermal motion induces optical frequenc… ▽ More

    Submitted 23 December, 2016; originally announced December 2016.

    Comments: 26 pages, 10 figures

    Journal ref: Nature Communications 8, 16024 (2017)

  9. arXiv:1608.07109  [pdf, other

    quant-ph cond-mat.mes-hall

    A single-atom quantum memory in silicon

    Authors: S. Freer, S. Simmons, A. Laucht, J. T. Muhonen, J. P. Dehollain, R. Kalra, F. A. Mohiyaddin, F. Hudson, K. M. Itoh, J. C. McCallum, D. N. Jamieson, A. S. Dzurak, A. Morello

    Abstract: Long coherence times and fast gate operations are desirable but often conflicting requirements for physical qubits. This conflict can be resolved by resorting to fast qubits for operations, and by storing their state in a `quantum memory' while idle. The $^{31}$P donor in silicon comes naturally equipped with a fast qubit (the electron spin) and a long-lived qubit (the $^{31}$P nuclear spin), coex… ▽ More

    Submitted 5 September, 2016; v1 submitted 25 August, 2016; originally announced August 2016.

    Comments: 14 pages, 6 figures. v2 has minor cosmetic improvements, and 11 additional references

  10. arXiv:1606.02856  [pdf, other

    cond-mat.mes-hall quant-ph

    Optimization of a solid-state electron spin qubit using Gate Set Tomography

    Authors: Juan P. Dehollain, Juha T. Muhonen, Robin Blume-Kohout, Kenneth M. Rudinger, John King Gamble, Erik Nielsen, Arne Laucht, Stephanie Simmons, Rachpon Kalra, Andrew S. Dzurak, Andrea Morello

    Abstract: State of the art qubit systems are reaching the gate fidelities required for scalable quantum computation architectures. Further improvements in the fidelity of quantum gates demands characterization and benchmarking protocols that are efficient, reliable and extremely accurate. Ideally, a benchmarking protocol should also provide information on how to rectify residual errors. Gate Set Tomography… ▽ More

    Submitted 16 June, 2016; v1 submitted 9 June, 2016; originally announced June 2016.

    Comments: 14 pages, 4 figures. v2: Updated references and included ancillary files

    Journal ref: New Journal of Physics 18, 103018 (2016)

  11. arXiv:1606.02380  [pdf, other

    cond-mat.mes-hall quant-ph

    Breaking the rotating wave approximation for a strongly-driven, dressed, single electron spin

    Authors: Arne Laucht, Stephanie Simmons, Rachpon Kalra, Guilherme Tosi, Juan P. Dehollain, Juha T. Muhonen, Solomon Freer, Fay E. Hudson, Kohei M. Itoh, David N. Jamieson, Jeffrey C. McCallum, Andrew S. Dzurak, Andrea Morello

    Abstract: We investigate the dynamics of a strongly-driven, microwave-dressed, donor-bound electron spin qubit in silicon. A resonant oscillating magnetic field $B_1$ is used to dress the electron spin and create a new quantum system with a level splitting proportional to $B_1$. The dressed two-level system can then be driven by modulating the detuning $Δν$ between the microwave source frequency… ▽ More

    Submitted 1 September, 2016; v1 submitted 7 June, 2016; originally announced June 2016.

    Journal ref: Phys. Rev. B 94, 161302 (2016)

  12. arXiv:1603.04800  [pdf, other

    cond-mat.mes-hall quant-ph

    A Dressed Spin Qubit in Silicon

    Authors: Arne Laucht, Rachpon Kalra, Stephanie Simmons, Juan P. Dehollain, Juha T. Muhonen, Fahd A. Mohiyaddin, Solomon Freer, Fay E. Hudson, Kohei M. Itoh, David N. Jamieson, Jeffrey C. McCallum, Andrew S. Dzurak, A. Morello

    Abstract: Coherent dressing of a quantum two-level system provides access to a new quantum system with improved properties - a different and easily tuneable level splitting, faster control, and longer coherence times. In our work we investigate the properties of the dressed, donor-bound electron spin in silicon, and probe its potential for the use as quantum bit in scalable architectures. The two dressed sp… ▽ More

    Submitted 15 March, 2016; originally announced March 2016.

  13. arXiv:1603.03146  [pdf, other

    physics.ins-det cond-mat.mes-hall

    Vibration-induced electrical noise in a cryogen-free dilution refrigerator: characterization, mitigation, and impact on qubit coherence

    Authors: Rachpon Kalra, Arne Laucht, Juan P. Dehollain, Daniel Bar, Solomon Freer, Stephanie Simmons, Juha T. Muhonen, Andrea Morello

    Abstract: Cryogen-free low-temperature setups are becoming more prominent in experimental science due to their convenience and reliability, and concern about the increasing scarcity of helium as a natural resource. Despite not having any moving parts at the cold end, pulse tube cryocoolers introduce vibrations that can be detrimental to the experiments. We characterize the coupling of these vibrations to th… ▽ More

    Submitted 7 July, 2016; v1 submitted 9 March, 2016; originally announced March 2016.

    Comments: 13 pages, 10 figures

    Journal ref: Review of Scientific Instruments 87, 073905 (2016)

  14. arXiv:1504.03112  [pdf, other

    cond-mat.mes-hall quant-ph

    Bell's inequality violation with spins in silicon

    Authors: Juan P. Dehollain, Stephanie Simmons, Juha T. Muhonen, Rachpon Kalra, Arne Laucht, Fay Hudson, Kohei M. Itoh, David N. Jamieson, Jeffrey C. McCallum, Andrew S. Dzurak, Andrea Morello

    Abstract: Bell's theorem sets a boundary between the classical and quantum realms, by providing a strict proof of the existence of entangled quantum states with no classical counterpart. An experimental violation of Bell's inequality demands simultaneously high fidelities in the preparation, manipulation and measurement of multipartite quantum entangled states. For this reason the Bell signal has been tagge… ▽ More

    Submitted 13 April, 2015; originally announced April 2015.

    Comments: 10 pages, 3 figures, 1 table, 4 extended data figures

  15. arXiv:1503.05985  [pdf, other

    cond-mat.mes-hall quant-ph

    Electrically controlling single spin qubits in a continuous microwave field

    Authors: Arne Laucht, Juha T. Muhonen, Fahd A. Mohiyaddin, Rachpon Kalra, Juan P. Dehollain, Solomon Freer, Fay E. Hudson, Menno Veldhorst, Rajib Rahman, Gerhard Klimeck, Kohei M. Itoh, David N. Jamieson, Jeffrey C. McCallum, Andrew S. Dzurak, Andrea Morello

    Abstract: Large-scale quantum computers must be built upon quantum bits that are both highly coherent and locally controllable. We demonstrate the quantum control of the electron and the nuclear spin of a single 31P atom in silicon, using a continuous microwave magnetic field together with nanoscale electrostatic gates. The qubits are tuned into resonance with the microwave field by a local change in electr… ▽ More

    Submitted 19 March, 2015; originally announced March 2015.

    Comments: Main paper: 13 pages, 4 figures. Supplementary information: 25 pages, 13 figures

    Journal ref: Science Advances 1, 1500022 (2015)

  16. arXiv:1411.5760  [pdf, other

    cond-mat.mes-hall quant-ph

    A Two Qubit Logic Gate in Silicon

    Authors: M. Veldhorst, C. H. Yang, J. C. C. Hwang, W. Huang, J. P. Dehollain, J. T. Muhonen, S. Simmons, A. Laucht, F. E. Hudson, K. M. Itoh, A. Morello, A. S. Dzurak

    Abstract: Quantum computation requires qubits that can be coupled and realized in a scalable manner, together with universal and high-fidelity one- and two-qubit logic gates \cite{DiVincenzo2000, Loss1998}. Strong effort across several fields have led to an impressive array of qubit realizations, including trapped ions \cite{Brown2011}, superconducting circuits \cite{Barends2014}, single photons\cite{Kok200… ▽ More

    Submitted 20 November, 2014; originally announced November 2014.

    Journal ref: Full details, including two-qubit readout after CNOT operation, are in the published version: Nature 526, 410-414 (2015)

  17. arXiv:1410.2338  [pdf, other

    quant-ph cond-mat.mes-hall

    Quantifying the quantum gate fidelity of single-atom spin qubits in silicon by randomized benchmarking

    Authors: J. T. Muhonen, A. Laucht, S. Simmons, J. P. Dehollain, R. Kalra, F. E. Hudson, S. Freer, K. M. Itoh, D. N. Jamieson, J. C. McCallum, A. S. Dzurak, A. Morello

    Abstract: Building upon the demonstration of coherent control and single-shot readout of the electron and nuclear spins of individual 31-P atoms in silicon, we present here a systematic experimental estimate of quantum gate fidelities using randomized benchmarking of 1-qubit gates in the Clifford group. We apply this analysis to the electron and the ionized 31-P nucleus of a single P donor in isotopically p… ▽ More

    Submitted 8 October, 2014; originally announced October 2014.

    Journal ref: J. Phys.: Condens. Matter 27 (2015) 154205

  18. arXiv:1407.1950  [pdf, other

    cond-mat.mes-hall

    An addressable quantum dot qubit with fault-tolerant control fidelity

    Authors: M. Veldhorst, J. C. C. Hwang, C. H. Yang, A. W. Leenstra, B. de Ronde, J. P. Dehollain, J. T. Muhonen, F. E. Hudson, K. M. Itoh, A. Morello, A. S. Dzurak

    Abstract: Exciting progress towards spin-based quantum computing has recently been made with qubits realized using nitrogen-vacancy (N-V) centers in diamond and phosphorus atoms in silicon, including the demonstration of long coherence times made possible by the presence of spin-free isotopes of carbon and silicon. However, despite promising single-atom nanotechnologies, there remain substantial challenges… ▽ More

    Submitted 8 July, 2014; originally announced July 2014.

    Journal ref: Nature Nanotechnology 9, 981 (2014)

  19. arXiv:1405.4119  [pdf

    cond-mat.mes-hall

    Superconducting platinum silicide for electron cooling in silicon

    Authors: M J Prest, J S Richardson-Bullock, Q T Zhao, J T Muhonen, D Gunnarsson, M Prunnila, V A Shah, T E Whall, E H C Parker, D R Leadley

    Abstract: We demonstrate electron cooling in silicon using platinum silicide as a superconductor contact to selectively remove the highest energy electrons. The superconducting critical temperature of bulk PtSi is reduced from around 1 K to 0.79 K using a thin film (10 nm) of PtSi, which enhances cooling performance at lower temperatures and enables electron cooling to be demonstrated from 100 mK to 50 mK.

    Submitted 16 May, 2014; originally announced May 2014.

    Comments: 4 pages, 4 figures

  20. arXiv:1402.7148  [pdf, other

    cond-mat.mes-hall quant-ph

    Single-shot readout and relaxation of singlet/triplet states in exchange-coupled $^{31}$P electron spins in silicon

    Authors: Juan P. Dehollain, Juha T. Muhonen, Kuan Y. Tan, André Saraiva, David N. Jamieson, Andrew S. Dzurak, Andrea Morello

    Abstract: We present the experimental observation of a large exchange coupling $J \approx 300$ $μ$eV between two $^{31}$P electron spin qubits in silicon. The singlet and triplet states of the coupled spins are monitored in real time by a Single-Electron Transistor, which detects ionization from tunnel-rate-dependent processes in the coupled spin system, yielding single-shot readout fidelities above 95%. Th… ▽ More

    Submitted 11 June, 2014; v1 submitted 28 February, 2014; originally announced February 2014.

    Comments: Main: 5 pages, 4 figures. Supp.Mat: 1 page, 1 figure. Final version with journal reference

    Journal ref: Phys. Rev. Lett. 112, 236801 (2014)

  21. arXiv:1402.7140  [pdf, other

    cond-mat.mes-hall quant-ph

    Storing quantum information for 30 seconds in a nanoelectronic device

    Authors: Juha T. Muhonen, Juan P. Dehollain, Arne Laucht, Fay E. Hudson, Takeharu Sekiguchi, Kohei M. Itoh, David N. Jamieson, Jeffrey C. McCallum, Andrew S. Dzurak, Andrea Morello

    Abstract: The spin of an electron or a nucleus in a semiconductor [1] naturally implements the unit of quantum information -- the qubit -- while providing a technological link to the established electronics industry [2]. The solid-state environment, however, may provide deleterious interactions between the qubit and the nuclear spins of surrounding atoms [3], or charge and spin fluctuators in defects, oxide… ▽ More

    Submitted 28 February, 2014; originally announced February 2014.

    Journal ref: Nature Nanotechnology 9, 986 (2014)

  22. arXiv:1312.4647  [pdf, other

    quant-ph cond-mat.mes-hall

    High-fidelity adiabatic inversion of a $^{31}\mathrm{P}$ electron spin qubit in natural silicon

    Authors: Arne Laucht, Rachpon Kalra, Juha T. Muhonen, Juan P. Dehollain, Fahd A. Mohiyaddin, Fay Hudson, Jeffrey C. McCallum, David N. Jamieson, Andrew S. Dzurak, Andrea Morello

    Abstract: The main limitation to the high-fidelity quantum control of spins in semiconductors is the presence of strongly fluctuating fields arising from the nuclear spin bath of the host material. We demonstrate here a substantial improvement in single-qubit gate fidelities for an electron spin qubit bound to a $^{31}$P atom in natural silicon, by applying adiabatic inversion instead of narrow-band pulses.… ▽ More

    Submitted 17 December, 2013; originally announced December 2013.

    Comments: 4 pages, 2 figures

  23. arXiv:1212.2755  [pdf, ps, other

    cond-mat.supr-con

    Single quasiparticle excitation dynamics on a superconducting island

    Authors: V. F. Maisi, S. V. Lotkhov, A. Kemppinen, A. Heimes, J. T. Muhonen, J. P. Pekola

    Abstract: We investigate single quasiparticle excitation dynamics on a small superconducting aluminum island connected to normal metallic leads by tunnel junctions. We find the island to be free of excitations within the measurement resolution allowing us to determine Cooper pair breaking rate to be less than 3 kHz. By tuning the Coulomb energy of the island to have an odd number of electrons, one of them r… ▽ More

    Submitted 22 January, 2013; v1 submitted 12 December, 2012; originally announced December 2012.

    Comments: Added abstract and missing Δ's to Fig. 1. Reformulated text

  24. arXiv:1203.5100  [pdf, other

    cond-mat.mes-hall cond-mat.supr-con

    Micrometre-scale refrigerators

    Authors: Juha T. Muhonen, Matthias Meschke, Jukka P. Pekola

    Abstract: A superconductor with a gap in the density of states or a quantum dot with discrete energy levels is a central building block in realizing an electronic on-chip cooler. They can work as energy filters, allowing only hot quasiparticles to tunnel out from the electrode to be cooled. This principle has been employed experimentally since the early 1990s in investigations and demonstrations of micromet… ▽ More

    Submitted 21 March, 2012; originally announced March 2012.

    Journal ref: Rep. Prog. Phys. 75, 046501 (2012)

  25. arXiv:1111.0465  [pdf

    cond-mat.mes-hall

    Strain enhanced electron cooling in a degenerately doped semiconductor

    Authors: M. J. Prest, J. T. Muhonen, M. Prunnila, D. Gunnarsson, V. A. Shah, J. S. Richardson-Bullock, A. Dobbie, M. Myronov, R. J. H. Morris, T. E. Whall, E. H. C. Parker, D. R. Leadley

    Abstract: Enhanced electron cooling is demonstrated in a strained-silicon/superconductor tunnel junction refrigerator of volume 40 um^3. The electron temperature is reduced from 300 mK to 174 mK, with the enhancement over an unstrained silicon control (300 mK to 258 mK) being attributed to the smaller electron-phonon coupling in the strained case. Modeling and the resulting predictions of silicon-based cool… ▽ More

    Submitted 18 November, 2011; v1 submitted 2 November, 2011; originally announced November 2011.

    Comments: 3 pages, 5 figures

    Journal ref: Applied Physics Letters 99, 251908 (2011)

  26. arXiv:1108.1544  [pdf, other

    cond-mat.supr-con cond-mat.mes-hall

    Magnetic-Field-Induced Stabilization of Non-Equilibrium Superconductivity

    Authors: J. T. Peltonen, J. T. Muhonen, M. Meschke, N. B. Kopnin, J. P. Pekola

    Abstract: A small magnetic field is found to enhance relaxation processes in a superconductor thus stabilizing superconductivity in non-equilibrium conditions. In a normal-metal (N) - insulator - superconductor (S) tunnel junction, applying a field of the order of 100 μT leads to significantly improved cooling of the N island by quasiparticle (QP) tunneling. These findings are attributed to faster QP relaxa… ▽ More

    Submitted 7 August, 2011; originally announced August 2011.

    Comments: 4 pages, 3 figures

  27. arXiv:1101.5889  [pdf, other

    cond-mat.mes-hall

    Strain control of electron-phonon energy loss rate in many-valley semiconductors

    Authors: J. T. Muhonen, M. J. Prest, M. Prunnila, D. Gunnarsson, V. A. Shah, A. Dobbie, M. Myronov, R. J. H. Morris, T. E. Whall, E. H. C. Parker, D. R. Leadley

    Abstract: We demonstrate significant modification of the electron-phonon energy loss rate in a many-valley semiconductor system due to lattice mismatch induced strain. We show that the thermal conductance from the electron system to the phonon bath in strained n + Si, at phonon temperatures between 200 mK and 450 mK, is more than an order of magnitude lower than that for a similar unstrained sample.

    Submitted 31 January, 2011; originally announced January 2011.

    Journal ref: Appl. Phys. Lett. 98, 182103 (2011)

  28. arXiv:0807.0283  [pdf, ps, other

    cond-mat.mes-hall

    Electronic cooling of a submicron-sized metallic beam

    Authors: J. T. Muhonen, A. O. Niskanen, M. Meschke, Yu. A. Pashkin, J. S. Tsai, L. Sainiemi, S. Franssila, J. P. Pekola

    Abstract: We demonstrate electronic cooling of a suspended AuPd island using superconductor-insulator-normal metal tunnel junctions. This was achieved by develo** a simple fabrication method for reliably releasing narrow submicron sized metal beams. The process is based on reactive ion etching and uses a conducting substrate to avoid charge-up damage and is compatible with e.g. conventional e-beam litho… ▽ More

    Submitted 26 September, 2008; v1 submitted 2 July, 2008; originally announced July 2008.

    Comments: 4 pages, 3 figures

    Journal ref: Appl. Phys. Lett. 94, 073101 (2009).