Showing 1–1 of 1 results for author: McGuinness, C M L P

Stabilizing shallow color centers in diamond created by nitrogen delta-do** using SF$_6$ plasma treatment

Authors: Christian Osterkamp, Johannes Lang, Jochen Scharpf, Christoph Müller Liam Paul McGuinness, Thomas Diemant, R. J. Behm, Boris Naydenov, Fedor Jelezko

Abstract: Here we report the fabrication of stable, shallow (< 5 nm) nitrogen-vacancy (NV) centers in diamond by nitrogen delta do** at the last stage of the chemical vapor deposition (CVD) growth process. The NVs are stabilized after treating the diamond in $SF_6$ plasma, otherwise the color centers are not observed, suggesting a strong influence from the surface. X-Ray photoelectron spectroscopy measure… ▽ More Here we report the fabrication of stable, shallow (< 5 nm) nitrogen-vacancy (NV) centers in diamond by nitrogen delta do** at the last stage of the chemical vapor deposition (CVD) growth process. The NVs are stabilized after treating the diamond in $SF_6$ plasma, otherwise the color centers are not observed, suggesting a strong influence from the surface. X-Ray photoelectron spectroscopy measurements show the presence of only fluorine atoms on the surface, in contrast to previous studies, and suggests very good surface coverage. We managed to detect hydrogen nuclear magnetic resonance signal from protons in the immersion oil, revealing a depth of the NVs of about 5 nm △ Less

Submitted 23 March, 2015; originally announced March 2015.

Comments: This is the version submitted to APL. The published version has some minor changes

Journal ref: Appl. Phys. Lett. 106, 113109 (2015)