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Wafer-scale uniformity improvement of Dolan-bridge Josephson junction by shadow evaporation bias correction
Authors:
Daria A. Moskaleva,
Nikita D. Korshakov,
Dmitry O. Moskalev,
Anastasiya A. Solovyova,
Alexey R. Matanin,
Elizaveta I. Malevannaya,
Nikita S. Smirnov,
Maksim I. Teleganov,
Yuri V. Panfilov,
Ilya A. Rodionov
Abstract:
One of the practical limitations of solid-state superconducting quantum processors technology is frequency crowding due to low qubits fabrication reproducibility. Josephson junction 100 nm-scale nonlinear inductance of the qubits still suffers from Dolan-bridge shadow evaporation process. Here, we report on a robust wafer-scale Al/AlOx/Al Dolan-bridge Josephson junction (JJ) process using prelimin…
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One of the practical limitations of solid-state superconducting quantum processors technology is frequency crowding due to low qubits fabrication reproducibility. Josephson junction 100 nm-scale nonlinear inductance of the qubits still suffers from Dolan-bridge shadow evaporation process. Here, we report on a robust wafer-scale Al/AlOx/Al Dolan-bridge Josephson junction (JJ) process using preliminary shadow evaporation bias resist mask correction and comprehensive oxidation optimization. We introduce topology correction model for two-layer resist mask biasing at a wafer-scale, which takes into account an evaporation source geometry. It results in Josephson junction area variation coefficient improvement down to 1.1% for the critical dimensions from 130x170 nm2 to 130x670 nm2 over 70x70 mm2 (49 cm2) wafer working area. Next, we investigate JJ oxidation process (oxidation method, pressure and time) and its impact on a room temperature resistance reproducibility. Finally, we combine both shadow evaporation bias correction and oxidation best practices for 4-inch wafers improving room temperature resistance variation coefficient down to 6.0/5.2/4.1% for 0.025 μm2 JJ area and 4.0/3.4/2.3% for 0.090 μm2 JJ area for 49/25/16 cm2 wafer working area correspondingly. The proposed model and oxidation method can be useful for robust wafer-scale superconducting quantum processors fabrication.
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Submitted 15 April, 2024; v1 submitted 4 March, 2024;
originally announced March 2024.
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Sputtered NbN Films for Ultrahigh Performance Superconducting Nanowire Single-Photon Detectors
Authors:
Ilya A. Stepanov,
Aleksandr S. Baburin,
Danil V. Kushnev,
Evgeniy V. Sergeev,
Oksana I. Shmonina,
Aleksey R. Matanin,
Vladimir V. Echeistov,
Ilya A. Ryzhikov,
Yuri V. Panfilov,
Ilya A. Rodionov
Abstract:
Nowadays ultrahigh performance superconducting nanowire single-photon detectors are the key elements in a variety of devices from biological research to quantum communications and computing. Accurate tuning of superconducting material properties is a powerful resource for fabricating single-photon detectors with a desired properties. Here, we report on the major theoretical relations between ultra…
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Nowadays ultrahigh performance superconducting nanowire single-photon detectors are the key elements in a variety of devices from biological research to quantum communications and computing. Accurate tuning of superconducting material properties is a powerful resource for fabricating single-photon detectors with a desired properties. Here, we report on the major theoretical relations between ultrathin niobium nitride (NbN) films properties and superconducting nanowire single-photon detectors characteristics, as well as ultrathin NbN films properties dependence on reactive magnetron sputtering recipes. Based on this study we formulate the exact requirements to ultrathin NbN films for ultrahigh performance superconducting nanowire single-photon detectors. Then, we experimentally study ultrathin NbN films properties (morphology, crystalline structure, critical temperature, sheet resistance) on silicon, sapphire, silicon dioxide and silicon nitride substrates sputtered with various recipes. We demonstrate ultrathin NbN films (obtained with more than 100 films deposition) with a wide range of critical temperature from 2.5 to 12.1 K and sheet resistance from 285 to 2000 ~$Ω$/sq, as well as investigate a sheet resistance evolution over for more than 40\% within two years. Finally, we found out that one should use ultrathin NbN films with specific critical temperature near 9 K and sheet resistance of 400 ~$Ω$/sq for ultrahigh performance SNSPD.
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Submitted 28 November, 2023;
originally announced November 2023.
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High-Q trenched aluminum coplanar resonators with an ultrasonic edge microcutting for superconducting quantum devices
Authors:
E. V. Zikiy,
A. I. Ivanov,
N. S. Smirnov,
D. O. Moskalev,
V. I. Polozov,
A. R. Matanin,
E. I. Malevannaya,
V. V. Echeistov,
T. G. Konstantinova,
I. A. Rodionov
Abstract:
Dielectric losses are one of the key factors limiting the coherence of superconducting qubits. The impact of materials and fabrication steps on dielectric losses can be evaluated using coplanar waveguide (CPW) microwave resonators. Here, we report on superconducting CPW microwave resonators with internal quality factors systematically exceeding 5x106 at high powers and 2x106 (with the best value o…
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Dielectric losses are one of the key factors limiting the coherence of superconducting qubits. The impact of materials and fabrication steps on dielectric losses can be evaluated using coplanar waveguide (CPW) microwave resonators. Here, we report on superconducting CPW microwave resonators with internal quality factors systematically exceeding 5x106 at high powers and 2x106 (with the best value of 4.4x106) at low power. Such performance is demonstrated for 100-nm-thick aluminum resonators with 7-10.5 um center trace on high-resistivity silicon substrates commonly used in quantum Josephson junction circuits. We investigate internal quality factors of the resonators with both dry and wet aluminum etching, as well as deep and isotropic reactive ion etching of silicon substrate. Josephson junction compatible CPW resonators fabrication process with both airbridges and silicon substrate etching is proposed. Finally, we demonstrate the effect of airbridges positions and extra process steps on the overall dielectric losses. The best quality fa ctors are obtained for the wet etched aluminum resonators and isotropically removed substrate with the proposed ultrasonic metal edge microcutting.
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Submitted 28 June, 2023;
originally announced June 2023.
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Robust cryogenic matched low-pass coaxial filters for quantum computing applications
Authors:
Andrey A. Samoylov,
Anton I. Ivanov,
Vladimir V. Echeistov,
Elizaveta I. Malevannaya,
Aleksei R. Matanin,
Nikita S. Smirnov,
Victor I. Polozov,
Ilya A. Rodionov
Abstract:
Electromagnetic noise is one of the key external factors decreasing superconducting qubits coherence. Matched coaxial filters can prevent microwave and IR photons negative influence on superconducting quantum circuits. Here, we report on design and fabrication route of matched low-pass coaxial filters for noise-sensitive measurements at milliKelvin temperatures. A robust transmission coefficient w…
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Electromagnetic noise is one of the key external factors decreasing superconducting qubits coherence. Matched coaxial filters can prevent microwave and IR photons negative influence on superconducting quantum circuits. Here, we report on design and fabrication route of matched low-pass coaxial filters for noise-sensitive measurements at milliKelvin temperatures. A robust transmission coefficient with designed linear absorption (-1dB/GHz) and ultralow reflection losses less than -20 dB up to 20 GHz is achieved. We present a mathematical model for evaluating and predicting filters transmission parameters depending on their dimensions. It is experimentally approved on two filters prototypes different lengths with compound of Cu powder and Stycast commercial resin demonstrating excellent matching. The presented design and assembly route are universal for various compounds and provide high repeatability of geometrical and microwave characteristics. Finally, we demonstrate three filters with almost equal reflection and transmission characteristics in the range from 0 to 20 GHz, which is quite useful to control multiple channel superconducting quantum circuits.
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Submitted 27 October, 2022;
originally announced October 2022.
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Towards highly efficient broadband superconducting quantum memory
Authors:
A. R. Matanin,
K. I. Gerasimov,
E. S. Moiseev,
N. S. Smirnov,
A. I. Ivanov,
E. I. Malevannaya,
V. I. Polozov,
E. V. Zikiy,
A. A. Samoilov,
I. A. Rodionov,
S. A. Moiseev
Abstract:
Microwave quantum memory promises advanced capabilities for noisy intermediate-scale superconducting quantum computers. Existing approaches to microwave quantum memory lack complete combination of high efficiency, long storage time, noiselessness and multi-qubit capacity. Here we report an efficient microwave broadband multimode quantum memory. The memory stores two spectral modes of single photon…
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Microwave quantum memory promises advanced capabilities for noisy intermediate-scale superconducting quantum computers. Existing approaches to microwave quantum memory lack complete combination of high efficiency, long storage time, noiselessness and multi-qubit capacity. Here we report an efficient microwave broadband multimode quantum memory. The memory stores two spectral modes of single photon level microwave radiation in on-chip system of eight coplanar superconducting resonators. Single mode storage shows a power efficiency of up to $60\pm 3\%$ at single photon energy and more than $73\pm 3\%$ at higher intensity. The demonstrated efficiency is an order of magnitude larger than the previously reported multimode microwave quantum memory. The noiseless character of the storage is confirmed by coherent state quantum process tomography. The demonstrated results pave the way to further increase in efficiency and hence building a practical multimode microwave memory for superconducting quantum circuits.
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Submitted 3 March, 2023; v1 submitted 28 July, 2022;
originally announced July 2022.
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Topological photon pairs in a superconducting quantum metamaterial
Authors:
Ilya S. Besedin,
Maxim A. Gorlach,
Nikolay N. Abramov,
Ivan Tsitsilin,
Ilya N. Moskalenko,
Alina A. Dobronosova,
Dmitry O. Moskalev,
Alexey R. Matanin,
Nikita S. Smirnov,
Ilya A. Rodionov,
Alexander N. Poddubny,
Alexey V. Ustinov
Abstract:
Recent discoveries in topological physics hold a promise for disorder-robust quantum systems and technologies. Topological states provide the crucial ingredient of such systems featuring increased robustness to disorder and imperfections. Here, we use an array of superconducting qubits to engineer a one-dimensional topologically nontrivial quantum metamaterial. By performing microwave spectroscopy…
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Recent discoveries in topological physics hold a promise for disorder-robust quantum systems and technologies. Topological states provide the crucial ingredient of such systems featuring increased robustness to disorder and imperfections. Here, we use an array of superconducting qubits to engineer a one-dimensional topologically nontrivial quantum metamaterial. By performing microwave spectroscopy of the fabricated array, we experimentally observe the spectrum of elementary excitations. We find not only the single-photon topological states but also the bands of exotic bound photon pairs arising due to the inherent anharmonicity of qubits. Furthermore, we detect the signatures of the two-photon bound edge-localized state which hints towards interaction-induced localization in our system. Our work demonstrates an experimental implementation of the topological model with attractive photon-photon interaction in a quantum metamaterial.
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Submitted 23 June, 2020;
originally announced June 2020.
