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Wafer-scale uniformity improvement of Dolan-bridge Josephson junction by shadow evaporation bias correction
Authors:
Daria A. Moskaleva,
Nikita D. Korshakov,
Dmitry O. Moskalev,
Anastasiya A. Solovyova,
Alexey R. Matanin,
Elizaveta I. Malevannaya,
Nikita S. Smirnov,
Maksim I. Teleganov,
Yuri V. Panfilov,
Ilya A. Rodionov
Abstract:
One of the practical limitations of solid-state superconducting quantum processors technology is frequency crowding due to low qubits fabrication reproducibility. Josephson junction 100 nm-scale nonlinear inductance of the qubits still suffers from Dolan-bridge shadow evaporation process. Here, we report on a robust wafer-scale Al/AlOx/Al Dolan-bridge Josephson junction (JJ) process using prelimin…
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One of the practical limitations of solid-state superconducting quantum processors technology is frequency crowding due to low qubits fabrication reproducibility. Josephson junction 100 nm-scale nonlinear inductance of the qubits still suffers from Dolan-bridge shadow evaporation process. Here, we report on a robust wafer-scale Al/AlOx/Al Dolan-bridge Josephson junction (JJ) process using preliminary shadow evaporation bias resist mask correction and comprehensive oxidation optimization. We introduce topology correction model for two-layer resist mask biasing at a wafer-scale, which takes into account an evaporation source geometry. It results in Josephson junction area variation coefficient improvement down to 1.1% for the critical dimensions from 130x170 nm2 to 130x670 nm2 over 70x70 mm2 (49 cm2) wafer working area. Next, we investigate JJ oxidation process (oxidation method, pressure and time) and its impact on a room temperature resistance reproducibility. Finally, we combine both shadow evaporation bias correction and oxidation best practices for 4-inch wafers improving room temperature resistance variation coefficient down to 6.0/5.2/4.1% for 0.025 μm2 JJ area and 4.0/3.4/2.3% for 0.090 μm2 JJ area for 49/25/16 cm2 wafer working area correspondingly. The proposed model and oxidation method can be useful for robust wafer-scale superconducting quantum processors fabrication.
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Submitted 15 April, 2024; v1 submitted 4 March, 2024;
originally announced March 2024.
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High-Q trenched aluminum coplanar resonators with an ultrasonic edge microcutting for superconducting quantum devices
Authors:
E. V. Zikiy,
A. I. Ivanov,
N. S. Smirnov,
D. O. Moskalev,
V. I. Polozov,
A. R. Matanin,
E. I. Malevannaya,
V. V. Echeistov,
T. G. Konstantinova,
I. A. Rodionov
Abstract:
Dielectric losses are one of the key factors limiting the coherence of superconducting qubits. The impact of materials and fabrication steps on dielectric losses can be evaluated using coplanar waveguide (CPW) microwave resonators. Here, we report on superconducting CPW microwave resonators with internal quality factors systematically exceeding 5x106 at high powers and 2x106 (with the best value o…
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Dielectric losses are one of the key factors limiting the coherence of superconducting qubits. The impact of materials and fabrication steps on dielectric losses can be evaluated using coplanar waveguide (CPW) microwave resonators. Here, we report on superconducting CPW microwave resonators with internal quality factors systematically exceeding 5x106 at high powers and 2x106 (with the best value of 4.4x106) at low power. Such performance is demonstrated for 100-nm-thick aluminum resonators with 7-10.5 um center trace on high-resistivity silicon substrates commonly used in quantum Josephson junction circuits. We investigate internal quality factors of the resonators with both dry and wet aluminum etching, as well as deep and isotropic reactive ion etching of silicon substrate. Josephson junction compatible CPW resonators fabrication process with both airbridges and silicon substrate etching is proposed. Finally, we demonstrate the effect of airbridges positions and extra process steps on the overall dielectric losses. The best quality fa ctors are obtained for the wet etched aluminum resonators and isotropically removed substrate with the proposed ultrasonic metal edge microcutting.
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Submitted 28 June, 2023;
originally announced June 2023.
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Robust cryogenic matched low-pass coaxial filters for quantum computing applications
Authors:
Andrey A. Samoylov,
Anton I. Ivanov,
Vladimir V. Echeistov,
Elizaveta I. Malevannaya,
Aleksei R. Matanin,
Nikita S. Smirnov,
Victor I. Polozov,
Ilya A. Rodionov
Abstract:
Electromagnetic noise is one of the key external factors decreasing superconducting qubits coherence. Matched coaxial filters can prevent microwave and IR photons negative influence on superconducting quantum circuits. Here, we report on design and fabrication route of matched low-pass coaxial filters for noise-sensitive measurements at milliKelvin temperatures. A robust transmission coefficient w…
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Electromagnetic noise is one of the key external factors decreasing superconducting qubits coherence. Matched coaxial filters can prevent microwave and IR photons negative influence on superconducting quantum circuits. Here, we report on design and fabrication route of matched low-pass coaxial filters for noise-sensitive measurements at milliKelvin temperatures. A robust transmission coefficient with designed linear absorption (-1dB/GHz) and ultralow reflection losses less than -20 dB up to 20 GHz is achieved. We present a mathematical model for evaluating and predicting filters transmission parameters depending on their dimensions. It is experimentally approved on two filters prototypes different lengths with compound of Cu powder and Stycast commercial resin demonstrating excellent matching. The presented design and assembly route are universal for various compounds and provide high repeatability of geometrical and microwave characteristics. Finally, we demonstrate three filters with almost equal reflection and transmission characteristics in the range from 0 to 20 GHz, which is quite useful to control multiple channel superconducting quantum circuits.
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Submitted 27 October, 2022;
originally announced October 2022.
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Towards highly efficient broadband superconducting quantum memory
Authors:
A. R. Matanin,
K. I. Gerasimov,
E. S. Moiseev,
N. S. Smirnov,
A. I. Ivanov,
E. I. Malevannaya,
V. I. Polozov,
E. V. Zikiy,
A. A. Samoilov,
I. A. Rodionov,
S. A. Moiseev
Abstract:
Microwave quantum memory promises advanced capabilities for noisy intermediate-scale superconducting quantum computers. Existing approaches to microwave quantum memory lack complete combination of high efficiency, long storage time, noiselessness and multi-qubit capacity. Here we report an efficient microwave broadband multimode quantum memory. The memory stores two spectral modes of single photon…
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Microwave quantum memory promises advanced capabilities for noisy intermediate-scale superconducting quantum computers. Existing approaches to microwave quantum memory lack complete combination of high efficiency, long storage time, noiselessness and multi-qubit capacity. Here we report an efficient microwave broadband multimode quantum memory. The memory stores two spectral modes of single photon level microwave radiation in on-chip system of eight coplanar superconducting resonators. Single mode storage shows a power efficiency of up to $60\pm 3\%$ at single photon energy and more than $73\pm 3\%$ at higher intensity. The demonstrated efficiency is an order of magnitude larger than the previously reported multimode microwave quantum memory. The noiseless character of the storage is confirmed by coherent state quantum process tomography. The demonstrated results pave the way to further increase in efficiency and hence building a practical multimode microwave memory for superconducting quantum circuits.
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Submitted 3 March, 2023; v1 submitted 28 July, 2022;
originally announced July 2022.
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Light-dressing of a diatomic superconducting artificial molecule
Authors:
G. P. Fedorov,
V. B. Yursa,
A. E. Efimov,
K. I. Shiianov,
A. Yu. Dmitriev,
I. A. Rodionov,
A. A. Dobronosova,
D. O. Moskalev,
A. A. Pishchimova,
E. I. Malevannaya,
O. V. Astafiev
Abstract:
In this work, we irradiate a superconducting artificial molecule composed of two coupled tunable transmons with microwave light while monitoring its state via joint dispersive readout. Performing high-power spectroscopy, we observe and identify a variety of single- and multiphoton transitions. We also find that at certain fluxes, the measured spectrum of the system deviates significantly from the…
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In this work, we irradiate a superconducting artificial molecule composed of two coupled tunable transmons with microwave light while monitoring its state via joint dispersive readout. Performing high-power spectroscopy, we observe and identify a variety of single- and multiphoton transitions. We also find that at certain fluxes, the measured spectrum of the system deviates significantly from the solution of the stationary Schrödinger equation with no driving. We reproduce these unusual spectral features by solving numerically the full master equation for a steady-state and attribute them to an Autler-Townes-like effect in which a single tone is simultaneously dressing the system and probing the transitions between new eigenstates. We show that it is possible to find analytically the exact frequencies at which the satellite spectral lines appear by solving self-consistent equations in the rotating frame. Our approach agrees well with both the experiment and the numerical simulation.
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Submitted 5 June, 2020; v1 submitted 27 January, 2020;
originally announced January 2020.
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Superconducting detector of IR single-photons based on thin WSi films
Authors:
V. A. Seleznev,
A. Divochiy,
Yu. B. Vakhtomin,
P. V. Morozov,
P. I. Zolotov,
D. D. Vasilev,
K. M. Moiseev,
E. I. Malevannaya,
K. V. Smirnov
Abstract:
We have developed the deposition technology of WSi thin films 4 to 9 nm thick with high temperature values of superconducting transition (Tc~4 K). Based on deposed films there were produced nanostructures with indicative planar sizes ~100 nm, and the research revealed that even on nanoscale the films possess of high critical temperature values of the superconducting transition (Tc~3.3-3.7K ) which…
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We have developed the deposition technology of WSi thin films 4 to 9 nm thick with high temperature values of superconducting transition (Tc~4 K). Based on deposed films there were produced nanostructures with indicative planar sizes ~100 nm, and the research revealed that even on nanoscale the films possess of high critical temperature values of the superconducting transition (Tc~3.3-3.7K ) which certifies high quality and homogeneity of the films created. The first experiments on creating superconducting single-photon detectors showed that the detectors SDE (system detection efficiency) with increasing bias current (Ib) reaches a constant value of ~30% (for 1550 nm) defined by infrared radiation absorption by the superconducting structure. To enhance radiation absorption by the superconductor there were created detectors with cavity structures which demonstrated a practically constant value of quantum efficiency >65% for bias currents Ib>=0.6Ic. The minimal dark counts level (DC) made 1 s^-1 limited with background noise. Hence WSi is the most promising material for creating single-photon detectors with record SDE/DC ratio and noise equivalent power (NEP).
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Submitted 30 June, 2016;
originally announced June 2016.
