Showing 1–5 of 5 results for author: Larson, K W

A tabletop x-ray tomography instrument for nanometer-scale imaging: demonstration of the 1,000-element transition-edge sensor subarray

Authors: Paul Szypryt, Nathan Nakamura, Daniel T. Becker, Douglas A. Bennett, Amber L. Dagel, W. Bertrand Doriese, Joseph W. Fowler, Johnathon D. Gard, J. Zachariah Harris, Gene C. Hilton, Jozsef Imrek, Edward S. Jimenez, Kurt W. Larson, Zachary H. Levine, John A. B. Mates, D. McArthur, Luis Miaja-Avila, Kelsey M. Morgan, Galen C. O'Neil, Nathan J. Ortiz, Christine G. Pappas, Daniel R. Schmidt, Kyle R. Thompson, Joel N. Ullom, Leila Vale , et al. (6 additional authors not shown)

Abstract: We report on the 1,000-element transition-edge sensor (TES) x-ray spectrometer implementation of the TOMographic Circuit Analysis Tool (TOMCAT). TOMCAT combines a high spatial resolution scanning electron microscope (SEM) with a highly efficient and pixelated TES spectrometer to reconstruct three-dimensional maps of nanoscale integrated circuits (ICs). A 240-pixel prototype spectrometer was recent… ▽ More We report on the 1,000-element transition-edge sensor (TES) x-ray spectrometer implementation of the TOMographic Circuit Analysis Tool (TOMCAT). TOMCAT combines a high spatial resolution scanning electron microscope (SEM) with a highly efficient and pixelated TES spectrometer to reconstruct three-dimensional maps of nanoscale integrated circuits (ICs). A 240-pixel prototype spectrometer was recently used to reconstruct ICs at the 130 nm technology node, but to increase imaging speed to more practical levels, the detector efficiency needs to be improved. For this reason, we are building a spectrometer that will eventually contain 3,000 TES microcalorimeters read out with microwave superconducting quantum interference device (SQUID) multiplexing, and we currently have commissioned a 1,000 TES subarray. This still represents a significant improvement from the 240-pixel system and allows us to begin characterizing the full spectrometer performance. Of the 992 maximimum available readout channels, we have yielded 818 devices, representing the largest number of TES x-ray microcalorimeters simultaneously read out to date. These microcalorimeters have been optimized for pulse speed rather than purely energy resolution, and we measure a FWHM energy resolution of 14 eV at the 8.0 keV Cu K$α$ line. △ Less

Submitted 22 December, 2022; originally announced December 2022.

Comments: 5 pages, 4 figures, submitted to IEEE Transactions on Applied Superconductivity

Journal ref: IEEE Transactions on Applied Superconductivity, vol. 33, no. 5, pp. 1-5, Aug. 2023, Art no. 2100705

Nanoscale Three-Dimensional Imaging of Integrated Circuits using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer

Authors: Nathan Nakamura, Paul Szypryt, Amber L. Dagel, Bradley K. Alpert, Douglas A. Bennett, W. Bertrand Doriese, Malcolm Durkin, Joseph W. Fowler, Dylan T. Fox, Johnathon D. Gard, Ryan N. Goodner, J. Zachariah Harris, Gene C. Hilton, Edward S. Jimenez, Burke L. Kernen, Kurt W. Larson, Zachary H. Levine, Daniel McArthur, Kelsey M. Morgan, Galen C. O'Neil, Nathan J. Ortiz, Christine G. Pappas, Carl D. Reintsema, Daniel R. Schmidt, Peter A. Schultz , et al. (8 additional authors not shown)

Abstract: X-ray nanotomography is a powerful tool for the characterization of nanoscale materials and structures, but is difficult to implement due to competing requirements on X-ray flux and spot size. Due to this constraint, state-of-the-art nanotomography is predominantly performed at large synchrotron facilities. We present a laboratory-scale nanotomography instrument that achieves nanoscale spatial res… ▽ More X-ray nanotomography is a powerful tool for the characterization of nanoscale materials and structures, but is difficult to implement due to competing requirements on X-ray flux and spot size. Due to this constraint, state-of-the-art nanotomography is predominantly performed at large synchrotron facilities. We present a laboratory-scale nanotomography instrument that achieves nanoscale spatial resolution while changing the limitations of conventional tomography tools. The instrument combines the electron beam of a scanning electron microscope (SEM) with the precise, broadband X-ray detection of a superconducting transition-edge sensor (TES) microcalorimeter. The electron beam generates a highly focused X-ray spot in a metal target held micrometers away from the sample of interest, while the TES spectrometer isolates target photons with high signal-to-noise. This combination of a focused X-ray spot, energy-resolved X-ray detection, and unique system geometry enable nanoscale, element-specific X-ray imaging in a compact footprint. The proof-of-concept for this approach to X-ray nanotomography is demonstrated by imaging 160 nm features in three dimensions in 6 layers of a Cu-SiO2 integrated circuit, and a path towards finer resolution and enhanced imaging capabilities is discussed. △ Less

Submitted 4 March, 2024; v1 submitted 20 December, 2022; originally announced December 2022.

Physics-assisted Generative Adversarial Network for X-Ray Tomography

Authors: Zhen Guo, Jung Ki Song, George Barbastathis, Michael E. Glinsky, Courtenay T. Vaughan, Kurt W. Larson, Bradley K. Alpert, Zachary H. Levine

Abstract: X-ray tomography is capable of imaging the interior of objects in three dimensions non-invasively, with applications in biomedical imaging, materials science, electronic inspection, and other fields. The reconstruction process can be an ill-conditioned inverse problem, requiring regularization to obtain satisfactory results. Recently, deep learning has been adopted for tomographic reconstruction.… ▽ More X-ray tomography is capable of imaging the interior of objects in three dimensions non-invasively, with applications in biomedical imaging, materials science, electronic inspection, and other fields. The reconstruction process can be an ill-conditioned inverse problem, requiring regularization to obtain satisfactory results. Recently, deep learning has been adopted for tomographic reconstruction. Unlike iterative algorithms which require a distribution that is known a priori, deep reconstruction networks can learn a prior distribution through sampling the training distributions. In this work, we develop a Physics-assisted Generative Adversarial Network (PGAN), a two-step algorithm for tomographic reconstruction. In contrast to previous efforts, our PGAN utilizes maximum-likelihood estimates derived from the measurements to regularize the reconstruction with both known physics and the learned prior. Compared with methods with less physics assisting in training, PGAN can reduce the photon requirement with limited projection angles to achieve a given error rate. The advantages of using a physics-assisted learned prior in X-ray tomography may further enable low-photon nanoscale imaging. △ Less

Submitted 3 June, 2022; v1 submitted 7 April, 2022; originally announced April 2022.

Comments: arXiv admin note: text overlap with arXiv:2111.08011

Advantage of Machine Learning over Maximum Likelihood in Limited-Angle Low-Photon X-Ray Tomography

Authors: Zhen Guo, Jung Ki Song, George Barbastathis, Michael E. Glinsky, Courtenay T. Vaughan, Kurt W. Larson, Bradley K. Alpert, Zachary H. Levine

Abstract: Limited-angle X-ray tomography reconstruction is an ill-conditioned inverse problem in general. Especially when the projection angles are limited and the measurements are taken in a photon-limited condition, reconstructions from classical algorithms such as filtered backprojection may lose fidelity and acquire artifacts due to the missing-cone problem. To obtain satisfactory reconstruction results… ▽ More Limited-angle X-ray tomography reconstruction is an ill-conditioned inverse problem in general. Especially when the projection angles are limited and the measurements are taken in a photon-limited condition, reconstructions from classical algorithms such as filtered backprojection may lose fidelity and acquire artifacts due to the missing-cone problem. To obtain satisfactory reconstruction results, prior assumptions, such as total variation minimization and nonlocal image similarity, are usually incorporated within the reconstruction algorithm. In this work, we introduce deep neural networks to determine and apply a prior distribution in the reconstruction process. Our neural networks learn the prior directly from synthetic training samples. The neural nets thus obtain a prior distribution that is specific to the class of objects we are interested in reconstructing. In particular, we used deep generative models with 3D convolutional layers and 3D attention layers which are trained on 3D synthetic integrated circuit (IC) data from a model dubbed CircuitFaker. We demonstrate that, when the projection angles and photon budgets are limited, the priors from our deep generative models can dramatically improve the IC reconstruction quality on synthetic data compared with maximum likelihood estimation. Training the deep generative models with synthetic IC data from CircuitFaker illustrates the capabilities of the learned prior from machine learning. We expect that if the process were reproduced with experimental data, the advantage of the machine learning would persist. The advantages of machine learning in limited angle X-ray tomography may further enable applications in low-photon nanoscale imaging. △ Less

Submitted 18 December, 2021; v1 submitted 15 November, 2021; originally announced November 2021.

Comments: To appear, Machine Learning for Scientific Imaging 2022 Conference, at IS&T Electronic Imaging 2022. 6 pages, 4 figures

Computer-automated tuning procedures for semiconductor quantum dot arrays

Authors: A. R. Mills, M. M. Feldman, C. Monical, P. J. Lewis, K. W. Larson, A. M. Mounce, J. R. Petta

Abstract: As with any quantum computing platform, semiconductor quantum dot devices require sophisticated hardware and controls for operation. The increasing complexity of quantum dot devices necessitates the advancement of automated control software and image recognition techniques for rapidly evaluating charge stability diagrams. We use an image analysis toolbox developed in Python to automate the calibra… ▽ More As with any quantum computing platform, semiconductor quantum dot devices require sophisticated hardware and controls for operation. The increasing complexity of quantum dot devices necessitates the advancement of automated control software and image recognition techniques for rapidly evaluating charge stability diagrams. We use an image analysis toolbox developed in Python to automate the calibration of virtual gates, a process that previously involved a large amount of user intervention. Moreover, we show that straightforward feedback protocols can be used to simultaneously tune multiple tunnel couplings in a triple quantum dot in a computer automated fashion. Finally, we adopt the use of a `tunnel coupling lever arm' to model the interdot barrier gate response and discuss how it can be used to more rapidly tune interdot tunnel couplings to the GHz values that are compatible with exchange gates. △ Less

Submitted 24 July, 2019; originally announced July 2019.

Journal ref: Appl. Phys. Lett. 115, 113501 (2019)