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Effect of magnetic field configuration on double layer formation and reverse discharge ignition in bipolar HiPIMS
Authors:
M. Farahani,
T. Kozák,
A. D. Pajdarová,
J. Čapek
Abstract:
The reverse discharge (RD) phenomenon in bipolar HiPIMS has been observed when a sufficiently long positive pulse is applied to the magnetron. Due to the magnetic field, electrons accumulated behind the magnetic trap are prevented from reaching the positive target. Consequently, a space charge double layer (DL) is formed between the positive target and the plasma behind the magnetic trap, leading…
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The reverse discharge (RD) phenomenon in bipolar HiPIMS has been observed when a sufficiently long positive pulse is applied to the magnetron. Due to the magnetic field, electrons accumulated behind the magnetic trap are prevented from reaching the positive target. Consequently, a space charge double layer (DL) is formed between the positive target and the plasma behind the magnetic trap, leading to electron acceleration across the DL and RD ignition. This study reveals the significant impact of the magnetic field configuration on RD ignition. Experiments are performed using a Ti target involving magnetic field variation, wire probe measurements of floating potential, and optical emission spectroscopy imaging. It is found that adjusting the magnetic field to a more balanced configuration leads to earlier RD ignition, while a more unbalanced one delays or even prevents it. Specifically, the time of RD ignition decreases with an increase in the magnetic null point distance from the target. Moreover, the size and shape of optical emission in the RD varies with nearby probe placement, suggesting sensitivity to external electrodes.
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Submitted 23 May, 2024;
originally announced May 2024.
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Enhancement of hole mobility in high-rate reactively sputtered Cu2O thin films induced by laser thermal annealing
Authors:
Jiri Rezek,
Martin Kucera,
Tomas Kozak,
Radomir Cerstvy,
Ales Franc,
Pavel Baroch
Abstract:
In presented work, a reactive high-power impulse magnetron sputtering (r-HiPIMS) was used for high-rate deposition ( 170 nm/min) of Cu2O films. Films were deposited on a standard soda-lime glass (SLG) substrate at a temperature of 190C. As-deposited films exhibit poor hole mobility in the orders of 1 cm2/Vs. We have systematically studied the effect of laser thermal annealing (LTA) procedure perfo…
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In presented work, a reactive high-power impulse magnetron sputtering (r-HiPIMS) was used for high-rate deposition ( 170 nm/min) of Cu2O films. Films were deposited on a standard soda-lime glass (SLG) substrate at a temperature of 190C. As-deposited films exhibit poor hole mobility in the orders of 1 cm2/Vs. We have systematically studied the effect of laser thermal annealing (LTA) procedure performed using high-power infrared laser under different laser parameters (number of pulses, length of the pulse). We have found, LTA procedure could significantly enhance the hole mobility (up to 24 cm2/Vs in our case). We have also fitted the results of a temperature-dependent Hall measurement to clarify the mechanism of the reported increase in hole mobility. Moreover, we have discussed the effect of the LTA procedure on microstructure (crystallinity, surface morphology) and on the value of optical band gap.
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Submitted 17 April, 2024;
originally announced April 2024.
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On double-layer and reverse discharge creation during long positive voltage pulses in a bipolar HiPIMS discharge
Authors:
Andrea Dagmar Pajdarová,
Tomáš Kozák,
Tomáš Tölg,
Jiří Čapek
Abstract:
Time-resolved Langmuir probe diagnostics at the discharge centerline and at three distances from the target (35mm, 60mm, and 100mm) was carried out during long positive voltage pulses (a duration of 500$μ$s and a preset positive voltage of 100V) in bipolar High-Power Impulse Magnetron Sputtering of a Ti target (a diameter of 100mm) using an unbalanced magnetron. Fast-camera spectroscopy imaging re…
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Time-resolved Langmuir probe diagnostics at the discharge centerline and at three distances from the target (35mm, 60mm, and 100mm) was carried out during long positive voltage pulses (a duration of 500$μ$s and a preset positive voltage of 100V) in bipolar High-Power Impulse Magnetron Sputtering of a Ti target (a diameter of 100mm) using an unbalanced magnetron. Fast-camera spectroscopy imaging recorded light emission from Ar and Ti atoms and singly charged ions during positive voltage pulses. It was found that during the long positive voltage pulse, the floating and the plasma potentials suddenly decrease, which is accompanied by the presence of anode light located on the discharge centerline between the target center and the magnetic null of the magnetron's magnetic field. These light patterns are related to the ignition of a reverse discharge, which leads to the subsequent rise in the plasma and the floating potentials. The reversed discharge is burning up to the end of the positive voltage pulse, but the plasma and floating potentials have lower values than the values from the initial part of the positive voltage pulse. Secondary electron emission induced by the im**ing Ar$^+$ ions to the grounded surfaces in the vicinity of the discharge plasma together with the mirror configuration of the magnetron magnetic field are identified as the probable causes of the charge double-layer structure formation in front of the target and the ignition of the reverse discharge.
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Submitted 27 March, 2024;
originally announced March 2024.
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Compact single-shot electro-optic detection system for THz pulses with femtosecond time resolution at MHz repetition rates
Authors:
B. Steffen,
Ch. Gerth,
M. Caselle,
M. Felber,
T. Kozak,
D. R. Makowski,
U. Mavrič,
A. Mielczarek,
P. Peier,
K. Przygoda,
L. Rota
Abstract:
Electro-optical detection has proven to be a valuable technique to study temporal profiles of THz pulses with pulse durations down to femtoseconds. As the Coulomb field around a relativistic electron bunch resembles the current profile, electro-optical detection can be exploited for non-invasive bunch length measurements at accelerators. We have developed a very compact and robust electro-optical…
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Electro-optical detection has proven to be a valuable technique to study temporal profiles of THz pulses with pulse durations down to femtoseconds. As the Coulomb field around a relativistic electron bunch resembles the current profile, electro-optical detection can be exploited for non-invasive bunch length measurements at accelerators. We have developed a very compact and robust electro-optical detection system based on spectral decoding for bunch length monitoring at the European XFEL with single-shot resolution better than 200~fs. Apart from the GaP crystal and the corresponding laser optics at the electron beamline, all components are housed in 19\" chassis for rack mount and remote operation inside the accelerator tunnel. An advanced laser synchronization scheme based on radio-frequency down-conversion has been developed for locking a custom-made Yb-fiber laser to the radio-frequency of the European XFEL accelerator. In order to cope with the high bunch repetition rate of the superconducting accelerator, a novel linear array detector (KALYPSO) has been employed for spectral measurements of the Yb-fiber laser pulses at frame rates of up to 2.26~MHz. In this paper, we describe all sub-systems of the electro-optical detection system as well as the measurement procedure in detail, and discuss first measurement results of longitudinal bunch profiles of around 400~fs (rms) with an arrival-time jitter of 35~fs (rms).
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Submitted 17 December, 2019;
originally announced December 2019.
