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PMUT-Powered Photoacoustic Detection: Revolutionizing Microfluidic Concentration Measurements
Authors:
Kaustav Roy,
Akshay Kumar,
Vijayendra Shastri,
Isha Munjal,
Kritank Kalyan,
Anuj Ashok,
Anthony Jeyaseelan,
Jaya Prakash,
Rudra Pratap
Abstract:
This report introduces a novel optofluidic platform based on piezo-MEMS technology, capable of identifying subtle variations in the fluid concentration. The system utilizes piezoelectric micromachined ultrasound transducers (PMUTs) as receivers to capture sound waves produced by nanosecond photoacoustic (PA) pulses emanating from a fluid target housed in PDMS microchannels. Additionally, a dedicat…
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This report introduces a novel optofluidic platform based on piezo-MEMS technology, capable of identifying subtle variations in the fluid concentration. The system utilizes piezoelectric micromachined ultrasound transducers (PMUTs) as receivers to capture sound waves produced by nanosecond photoacoustic (PA) pulses emanating from a fluid target housed in PDMS microchannels. Additionally, a dedicated low-noise single-channel amplifier has been developed to extract the minute analog voltage signals from the PMUTs, given the inherently weak ultrasound signals generated by fluid targets. The PMUTs' proficiency in detecting changes in fluid concentration under both static and time-varying conditions has been documented and verified, confirming the platform's efficacy in monitoring fluid concentrations.
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Submitted 5 December, 2023;
originally announced December 2023.
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Robust atmospherically stable hybrid SrVO3/Graphene//SrTiO3 template for fast and facile large-area transfer of complex oxides onto Si
Authors:
Asraful Haque,
Suman Kumar Mandal,
Antony Jeyaseelan,
Sandeep Vura,
Pavan Nukala,
Srinivasan Raghavan
Abstract:
Heterogenous integration of complex epitaxial oxides onto Si and other target substrates is recently gaining traction. One of the popular methods involves growing a water-soluble and highly reactive sacrificial buffer layer, such as Sr3Al2O6 (SAO) at the interface, and a functional oxide on top of this. To improve the versatility of layer transfer techniques, it is desired to utilize stable (less…
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Heterogenous integration of complex epitaxial oxides onto Si and other target substrates is recently gaining traction. One of the popular methods involves growing a water-soluble and highly reactive sacrificial buffer layer, such as Sr3Al2O6 (SAO) at the interface, and a functional oxide on top of this. To improve the versatility of layer transfer techniques, it is desired to utilize stable (less reactive) sacrificial layers, without compromising on the transfer rates. In this study, we utilized a combination of chemical vapor deposited (CVD) graphene as a 2D material at the interface and pulsed laser deposited (PLD) water-soluble SrVO3 (SVO) as a sacrificial buffer layer. We show that the graphene layer enhances the dissolution rate of SVO over ten times without compromising its atmospheric stability. We demonstrate the versatility of our hybrid template by growing ferroelectric BaTiO3 (BTO) via PLD and Pb(Zr, Ti)O3 (PZT) via Chemical Solution Deposition (CSD) technique and transferring them onto the target substrates and establishing their ferroelectric properties. Our hybrid templates allow for the realization of the potential of complex oxides in a plethora of device applications for MEMS, electro-optics, and flexible electronics.
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Submitted 6 July, 2023;
originally announced July 2023.
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A PMUT Integrated Microfluidic System for Fluid Density Sensing
Authors:
Kaustav Roy,
Kritank Kalyan,
Anuj Ashok,
Vijayendra Shastri,
Antony Jeyaseelan,
Avinandan Mandal,
Rudra Pratap
Abstract:
We demonstrate the design, fabrication and use of a dual electrode PMUT (Piezoelectric Micromachined Ultrasound Transducer) integrated with a microfluidic channel as a fluid density sensor in both static and dynamic density-change conditions. The dual electrode configuration makes the PMUT resonator a self-contained resonant peak-shift sensor and the microfluidic integration makes this system a ve…
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We demonstrate the design, fabrication and use of a dual electrode PMUT (Piezoelectric Micromachined Ultrasound Transducer) integrated with a microfluidic channel as a fluid density sensor in both static and dynamic density-change conditions. The dual electrode configuration makes the PMUT resonator a self-contained resonant peak-shift sensor and the microfluidic integration makes this system a versatile fluid density sensing platform that can be used with extremely low volumes of fluids in various industrial and healthcare applications. The density measurements carried out here under flowing fluid conditions demonstrate the potential of this system as a real-time fluid density monitoring system. We include results of density measurements in the range of 1020 - 1090 kg/m3 that corresponds to the human blood density variation generally due to the change in its hemoglobin content. The sensitivity of the sensor-26.3 Hz/(kg/m3)-is good enough to reliably detect even 1% change in the hemoglobin content of the human blood. Thus, this system could potentially be used also as a hemoglobin measurement sensor in healthcare applications.
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Submitted 23 April, 2021;
originally announced April 2021.
