Showing 1–14 of 14 results for author: Ilic, B R

Sub-picoliter Traceability of Microdroplet Gravimetry and Microscopy

Authors: Lindsay C. C. Elliott, Adam L. Pintar, Craig R. Copeland, Thomas B. Renegar, Ronald G. Dixson, B. Robert Ilic, R. Michael Verkouteren, Samuel M. Stavis

Abstract: Gravimetry typically lacks the resolution to measure single microdroplets, whereas microscopy is often inaccurate beyond the resolution limit. To address these issues, we advance and integrate these complementary methods, introducing simultaneous measurements of the same microdroplets, comprehensive calibrations that are independently traceable to the International System of Units (SI), and Monte-… ▽ More Gravimetry typically lacks the resolution to measure single microdroplets, whereas microscopy is often inaccurate beyond the resolution limit. To address these issues, we advance and integrate these complementary methods, introducing simultaneous measurements of the same microdroplets, comprehensive calibrations that are independently traceable to the International System of Units (SI), and Monte-Carlo evaluations of volumetric uncertainty. We achieve sub-picoliter agreement of measurements of microdroplets in flight with volumes of approximately 70 pL, with ensemble gravimetry and optical microscopy both yielding 95% coverage intervals of +/- 0.6 pL, or relative uncertainties of +/- 0.9%, and root-mean-square deviations of mean values between the two methods of 0.2 pL or 0.3%. These uncertainties match previous gravimetry results and improve upon previous microscopy results by an order of magnitude. Gravimetry precision depends on the continuity of droplet formation, whereas microscopy accuracy requires that optical diffraction from an edge reference matches that from a microdroplet. Applying our microscopy method, we jet and image water microdroplets suspending fluorescent nanoplastics, count nanoplastic particles after deposition and evaporation, and transfer volumetric traceability to number concentration. We expect that our methods will impact diverse fields involving dimensional metrology and volumetric analysis of microdroplets, including inkjet microfabrication, disease transmission, and industrial sprays. △ Less

Submitted 2 February, 2022; v1 submitted 13 August, 2021; originally announced September 2021.

Journal ref: Analytical Chemistry, 94, 2, 678-686 (2022)

Traceable localization enables accurate integration of quantum emitters and photonic structures with high yield

Authors: Craig R. Copeland, Adam L. Pintar, Ronald G. Dixson, Ashish Chanana, Kartik Srinivasan, Daron A. Westly, B. Robert Ilic, Marcelo I. Davanco, Samuel M. Stavis

Abstract: Traceability to the International System of Units (SI) is fundamental to measurement accuracy and reliability. In this study, we demonstrate subnanometer traceability of localization microscopy, establishing a metrological foundation for the maturation and application of super-resolution methods. To do so, we create a master standard by measuring the positions of submicrometer apertures in an arra… ▽ More Traceability to the International System of Units (SI) is fundamental to measurement accuracy and reliability. In this study, we demonstrate subnanometer traceability of localization microscopy, establishing a metrological foundation for the maturation and application of super-resolution methods. To do so, we create a master standard by measuring the positions of submicrometer apertures in an array by traceable atomic-force microscopy. We perform correlative measurements of this master standard by optical microscopy, calibrating scale factor and correcting aberration effects. We introduce the concept of a localization uncertainty field due to optical localization errors and scale factor uncertainty, with regions of position traceability to within a 68 % coverage interval of +/- 1 nm. These results enable localization metrology with high throughput, which we apply to measure working standards that we fabricate by electron-beam lithography, validating the accuracy of mean pitch and closing the loop for disseminating and integrating reference arrays. We then apply our novel methods to calibrate an optical microscope with a sample cryostat, accounting for thermal contraction by use of a submicrometer pillar array in silicon as a reference material and elucidating complex distortion. This new calibration enables the accurate integration of quantum emitters and photonic structures with high yield, as we demonstrate theoretically through simulations of the dependence of the Purcell factor of radiative enhancement on registration errors across a wide field. Our study illuminates the challenges and opportunities of achieving traceable localization for comparison of position data across lithography and microscopy systems, from ambient to cryogenic temperatures. △ Less

Submitted 28 February, 2023; v1 submitted 18 June, 2021; originally announced June 2021.

A lateral nanoflow assay reveals nanoplastic fluorescence heterogeneity

Authors: Kuo-Tang Liao, Andrew C. Madison, Adam L. Pintar, B. Robert Ilic, Craig R. Copeland, Samuel M. Stavis

Abstract: Plastic nanoparticles present technological opportunities and environmental concerns, but measurement challenges impede product development and hazard assessment. To meet these challenges, we advance a lateral nanoflow assay that integrates complex nanofluidic replicas, optical localization microscopy, and novel statistical analyses. We apply our sample-in-answer-out system to measure polystyrene… ▽ More Plastic nanoparticles present technological opportunities and environmental concerns, but measurement challenges impede product development and hazard assessment. To meet these challenges, we advance a lateral nanoflow assay that integrates complex nanofluidic replicas, optical localization microscopy, and novel statistical analyses. We apply our sample-in-answer-out system to measure polystyrene nanoparticles that sorb and carry hydrophobic fluorophores. An elegant scaling of surface forces automates advection and dominates diffusion to drive the analytical separation of colloidal nanoparticles by their steric diameters. Reference nanoparticles, with a mean of 99 nm and a standard deviation of 8.4 nm, test the unknown limits of silicone replicas to function as separation matrices. New calibrations correct aberrations from microscope and device, improving the accuracy of reducing single micrographs to joint histograms of steric diameter and fluorescence intensity. A dimensional model approaches the information limit of the system to discriminate size exclusion from surface adsorption, yielding errors of the mean ranging from 0.2 nm to 2.3 nm and errors of the standard deviation ranging from 2.2 nm to 4.2 nm. A hierarchical model accounts for metrological, optical, and dimensional variability to reveal a fundamental structure-property relationship. Intensity scales with diameter to the power of 3.6 +/- 0.5 at 95 % coverage, confounding basic concepts of surface adsorption or volume absorption. Distributions of fluorescivity - the product of the number density, absorption cross section, and quantum yield of an ensemble of fluorophores - are ultrabroad and asymmetric, limiting any inference from fluorescence intensity. This surprising characterization of common nanoplastics resets expectations for optimizing products, applying standards, and understanding byproducts. △ Less

Submitted 17 May, 2022; v1 submitted 29 December, 2020; originally announced January 2021.

Unmasking the resolution$-$throughput tradespace of focused-ion-beam machining

Authors: Andrew C. Madison, John S. Villarrubia, Kuo-Tang Liao, Craig R. Copeland, Joshua Schumacher, Kerry Siebein, B. Robert Ilic, J. Alexander Liddle, Samuel M. Stavis

Abstract: Focused-ion-beam machining is a powerful process to fabricate complex nanostructures, often through a sacrificial mask that enables milling beyond the resolution limit of the ion beam. However, current understanding of this super-resolution effect is empirical in the spatial domain and nonexistent in the temporal domain. This article reports the primary study of this fundamental tradespace of reso… ▽ More Focused-ion-beam machining is a powerful process to fabricate complex nanostructures, often through a sacrificial mask that enables milling beyond the resolution limit of the ion beam. However, current understanding of this super-resolution effect is empirical in the spatial domain and nonexistent in the temporal domain. This article reports the primary study of this fundamental tradespace of resolution and throughput. Chromia functions well as a masking material due to its smooth, uniform, and amorphous structure. An efficient method of in-line metrology enables characterization of ion-beam focus by scanning electron microscopy. Fabrication and characterization of complex test-structures through chromia and into silica probe the response of the bilayer to a focused beam of gallium cations, demonstrating super-resolution factors of up to 6 $\pm$ 2 and improvements to volume throughput of at least factors of 42 $\pm$ 2, with uncertainties denoting 95 % coverage intervals. Tractable theory models the essential aspects of the super-resolution effect for various nanostructures. Application of the new tradespace increases the volume throughput of machining Fresnel lenses by a factor of 75, which we introduce as projection standards for optical microscopy. These results enable paradigm shifts of sacrificial masking from empirical to engineering design, and from prototy** to manufacturing. △ Less

Submitted 24 August, 2022; v1 submitted 2 December, 2020; originally announced December 2020.

Accurate localization microscopy by intrinsic aberration calibration

Authors: Craig R. Copeland, Craig D. McGray, B. Robert Ilic, Jon Geist, Samuel M. Stavis

Abstract: A standard paradigm of localization microscopy involves extension from two to three dimensions by engineering information into emitter images, and approximation of errors resulting from the field dependence of optical aberrations. We invert this standard paradigm, introducing the concept of fully exploiting the latent information of intrinsic aberrations by comprehensive calibration of an ordinary… ▽ More A standard paradigm of localization microscopy involves extension from two to three dimensions by engineering information into emitter images, and approximation of errors resulting from the field dependence of optical aberrations. We invert this standard paradigm, introducing the concept of fully exploiting the latent information of intrinsic aberrations by comprehensive calibration of an ordinary microscope, enabling accurate localization of single emitters in three dimensions throughout an ultrawide and deep field. To complete the extraction of spatial information from microscale bodies ranging from imaging substrates to microsystem technologies, we introduce a synergistic concept of the rigid transformation of the positions of multiple emitters in three dimensions, improving precision, testing accuracy, and yielding measurements in six degrees of freedom. Our study illuminates the challenge of aberration effects in localization microscopy, redefines the challenge as an opportunity for accurate, precise, and complete localization, and elucidates the performance and reliability of a complex microelectromechanical system. △ Less

Submitted 2 July, 2021; v1 submitted 2 September, 2020; originally announced September 2020.

Journal ref: Nature Communications, 12, 3925 (2021)

Revisiting the Photon-Drag Effect in Metal Films

Authors: Jared H. Strait, Glenn Holland, Wenqi Zhu, Cheng Zhang, Bojan R. Ilic, Amit Agrawal, Domenico Pacifici, Henri J. Lezec

Abstract: The photon-drag effect, the rectified current in a medium induced by conservation of momentum of absorbed or redirected light, is a unique probe of the detailed mechanisms underlying radiation pressure. We revisit this effect in gold, a canonical Drude metal. We discover that the signal for p-polarized illumination in ambient air is affected in both sign and magnitude by adsorbed molecules, openin… ▽ More The photon-drag effect, the rectified current in a medium induced by conservation of momentum of absorbed or redirected light, is a unique probe of the detailed mechanisms underlying radiation pressure. We revisit this effect in gold, a canonical Drude metal. We discover that the signal for p-polarized illumination in ambient air is affected in both sign and magnitude by adsorbed molecules, opening previous measurements for reinterpretation. Further, we show that the intrinsic sign of the photon-drag effect is contrary to the prevailing intuitive model of direct momentum transfer to free electrons. △ Less

Submitted 5 March, 2019; v1 submitted 4 December, 2018; originally announced December 2018.

Comments: 12 pages, 4 figures

Journal ref: Phys. Rev. Lett. 123, 053903 (2019)

Photonic integration of an optical atomic clock

Authors: Z. L. Newman, V. Maurice, T. E. Drake, J. R. Stone, T. C. Briles, D. T. Spencer, C. Fredrick, Q. Li, D. Westly, B. R. Ilic, B. Shen, M. -G. Suh, K. Y. Yang, C. Johnson, D. M. S. Johnson, L. Hollberg, K. Vahala, K. Srinivasan, S. A. Diddams, J. Kitching, S. B. Papp, M. T Hummon

Abstract: Laboratory optical atomic clocks achieve remarkable accuracy (now counted to 18 digits or more), opening possibilities to explore fundamental physics and enable new measurements. However, their size and use of bulk components prevent them from being more widely adopted in applications that require precision timing. By leveraging silicon-chip photonics for integration and to reduce component size a… ▽ More Laboratory optical atomic clocks achieve remarkable accuracy (now counted to 18 digits or more), opening possibilities to explore fundamental physics and enable new measurements. However, their size and use of bulk components prevent them from being more widely adopted in applications that require precision timing. By leveraging silicon-chip photonics for integration and to reduce component size and complexity, we demonstrate a compact optical-clock architecture. Here a semiconductor laser is stabilized to an optical transition in a microfabricated rubidium vapor cell, and a pair of interlocked Kerr-microresonator frequency combs provide fully coherent optical division of the clock laser to generate an electronic 22 GHz clock signal with a fractional frequency instability of one part in 10^13. These results demonstrate key concepts of how to use silicon-chip devices in future portable and ultraprecise optical clocks. △ Less

Submitted 1 November, 2018; originally announced November 2018.

Comments: 11 pages, 4 figures

Measuring frequency fluctuations in nonlinear nanomechanical resonators

Authors: Olivier Maillet, Xin Zhou, Rasul R. Gazizulin, Bojan R. Ilic, Jeevak M. Parpia, Olivier Bourgeois, Andrew D. Fefferman, Eddy Collin

Abstract: Advances in nanomechanics within recent years have demonstrated an always expanding range of devices, from top-down structures to appealing bottom-up MoS$_2$ and graphene membranes, used for both sensing and component-oriented applications. One of the main concerns in all of these devices is frequency noise, which ultimately limits their applicability. This issue has attracted a lot of attention r… ▽ More Advances in nanomechanics within recent years have demonstrated an always expanding range of devices, from top-down structures to appealing bottom-up MoS$_2$ and graphene membranes, used for both sensing and component-oriented applications. One of the main concerns in all of these devices is frequency noise, which ultimately limits their applicability. This issue has attracted a lot of attention recently, and the origin of this noise remains elusive up to date. In this Letter we present a very simple technique to measure frequency noise in nonlinear mechanical devices, based on the presence of bistability. It is illustrated on silicon-nitride high-stress doubly-clamped beams, in a cryogenic environment. We report on the same $T/f$ dependence of the frequency noise power spectra as reported in the literature. But we also find unexpected {\it dam** fluctuations}, amplified in the vicinity of the bifurcation points; this effect is clearly distinct from already reported nonlinear dephasing, and poses a fundamental limit on the measurement of bifurcation frequencies. The technique is further applied to the measurement of frequency noise as a function of mode number, within the same device. The relative frequency noise for the fundamental flexure $δf/f_0$ lies in the range $0.5 - 0.01~$ppm (consistent with literature for cryogenic MHz devices), and decreases with mode number in the range studied. The technique can be applied to {\it any types} of nano-mechanical structures, enabling progresses towards the understanding of intrinsic sources of noise in these devices. △ Less

Submitted 8 June, 2018; v1 submitted 20 February, 2018; originally announced February 2018.

Comments: Published 7 may 2018

Journal ref: ACS Nano 2018

Subnanometer localization accuracy in widefield optical microscopy

Authors: Craig R. Copeland, Jon Geist, Craig D. McGray, Vladimir A. Aksyuk, J. Alexander Liddle, B. Robert Ilic, Samuel M. Stavis

Abstract: The common assumption that precision is the limit of accuracy in localization microscopy and the typical absence of comprehensive calibration of optical microscopes lead to a widespread issue - overconfidence in measurement results with nanoscale statistical uncertainties that can be invalid due to microscale systematic errors. In this article, we report a comprehensive solution to this underappre… ▽ More The common assumption that precision is the limit of accuracy in localization microscopy and the typical absence of comprehensive calibration of optical microscopes lead to a widespread issue - overconfidence in measurement results with nanoscale statistical uncertainties that can be invalid due to microscale systematic errors. In this article, we report a comprehensive solution to this underappreciated problem. We develop arrays of subresolution apertures into the first reference materials that enable localization errors approaching the atomic scale across a submillimeter field. We present novel methods for calibrating our microscope system using aperture arrays and develop aberration corrections that reach the precision limit of our reference materials. We correct and register localization data from multiple colors and test different sources of light emission with equal accuracy, indicating the general applicability of our reference materials and calibration methods. In a first application of our new measurement capability, we introduce the concept of critical dimension localization microscopy, facilitating tests of nanofabrication processes and quality control of aperture arrays. In a second application, we apply these stable reference materials to answer open questions about the apparent instability of fluorescent nanoparticles that commonly serve as fiducial markers. Our study establishes a foundation for subnanometer localization accuracy in widefield optical microscopy. △ Less

Submitted 22 May, 2018; v1 submitted 26 October, 2017; originally announced October 2017.

Comments: Light: Science & Applications (2018) 7

Journal ref: Light: Science & Applications, volume 7, Article number: 31 (2018)

An Integrated-Photonics Optical-Frequency Synthesizer

Authors: Daryl T. Spencer, Tara Drake, Travis C. Briles, Jordan Stone, Laura C. Sinclair, Connor Fredrick, Qing Li, Daron Westly, B. Robert Ilic, Aaron Bluestone, Nicolas Volet, Tin Komljenovic, Lin Chang, Seung Hoon Lee, Dong Yoon Oh, Myoung-Gyun Suh, Ki Youl Yang, Martin H. P. Pfeiffer, Tobias J. Kippenberg, Erik Norberg, Luke Theogarajan, Kerry Vahala, Nathan R. Newbury, Kartik Srinivasan, John E. Bowers , et al. (2 additional authors not shown)

Abstract: Integrated-photonics microchips now enable a range of advanced functionalities for high-coherence applications such as data transmission, highly optimized physical sensors, and harnessing quantum states, but with cost, efficiency, and portability much beyond tabletop experiments. Through high-volume semiconductor processing built around advanced materials there exists an opportunity for integrated… ▽ More Integrated-photonics microchips now enable a range of advanced functionalities for high-coherence applications such as data transmission, highly optimized physical sensors, and harnessing quantum states, but with cost, efficiency, and portability much beyond tabletop experiments. Through high-volume semiconductor processing built around advanced materials there exists an opportunity for integrated devices to impact applications cutting across disciplines of basic science and technology. Here we show how to synthesize the absolute frequency of a lightwave signal, using integrated photonics to implement lasers, system interconnects, and nonlinear frequency comb generation. The laser frequency output of our synthesizer is programmed by a microwave clock across 4 THz near 1550 nm with 1 Hz resolution and traceability to the SI second. This is accomplished with a heterogeneously integrated III/V-Si tunable laser, which is guided by dual dissipative-Kerr-soliton frequency combs fabricated on silicon chips. Through out-of-loop measurements of the phase-coherent, microwave-to-optical link, we verify that the fractional-frequency instability of the integrated photonics synthesizer matches the $7.0*10^{-13}$ reference-clock instability for a 1 second acquisition, and constrain any synthesis error to $7.7*10^{-15}$ while step** the synthesizer across the telecommunication C band. Any application of an optical frequency source would be enabled by the precision optical synthesis presented here. Building on the ubiquitous capability in the microwave domain, our results demonstrate a first path to synthesis with integrated photonics, leveraging low-cost, low-power, and compact features that will be critical for its widespread use. △ Less

Submitted 15 August, 2017; originally announced August 2017.

Comments: 10 pages, 6 figures

Topological quantization of energy transport in micro- and nano-mechanical lattices

Authors: Chih-Chun Chien, Kirill A. Velizhanin, Yonatan Dubi, B. Robert Ilic, Michael Zwolak

Abstract: Topological effects typically discussed in the context of quantum physics are emerging as one of the central paradigms of physics. Here, we demonstrate the role of topology in energy transport through dimerized micro- and nano-mechanical lattices in the classical regime, i.e., essentially "masses and springs". We show that the thermal conductance factorizes into topological and non-topological com… ▽ More Topological effects typically discussed in the context of quantum physics are emerging as one of the central paradigms of physics. Here, we demonstrate the role of topology in energy transport through dimerized micro- and nano-mechanical lattices in the classical regime, i.e., essentially "masses and springs". We show that the thermal conductance factorizes into topological and non-topological components. The former takes on three discrete values and arises due to the appearance of edge modes that prevent good contact between the heat reservoirs and the bulk, giving a length-independent reduction of the conductance. In essence, energy input at the boundary mostly stays there, an effect robust against disorder and nonlinearity. These results bridge two seemingly disconnected disciplines of physics, namely topology and thermal transport, and suggest ways to engineer thermal contacts, opening a direction to explore the ramifications of topological properties on nanoscale technology. △ Less

Submitted 21 March, 2018; v1 submitted 20 July, 2017; originally announced July 2017.

Comments: 6 pages, 3 figures; Supplemental information included as an ancillary file

Journal ref: Phys. Rev. B 97, 125425 (2018)

Stably accessing octave-spanning microresonator frequency combs in the soliton regime

Authors: Qing Li, Travis C. Briles, Daron A. Westly, Tara E. Drake, Jordan R. Stone, B. Robert Ilic, Scott A. Diddams, Scott B. Papp, Kartik Srinivasan

Abstract: Microresonator frequency combs can be an enabling technology for optical frequency synthesis and timekee** in low size, weight, and power architectures. Such systems require comb operation in low-noise, phase-coherent states such as solitons, with broad spectral bandwidths (e.g., octave-spanning) for self-referencing to detect the carrier-envelope offset frequency. However, stably accessing such… ▽ More Microresonator frequency combs can be an enabling technology for optical frequency synthesis and timekee** in low size, weight, and power architectures. Such systems require comb operation in low-noise, phase-coherent states such as solitons, with broad spectral bandwidths (e.g., octave-spanning) for self-referencing to detect the carrier-envelope offset frequency. However, stably accessing such states is complicated by thermo-optic dispersion. For example, in the Si3N4 platform, precisely dispersion-engineered structures can support broadband operation, but microsecond thermal time constants have necessitated fast pump power or frequency control to stabilize the solitons. In contrast, here we consider how broadband soliton states can be accessed with simple pump laser frequency tuning, at a rate much slower than the thermal dynamics. We demonstrate octave-spanning soliton frequency combs in Si3N4 microresonators, including the generation of a multi-soliton state with a pump power near 40 mW and a single-soliton state with a pump power near 120 mW. We also develop a simplified two-step analysis to explain how these states are accessed in a thermally stable way without fast control of the pump laser, and outline the required thermal properties for such operation. Our model agrees with experimental results as well as numerical simulations based on a Lugiato-Lefever equation that incorporates thermo-optic dispersion. Moreover, it also explains an experimental observation that a member of an adjacent mode family on the red-detuned side of the pump mode can mitigate the thermal requirements for accessing soliton states. △ Less

Submitted 28 November, 2016; originally announced November 2016.

Journal ref: Optica, Vol. 4, No. 2, pp. 193-203 (2017)

Acousto-optic and opto-acoustic modulation in piezo-optomechanical circuits

Authors: Krishna C. Balram, Marcelo I. Davanco, B. Robert Ilic, Ji-Hoon Kyhm, ** Dong Song, Kartik Srinivasan

Abstract: Acoustic wave devices provide a promising chip-scale platform for efficiently coupling radio frequency (RF) and optical fields. Here, we use an integrated piezo-optomechanical circuit platform that exploits both the piezoelectric and photoelastic coupling mechanisms to link 2.4 GHz RF waves to 194 THz (1550 nm) optical waves, through coupling to propagating and localized 2.4 GHz acoustic waves. We… ▽ More Acoustic wave devices provide a promising chip-scale platform for efficiently coupling radio frequency (RF) and optical fields. Here, we use an integrated piezo-optomechanical circuit platform that exploits both the piezoelectric and photoelastic coupling mechanisms to link 2.4 GHz RF waves to 194 THz (1550 nm) optical waves, through coupling to propagating and localized 2.4 GHz acoustic waves. We demonstrate acousto-optic modulation, resonant in both the optical and mechanical domains, in which waveforms encoded on the RF carrier are mapped to the optical field. We also show opto-acoustic modulation, in which the application of optical pulses gates the transmission of propagating acoustic waves. The time-domain characteristics of this system under both pulsed RF and pulsed optical excitation are considered in the context of the different physical pathways involved in driving the acoustic waves, and modeled through the coupled mode equations of cavity optomechanics. △ Less

Submitted 28 September, 2016; originally announced September 2016.

Comments: 8 pages, 6 figures

Journal ref: Phys. Rev. Applied 7, 024008 (2017)

Graphene Metallization of High-Stress Silicon Nitride Resonators for Electrical Integration

Authors: Sunwoo Lee, Vivekananda P. Adiga, Robert A. Barton, Arend van der Zande, Gwan-Hyoung Lee, B. Rob Ilic, Alexander Gondarenko, Jeevak M. Parpia, Harold G. Craighead, James Hone

Abstract: High stress stoichiometric silicon nitride resonators, whose quality factors exceed one million, have shown promise for applications in sensing and signal processing. Yet, electrical integration of the insulating silicon nitride resonators has been challenging, as depositing even a thin layer of metal degrades the quality factor significantly. In this work, we show that graphene used as a conducti… ▽ More High stress stoichiometric silicon nitride resonators, whose quality factors exceed one million, have shown promise for applications in sensing and signal processing. Yet, electrical integration of the insulating silicon nitride resonators has been challenging, as depositing even a thin layer of metal degrades the quality factor significantly. In this work, we show that graphene used as a conductive coating for Si3N4 membranes reduces the quality factor by less than 30 % on average, which is minimal when compared to the effect of conventional metallization layers such as chromium or aluminum. The electrical integration of Si3N4-Graphene (SiNG) heterostructure resonators is demonstrated with electrical readout and electro-static tuning of the frequency by up to 1 % per volt. These studies demonstrate the feasibility of hybrid graphene/nitride mechanical resonators in which the electrical properties of graphene are combined with the superior mechanical performance of silicon nitride. △ Less

Submitted 21 May, 2013; originally announced May 2013.

Comments: 8 pages, 5 figures, journal

Journal ref: Nano Letters vol 13, pp. 4275-4279 (2013)