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Metal-Optic Nanophotonic Modulators in Standard CMOS Technology
Authors:
Mohamed ElKabbash,
Sivan Trajtenberg-Mills,
Isaac Harris,
Saumil Bandyopadhyay,
Mohamed I Ibrahim,
Archer Wang,
Xibi Chen,
Cole Brabec,
Hasan Z. Yildiz,
Ruonan Han,
Dirk Englund
Abstract:
Integrating nanophotonics with electronics promises revolutionary applications, from LiDAR to holographic displays. Although silicon photonics is maturing, realizing active nanophotonics in the ubiquitous bulk CMOS processes remains challenging. We introduce a fabless approach to embed active nanophotonics in bulk CMOS by co-designing the back-end-of-line metal layers for optical functionality. Us…
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Integrating nanophotonics with electronics promises revolutionary applications, from LiDAR to holographic displays. Although silicon photonics is maturing, realizing active nanophotonics in the ubiquitous bulk CMOS processes remains challenging. We introduce a fabless approach to embed active nanophotonics in bulk CMOS by co-designing the back-end-of-line metal layers for optical functionality. Using a 65nm CMOS process, we create plasmonic liquid crystal modulators with switching speeds 100x faster than commercial technologies. This zero-change nanophotonics method could equip mass-produced chips with optical communications, sensing and imaging. Embedding nanophotonics in the dominant electronics platform democratizes nanofabrication, spawning technologies from chip-scale LiDAR to holographic light-field displays.
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Submitted 16 November, 2023; v1 submitted 6 October, 2023;
originally announced October 2023.
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Heterogeneous integration of spin-photon interfaces with a scalable CMOS platform
Authors:
Linsen Li,
Lorenzo De Santis,
Isaac Harris,
Kevin C. Chen,
Yihuai Gao,
Ian Christen,
Matthew Trusheim,
Hyeongrak Choi,
Yixuan Song,
Carlos Errando-Herranz,
Jiahui Du,
Yong Hu,
Genevieve Clark,
Mohamed I. Ibrahim,
Gerald Gilbert,
Ruonan Han,
Dirk Englund
Abstract:
Color centers in diamonds have emerged as a leading solid-state platform for advancing quantum technologies, satisfying the DiVincenzo criteria and recently achieving a quantum advantage in secret key distribution. Recent theoretical works estimate that general-purpose quantum computing using local quantum communication networks will require millions of physical qubits to encode thousands of logic…
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Color centers in diamonds have emerged as a leading solid-state platform for advancing quantum technologies, satisfying the DiVincenzo criteria and recently achieving a quantum advantage in secret key distribution. Recent theoretical works estimate that general-purpose quantum computing using local quantum communication networks will require millions of physical qubits to encode thousands of logical qubits, which presents a substantial challenge to the hardware architecture at this scale. To address the unanswered scaling problem, in this work, we first introduce a scalable hardware modular architecture "Quantum System-on-Chip" (QSoC) that features compact two-dimensional arrays "quantum microchiplets" (QMCs) containing tin-vacancy (SnV-) spin qubits integrated on a cryogenic application-specific integrated circuit (ASIC). We demonstrate crucial architectural subcomponents, including (1) QSoC fabrication via a lock-and-release method for large-scale heterogeneous integration; (2) a high-throughput calibration of the QSoC for spin qubit spectral inhomogenous registration; (3) spin qubit spectral tuning functionality for inhomogenous compensation; (4) efficient spin-state preparation and measurement for improved spin and optical properties. QSoC architecture supports full connectivity for quantum memory arrays in a set of different resonant frequencies and offers the possibility for further scaling the number of solid-state physical qubits via larger and denser QMC arrays and optical frequency multiplexing networking.
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Submitted 20 December, 2023; v1 submitted 28 August, 2023;
originally announced August 2023.
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High-Scalability CMOS Quantum Magnetometer with Spin-State Excitation and Detection of Diamond Color Centers
Authors:
Mohamed I. Ibrahim,
Christopher Foy,
Dirk R. Englund,
Ruonan Han
Abstract:
Magnetometers based on quantum mechanical processes enable high sensitivity and long-term stability without the need for re-calibration, but their integration into fieldable devices remains challenging. This paper presents a CMOS quantum vector-field magnetometer that miniaturizes the conventional quantum sensing platforms using nitrogen-vacancy (NV) centers in diamond. By integrating key componen…
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Magnetometers based on quantum mechanical processes enable high sensitivity and long-term stability without the need for re-calibration, but their integration into fieldable devices remains challenging. This paper presents a CMOS quantum vector-field magnetometer that miniaturizes the conventional quantum sensing platforms using nitrogen-vacancy (NV) centers in diamond. By integrating key components for spin control and readout, the chip performs magnetometry through optically detected magnetic resonance (ODMR) through a diamond slab attached to a custom CMOS chip. The ODMR control is highly uniform across the NV centers in the diamond, which is enabled by a CMOS-generated $\sim$2.87 GHz magnetic field with <5% inhomogeneity across a large-area current-driven wire array. The magnetometer chip is 1.5 mm$^2$ in size, prototyped in 65-nm bulk CMOS technology, and attached to a 300$\times$80 $μ$m2 diamond slab. NV fluorescence is measured by CMOS-integrated photodetectors. This on-chip measurement is enabled by efficient rejection of the green pump light from the red fluorescence through a CMOS-integrated spectral filter based on a combination of spectrally dependent plasmonic losses and diffractive filtering in the CMOS back-end-of-line (BEOL). This filter achieves $\sim$25 dB of green light rejection. We measure a sensitivity of 245 nT/Hz$^{1/2}$, marking a 130$\times$ improvement over a previous CMOS-NV sensor prototype, largely thanks to the better spectral filtering and homogeneous microwave generation over larger area.
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Submitted 22 July, 2020; v1 submitted 12 May, 2020;
originally announced May 2020.
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CMOS-Integrated Diamond Nitrogen-Vacancy Quantum Sensor
Authors:
Donggyu Kim,
Mohamed I. Ibrahim,
Christopher Foy,
Matthew E. Trusheim,
Ruonan Han,
Dirk R. Englund
Abstract:
The nitrogen vacancy (NV) center in diamond has emerged as a leading solid-state quantum sensor for applications including magnetometry, electrometry, thermometry, and chemical sensing. However, an outstanding challenge for practical applications is that existing NV-based sensing techniques require bulky and discrete instruments for spin control and detection. Here, we address this challenge by in…
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The nitrogen vacancy (NV) center in diamond has emerged as a leading solid-state quantum sensor for applications including magnetometry, electrometry, thermometry, and chemical sensing. However, an outstanding challenge for practical applications is that existing NV-based sensing techniques require bulky and discrete instruments for spin control and detection. Here, we address this challenge by integrating NV based quantum sensing with complementary metal-oxide-semiconductor (CMOS) technology. Through tailored CMOS-integrated microwave generation and photodetection, this work dramatically reduces the instrumentation footprint for quantum magnetometry and thermometry. This hybrid diamond-CMOS integration enables an ultra-compact and scalable platform for quantum sensing and quantum information processing.
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Submitted 2 October, 2018;
originally announced October 2018.
