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Room-Temperature Sputtered Ultralow-loss Silicon Nitride for Hybrid Photonic Integration
Authors:
Shuangyou Zhang,
Toby Bi,
Irina Harder,
Olga Lohse,
Florentina Gannott,
Alexander Gumann,
Yao**g Zhang,
Pascal Del'Haye
Abstract:
Silicon-nitride-on-insulator photonic circuits have seen tremendous advances in many applications, such as on-chip frequency combs, Lidar, telecommunications, and spectroscopy. So far, the best film quality has been achieved with low pressure chemical vapor deposition (LPCVD) and high-temperature annealing (1200 °C). However, high processing temperature poses challenges to the cointegration of Si3…
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Silicon-nitride-on-insulator photonic circuits have seen tremendous advances in many applications, such as on-chip frequency combs, Lidar, telecommunications, and spectroscopy. So far, the best film quality has been achieved with low pressure chemical vapor deposition (LPCVD) and high-temperature annealing (1200 °C). However, high processing temperature poses challenges to the cointegration of Si3N4 with pre-processed silicon electronic and photonic devices, lithium niobate on insulator (LNOI), and Ge-on-Si photodiodes. This limits LPCVD as a front-end-of-line process. Here, we demonstrate ultralow-loss Silicon nitride photonics based on room-temperature reactive sputtering. Propagation losses as low as 5.4 dB/m after 400 °C annealing and 3.5 dB/m after 800 °C annealing are achieved, enabling ring resonators with more than 10 million optical quality factors. To the best of our knowledge, these are the lowest propagation losses achieved with low temperature silicon nitride. This ultralow loss enables threshold powers for optical parametric oscillations to 1.1 mW and enables the generation of bright soliton frequency combs at 1.3 and 1.5 μm. Our work features a full complementary metal oxide semiconductor (CMOS) compatibility with front-end silicon electronics and photonics, and has the potential for hybrid 3D monolithic integration with III-V-on-Si integrated lasers, and LNOI.
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Submitted 25 January, 2023;
originally announced January 2023.
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On-chip linear and nonlinear control of single molecules coupled to a nanoguide
Authors:
Pierre Türschmann,
Nir Rotenberg,
Jan Renger,
Irina Harder,
Olga Lohse,
Tobias Utikal,
Stephan Götzinger,
Vahid Sandoghdar
Abstract:
While experiments with one or two quantum emitters have become routine in various laboratories, scalable platforms for efficient optical coupling of many quantum systems remain elusive. To address this issue, we report on chip-based systems made of one-dimensional subwavelength dielectric waveguides (nanoguides) and polycyclic aromatic hydrocarbon molecules. After discussing the design and fabrica…
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While experiments with one or two quantum emitters have become routine in various laboratories, scalable platforms for efficient optical coupling of many quantum systems remain elusive. To address this issue, we report on chip-based systems made of one-dimensional subwavelength dielectric waveguides (nanoguides) and polycyclic aromatic hydrocarbon molecules. After discussing the design and fabrication requirements, we present data on coherent linear and nonlinear spectroscopy of single molecules coupled to a nanoguide mode. Our results show that external microelectrodes as well as optical beams can be used to switch the propagation of light in a nanoguide via the Stark effect and a nonlinear optical process, respectively. The presented nanoguide architecture paves the way for the investigation of many-body phenomena and polaritonic states and can be readily extended to more complex geometries for the realization of quantum integrated photonic circuits.
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Submitted 20 February, 2017;
originally announced February 2017.
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Generation of a wave packet tailored to efficient free space excitation of a single atom
Authors:
Andrea Golla,
Benoit Chalopin,
Marianne Bader,
Irina Harder,
Klaus Mantel,
Robert Maiwald,
Norbert Lindlein,
Markus Sondermann,
Gerd Leuchs
Abstract:
We demonstrate the generation of an optical dipole wave suitable for the process of efficiently coupling single quanta of light and matter in free space. We employ a parabolic mirror for the conversion of a transverse beam mode to a focused dipole wave and show the required spatial and temporal sha** of the mode incident onto the mirror. The results include a proof of principle correction of the…
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We demonstrate the generation of an optical dipole wave suitable for the process of efficiently coupling single quanta of light and matter in free space. We employ a parabolic mirror for the conversion of a transverse beam mode to a focused dipole wave and show the required spatial and temporal sha** of the mode incident onto the mirror. The results include a proof of principle correction of the parabolic mirror's aberrations. For the application of exciting an atom with a single photon pulse we demonstrate the creation of a suitable temporal pulse envelope. We infer coupling strengths of 89% and success probabilities of up to 87% for the application of exciting a single atom for the current experimental parameters.
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Submitted 13 July, 2012;
originally announced July 2012.
