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Sub-wavelength coherent imaging of periodic samples using a 13.5 nm tabletop high harmonic light source
Authors:
Dennis F. Gardner,
Michael Tanksalvala,
Elisabeth R. Shanblatt,
Xiaoshi Zhang,
Benjamin R. Galloway,
Christina L. Porter,
Robert Karl Jr.,
Charles Bevis,
Daniel E. Adams,
Henry C. Kapteyn,
Margaret M. Murnane,
Giulia F. Mancini
Abstract:
Coherent diffractive imaging is unique as the only route for achieving diffraction-limited spatial resolution in the extreme ultraviolet and X-ray regions, limited only by the wavelength of the light. Recently, advances in coherent short wavelength light sources, coupled with progress in algorithm development, have significantly enhanced the power of x-ray imaging. However, to date, high-fidelity…
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Coherent diffractive imaging is unique as the only route for achieving diffraction-limited spatial resolution in the extreme ultraviolet and X-ray regions, limited only by the wavelength of the light. Recently, advances in coherent short wavelength light sources, coupled with progress in algorithm development, have significantly enhanced the power of x-ray imaging. However, to date, high-fidelity diffraction imaging of periodic objects has been a challenge because the scattered light is concentrated in isolated peaks. Here, we use tabletop 13.5nm high harmonic beams to make two significant advances. First we demonstrate high-quality imaging of an extended, nearly-periodic sample for the first time. Second, we achieve sub-wavelength spatial resolution (12.6nm) imaging at short wavelengths, also for the first time. The key to both advances is a novel technique called modulus enforced probe, which enables robust, quantitative, reconstructions of periodic objects. This work is important for imaging next generation nano-engineered devices.
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Submitted 28 March, 2024;
originally announced March 2024.
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Single-Shot 3D Diffractive Imaging of Core-Shell Nanoparticles with Elemental Specificity
Authors:
Alan Pryor Jr,
Arjun Rana,
Rui Xu,
Jose A. Rodriguez,
Yongsoo Yang,
Marcus Gallagher-Jones,
Huaidong Jiang,
Jaehyun Park,
Sunam Kim,
Sangsoo Kim,
Daewong Nam,
Yu Yue,
Jiadong Fan,
Zhibin Sun,
Bosheng Zhang,
Dennis F. Gardner,
Carlos Sato Baraldi Dias,
Yasumasa Joti,
Takaki Hatsui,
Takashi Kameshima,
Yuichi Inubushi,
Kensuke Tono,
Jim Yang Lee,
Makina Yabashi,
Changyong Song
, et al. (4 additional authors not shown)
Abstract:
We report 3D coherent diffractive imaging of Au/Pd core-shell nanoparticles with 6 nm resolution on 5-6 femtosecond timescales. We measured single-shot diffraction patterns of core-shell nanoparticles using very intense and short x-ray free electron laser pulses. By taking advantage of the curvature of the Ewald sphere and the symmetry of the nanoparticle, we reconstructed the 3D electron density…
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We report 3D coherent diffractive imaging of Au/Pd core-shell nanoparticles with 6 nm resolution on 5-6 femtosecond timescales. We measured single-shot diffraction patterns of core-shell nanoparticles using very intense and short x-ray free electron laser pulses. By taking advantage of the curvature of the Ewald sphere and the symmetry of the nanoparticle, we reconstructed the 3D electron density of 34 core-shell structures from single-shot diffraction patterns. We determined the size of the Au core and the thickness of the Pd shell to be 65.0 +/- 1.0 nm and 4.0 +/- 0.5 nm, respectively, and identified the 3D elemental distribution inside the nanoparticles with an accuracy better than 2%. We anticipate this method can be used for quantitative 3D imaging of symmetrical nanostructures and virus particles.
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Submitted 18 February, 2017;
originally announced February 2017.
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Ptychographic hyperspectral spectromicroscopy with an extreme ultraviolet high harmonic comb
Authors:
Bosheng Zhang,
Dennis F. Gardner,
Matthew H. Seaberg,
Elisabeth R. Shanblatt,
Christina L. Porter,
Robert Karl, Jr.,
Christopher A. Mancuso,
Henry C. Kapteyn,
Margaret M. Murnane,
Daniel E. Adams
Abstract:
We demonstrate a new scheme of spectromicroscopy in the extreme ultraviolet (EUV) spectral range, where the spectral response of the sample at different wavelengths is imaged simultaneously. It is enabled by applying ptychographical information multiplexing (PIM) to a tabletop EUV source based on high harmonic generation, where four spectrally narrow harmonics near 30 nm form a spectral comb struc…
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We demonstrate a new scheme of spectromicroscopy in the extreme ultraviolet (EUV) spectral range, where the spectral response of the sample at different wavelengths is imaged simultaneously. It is enabled by applying ptychographical information multiplexing (PIM) to a tabletop EUV source based on high harmonic generation, where four spectrally narrow harmonics near 30 nm form a spectral comb structure. Extending PIM from previously demonstrated visible wavelengths to the EUV/X-ray wavelengths promises much higher spatial resolution and more powerful spectral contrast mechanism, making PIM an attractive spectromicroscopy method in both the microscopy and the spectroscopy aspects. Besides the sample, the multicolor EUV beam is also imaged in situ, making our method a powerful beam characterization technique. No hardware is used to separate or narrow down the wavelengths, leading to efficient use of the EUV radiation.
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Submitted 29 May, 2016;
originally announced May 2016.
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Quantitative Chemically-Specific Coherent Diffractive Imaging of Buried Interfaces using a Tabletop EUV Nanoscope
Authors:
Elisabeth R. Shanblatt,
Christina L. Porter,
Dennis F. Gardner,
Giulia F. Mancini,
Robert M. Karl Jr.,
Michael D. Tanksalvala,
Charles S. Bevis,
Victor H. Vartanian,
Henry C. Kapteyn,
Daniel E. Adams,
Margaret M. Murnane
Abstract:
Characterizing buried layers and interfaces is critical for a host of applications in nanoscience and nano-manufacturing. Here we demonstrate non-invasive, non-destructive imaging of buried interfaces using a tabletop, extreme ultraviolet (EUV), coherent diffractive imaging (CDI) nanoscope. Copper nanostructures inlaid in SiO2 are coated with 100 nm of aluminum, which is opaque to visible light an…
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Characterizing buried layers and interfaces is critical for a host of applications in nanoscience and nano-manufacturing. Here we demonstrate non-invasive, non-destructive imaging of buried interfaces using a tabletop, extreme ultraviolet (EUV), coherent diffractive imaging (CDI) nanoscope. Copper nanostructures inlaid in SiO2 are coated with 100 nm of aluminum, which is opaque to visible light and thick enough that neither optical microscopy nor atomic force microscopy can image the buried interfaces. Short wavelength (29 nm) high harmonic light can penetrate the aluminum layer, yielding high-contrast images of the buried structures. Moreover, differences in the absolute reflectivity of the interfaces before and after coating reveal the formation of interstitial diffusion and oxidation layers at the Al-Cu and Al-SiO2 boundaries. Finally, we show that EUV CDI provides a unique capability for quantitative, chemically-specific imaging of buried structures, and the material evolution that occurs at these buried interfaces, compared with all other approaches.
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Submitted 3 March, 2016;
originally announced March 2016.
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Tabletop Nanometer Extreme Ultraviolet Imaging in an Extended Reflection Mode using Coherent Fresnel Ptychography
Authors:
Matthew D. Seaberg,
Bosheng Zhang,
Dennis F. Gardner,
Elisabeth R. Shanblatt,
Margaret M. Murnane,
Henry C. Kapteyn,
Daniel E. Adams
Abstract:
We demonstrate high resolution extreme ultraviolet (EUV) coherent diffractive imaging in the most general reflection geometry by combining ptychography with tilted plane correction. This method makes it possible to image extended surfaces at any angle of incidence. Refocused light from a tabletop coherent high harmonic light source at 29 nm illuminates a nanopatterned surface at 45 degree angle of…
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We demonstrate high resolution extreme ultraviolet (EUV) coherent diffractive imaging in the most general reflection geometry by combining ptychography with tilted plane correction. This method makes it possible to image extended surfaces at any angle of incidence. Refocused light from a tabletop coherent high harmonic light source at 29 nm illuminates a nanopatterned surface at 45 degree angle of incidence. The reconstructed image contains quantitative amplitude and phase (in this case pattern height) information, comparing favorably with both scanning electron microscope and atomic force microscopy images. In the future, this approach will enable imaging of complex surfaces and nanostructures with sub-10 nm-spatial resolution and fs-temporal resolution, which will impact a broad range of nanoscience and nanotechnology including for direct application in actinic inspection in support of EUV lithography.
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Submitted 6 December, 2013;
originally announced December 2013.
