Nanopatterning of multicomponent van der Waals heterostructures using atomic force microscopy
Authors:
A. L. Shilov,
L. Elesin,
A. Grebenko,
V. I. Kleshch,
M. A. Kashchenko,
I. Mazurenko,
E. Titova,
E. Zharkova,
D. S. Yakovlev,
K. S. Novoselov,
D. A. Ghazaryan,
V. Dremov,
D. A. Bandurin
Abstract:
Multilayer van der Waals (vdW) heterostructures have become an important platform in which to study novel fundamental effects emerging at the nanoscale. Standard nanopatterning techniques relying on electron-beam lithography and reactive ion etching, widely applied to pattern such heterostructures, however, impose some limitations on the edge accuracy and resolution, as revealed through numerous e…
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Multilayer van der Waals (vdW) heterostructures have become an important platform in which to study novel fundamental effects emerging at the nanoscale. Standard nanopatterning techniques relying on electron-beam lithography and reactive ion etching, widely applied to pattern such heterostructures, however, impose some limitations on the edge accuracy and resolution, as revealed through numerous experiments with vdW quantum dots and point contacts. Here we present an alternative approach for electrode-free nanopatterning of thick multilayer vdW heterostructures based on atomic force microscopy (AFM). By applying an AC voltage of a relatively small frequency (1-10 kHz) between the sharp platinum tip and the substrate, we realize high-resolution ($\lesssim 100$ nm) etching of thick multicomponent heterostructures if the latter are deposited onto graphite slabs. Importantly, unlike more conventional electrode-free local anodic oxidation, our method does not require a special environment with excess humidity, can be applied at ambient conditions, and enables the patterning of multilayer heterostructures composed of graphene, graphite, hexagonal boron nitride (hBN), NbSe$_{2}$, WSe$_{2}$, and more.
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Submitted 24 June, 2024;
originally announced June 2024.
Fundamental limits of few-layer NbSe$_2$ microbolometers at terahertz frequencies
Authors:
K. Shein,
E. Zharkova,
M. A. Kashchenko,
A. I. Kolbatova,
A. Lyubchak,
L. Elesin,
E. Nguyen,
A. Semenov,
I. Charaev,
A. Schilling,
G. N. Goltsman,
K. S. Novoselov,
I. Gayduchenko,
D. A. Bandurin
Abstract:
The rapid development of infrared spectroscopy, observational astronomy, and scanning near-field microscopy has been enabled by the emergence of sensitive mid- and far-infrared photodetectors. Owing to their exceptional signal-to-noise ratio and fast photoresponse, superconducting hot-electron bolometers (HEBs) have become a critical component in these applications. While superconducting HEBs are…
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The rapid development of infrared spectroscopy, observational astronomy, and scanning near-field microscopy has been enabled by the emergence of sensitive mid- and far-infrared photodetectors. Owing to their exceptional signal-to-noise ratio and fast photoresponse, superconducting hot-electron bolometers (HEBs) have become a critical component in these applications. While superconducting HEBs are traditionally made from sputtered superconducting thin films like Nb or NbN, the potential of layered van der Waals (vdW) superconductors is untapped at THz frequencies. Here, we report the fabrication of superconducting HEBs out of few-layer NbSe$_2$ microwires. By improving the interface between NbSe$_2$ and metal leads connected to a broadband antenna, we overcome the impedance mismatch between this vdW superconductor and the radio frequency (RF) readout circuitry that allowed us to achieve large responsivity THz detection over the range from 0.13 to 2.5 THz with minimum noise equivalent power of 7~pW$\sqrt{Hz}$. Using the heterodyne sub-THz mixing technique, we reveal that NbSe$_2$ superconducting HEBs are relatively fast and feature a characteristic response time in the nanosecond range limited by the slow heat escape to the bath through a SiO$_2$ layer, on which they are assembled, in agreement with energy relaxation model. Our work expands the family of materials for superconducting HEBs technology, reveals NbSe$_2$ as a promising platform, and offers a reliable protocol for the in-lab production of custom bolometers using the vdW assembly technique.
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Submitted 21 November, 2023;
originally announced November 2023.
