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Hydrogen-free low-temperature silica for next generation integrated photonics
Authors:
Zheru Qiu,
Zihan Li,
Rui Ning Wang,
Xinru Ji,
Marta Divall,
Anat Siddharth,
Tobias J. Kippenberg
Abstract:
The advances in novel low-loss "on insulator" integrated photonics platforms beyond silicon, such as thin-film LiNbO3, LiTaO3, GaP and BaTiO3 have demonstrated major potential across a wide range of applications, due to their unique electro-optical or nonlinear optical properties. This has heralded novel devices, ranging from low-voltage and high-speed modulators to parametric amplifiers. For such…
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The advances in novel low-loss "on insulator" integrated photonics platforms beyond silicon, such as thin-film LiNbO3, LiTaO3, GaP and BaTiO3 have demonstrated major potential across a wide range of applications, due to their unique electro-optical or nonlinear optical properties. This has heralded novel devices, ranging from low-voltage and high-speed modulators to parametric amplifiers. For such photonic integrated circuits, a low-loss SiO2 cladding layer is a key element, serving as a passivation layer for the waveguides and enabling efficient fiber-to-chip coupling. However, numerous novel ferroelectric or III-V "on insulator" platforms have low tolerances for process temperature. This prohibits using high-temperature anneals to remove hydrogen, a common impurity that is inherent to ordinary chemical vapor deposited SiO2 and causes significant optical loss in the near infrared. Here, we satisfy the dichotomy of a low-loss wafer scale manufactured SiO2 cladding and low processing temperature. Inspired by the manufacturing of optical fibers, we introduce a hydrogen-free, low-loss SiO2 cladding that is deposited at low temperatures (300 degrees Celsius) by using SiCl4 and O2 as precursors in inductively coupled plasma-enhanced chemical vapor deposition (ICPCVD). By replacing hydrogenous silicon precursors (e.g. SiH4) with SiCl4, the deposited film is inherently free from residual hydrogen. The process temperature is compatible with the "on insulator" platforms and CMOS electronic integrated circuits. We demonstrate a wide low-loss window that covers all telecommunication bands from 1260 nm to 1625 nm. We achieve a < 2.5 dB/m waveguide loss at 1550 nm, comparable with 1200 degree Celsius annealed films. Our SiCl4 process provides a key future cladding for all recently emerged "on-insulator" photonics platforms, that is low cost, scalable in manufacturing, and directly foundry compatible.
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Submitted 26 April, 2024; v1 submitted 12 December, 2023;
originally announced December 2023.
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Updated baseline for a staged Compact Linear Collider
Authors:
The CLIC,
CLICdp collaborations,
:,
M. J. Boland,
U. Felzmann,
P. J. Giansiracusa,
T. G. Lucas,
R. P. Rassool,
C. Balazs,
T. K. Charles,
K. Afanaciev,
I. Emeliantchik,
A. Ignatenko,
V. Makarenko,
N. Shumeiko,
A. Patapenka,
I. Zhuk,
A. C. Abusleme Hoffman,
M. A. Diaz Gutierrez,
M. Vogel Gonzalez,
Y. Chi,
X. He,
G. Pei,
S. Pei,
G. Shu
, et al. (493 additional authors not shown)
Abstract:
The Compact Linear Collider (CLIC) is a multi-TeV high-luminosity linear e+e- collider under development. For an optimal exploitation of its physics potential, CLIC is foreseen to be built and operated in a staged approach with three centre-of-mass energy stages ranging from a few hundred GeV up to 3 TeV. The first stage will focus on precision Standard Model physics, in particular Higgs and top-q…
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The Compact Linear Collider (CLIC) is a multi-TeV high-luminosity linear e+e- collider under development. For an optimal exploitation of its physics potential, CLIC is foreseen to be built and operated in a staged approach with three centre-of-mass energy stages ranging from a few hundred GeV up to 3 TeV. The first stage will focus on precision Standard Model physics, in particular Higgs and top-quark measurements. Subsequent stages will focus on measurements of rare Higgs processes, as well as searches for new physics processes and precision measurements of new states, e.g. states previously discovered at LHC or at CLIC itself. In the 2012 CLIC Conceptual Design Report, a fully optimised 3 TeV collider was presented, while the proposed lower energy stages were not studied to the same level of detail. This report presents an updated baseline staging scenario for CLIC. The scenario is the result of a comprehensive study addressing the performance, cost and power of the CLIC accelerator complex as a function of centre-of-mass energy and it targets optimal physics output based on the current physics landscape. The optimised staging scenario foresees three main centre-of-mass energy stages at 380 GeV, 1.5 TeV and 3 TeV for a full CLIC programme spanning 22 years. For the first stage, an alternative to the CLIC drive beam scheme is presented in which the main linac power is produced using X-band klystrons.
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Submitted 27 March, 2017; v1 submitted 26 August, 2016;
originally announced August 2016.
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Commissioning experience and beam physics measurements at the SwissFEL Injector Test Facility
Authors:
T. Schietinger,
M. Pedrozzi,
M. Aiba,
V. Arsov,
S. Bettoni,
B. Beutner,
M. Calvi,
P. Craievich,
M. Dehler,
F. Frei,
R. Ganter,
C. P. Hauri,
R. Ischebeck,
Y. Ivanisenko,
M. Janousch,
M. Kaiser,
B. Keil,
F. Löhl,
G. L. Orlandi,
C. Ozkan Loch,
P. Peier,
E. Prat,
J. -Y. Raguin,
S. Reiche,
T. Schilcher
, et al. (70 additional authors not shown)
Abstract:
The SwissFEL Injector Test Facility operated at the Paul Scherrer Institute between 2010 and 2014, serving as a pilot plant and testbed for the development and realization of SwissFEL, the X-ray Free-Electron Laser facility under construction at the same institute. The test facility consisted of a laser-driven rf electron gun followed by an S-band booster linac, a magnetic bunch compression chican…
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The SwissFEL Injector Test Facility operated at the Paul Scherrer Institute between 2010 and 2014, serving as a pilot plant and testbed for the development and realization of SwissFEL, the X-ray Free-Electron Laser facility under construction at the same institute. The test facility consisted of a laser-driven rf electron gun followed by an S-band booster linac, a magnetic bunch compression chicane and a diagnostic section including a transverse deflecting rf cavity. It delivered electron bunches of up to 200 pC charge and up to 250 MeV beam energy at a repetition rate of 10 Hz. The measurements performed at the test facility not only demonstrated the beam parameters required to drive the first stage of an FEL facility, but also led to significant advances in instrumentation technologies, beam characterization methods and the generation, transport and compression of ultra-low-emittance beams. We give a comprehensive overview of the commissioning experience of the principal subsystems and the beam physics measurements performed during the operation of the test facility, including the results of the test of an in-vacuum undulator prototype generating radiation in the vacuum ultraviolet and optical range.
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Submitted 27 October, 2016; v1 submitted 8 June, 2016;
originally announced June 2016.
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Femtosecond resolution timing jitter correction on a TW scale Ti:sapphire laser system for FEL pump-probe experiments
Authors:
Marta Csatari Divall,
Patrick Mutter,
Edwin J. Divall,
Christoph P. Hauri
Abstract:
Intense ultrashort pulse lasers are used for fs resolution pumpprobe experiments more and more at large scale facilities, such as free electron lasers (FEL). Measurement of the arrival time of the laser pulses and stabilization to the machine or other sub-systems on the target, is crucial for high time-resolution measurements. In this work we report on a single shot, spectrally resolved, non-colli…
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Intense ultrashort pulse lasers are used for fs resolution pumpprobe experiments more and more at large scale facilities, such as free electron lasers (FEL). Measurement of the arrival time of the laser pulses and stabilization to the machine or other sub-systems on the target, is crucial for high time-resolution measurements. In this work we report on a single shot, spectrally resolved, non-collinear cross-correlator with sub-fs resolution. With a feedback applied we keep the output of the TW class Ti:sapphire amplifier chain in time with the seed oscillator to ~3 fs RMS level for several hours. This is well below the typical pulse duration used at FELs and supports fs resolution pump-probe experiments. Short term jitter and long term timing drift measurements are presented. Applicability to other wavelengths and integration into the timing infrastructure of the FEL are also covered to show the full potential of the device.
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Submitted 10 September, 2015;
originally announced September 2015.
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Intense sub-2 cycle infrared pulse generation via phase mismatched cascaded nonlinear interaction in DAST crystal
Authors:
A. Trisorio,
M. Divall,
C. P. Hauri
Abstract:
Octave-spanning, 12.5 fs, (1.9 cycle) pulses with 115 μJ energy in the short-wavelength mid-infrared spectral range (1-2.5 μm) have been generated via phase-mismatched cascaded nonlinear frequency conversion using organic DAST crystal. Such ultra-fast cascading effect is ensured by the interaction of a pump pulse with the exceptionally large effective nonlinearity of the DAST crystal and experienc…
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Octave-spanning, 12.5 fs, (1.9 cycle) pulses with 115 μJ energy in the short-wavelength mid-infrared spectral range (1-2.5 μm) have been generated via phase-mismatched cascaded nonlinear frequency conversion using organic DAST crystal. Such ultra-fast cascading effect is ensured by the interaction of a pump pulse with the exceptionally large effective nonlinearity of the DAST crystal and experiencing non-resonant, strongly phase mismatched, Kerr-like negative nonlinearity.
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Submitted 25 October, 2013;
originally announced October 2013.