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Application of Machine Learning Method to Model-Based Library Approach to Critical Dimension Measurement by CD-SEM
Authors:
P. Guo,
H. Miao,
Y. B. Zou,
S. F. Mao,
Z. J. Ding
Abstract:
The model-based library (MBL) method has already been established for the accurate measurement of critical dimension (CD) of semiconductor linewidth from a critical dimension scanning electron microscope (CD-SEM) image. In this work the MBL method has been further investigated by combing the CD-SEM image simulation with a neural network algorithm. The secondary electron linescan profiles were calc…
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The model-based library (MBL) method has already been established for the accurate measurement of critical dimension (CD) of semiconductor linewidth from a critical dimension scanning electron microscope (CD-SEM) image. In this work the MBL method has been further investigated by combing the CD-SEM image simulation with a neural network algorithm. The secondary electron linescan profiles were calculated at first by a Monte Carlo simulation method, enabling to obtain the dependence of linescan profiles on the selected values of various geometrical parameters (e.g., top CD, sidewall angle and height) for Si and Au trapezoidal line structures. The machine learning methods have then been applied to predicate the linescan profiles from a randomly selected training set of the calculated profiles. The predicted results agree very well with the calculated profiles with the standard deviation of 0.1% and 6% for the relative error distributions of Si and Au line structures, respectively. This result shows that the machine learning methods can be practically applied to the MBL method for the purpose of reducing the library size, accelerating the construction of the MBL database and enriching the content of an available MBL database.
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Submitted 25 November, 2023;
originally announced November 2023.
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Regulating electron diffraction direction with cylindrically symmetric rotating crystal
Authors:
L. Cheng,
B. Da,
X. Liu,
K. Shigeto,
K. Tsukagoshi,
T. Nabatame,
J. W. Liu,
H. Zhang,
H. Yoshikawa,
S. Tanuma,
Z. S. Gao,
H. X. Guo,
Y. Sun,
J. Hu,
Z. J. Ding
Abstract:
We report a promising InSiO film that allows simultaneous observation of sample morphology and Kikuchi patterns in raster scan mode of scanning electron microscopy. This new experimental observation suggests potential mechanism beyond existing diffraction theories. We find by simulation that this material has a novel cylindrically symmetric rotational crystalline structure that can control the dif…
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We report a promising InSiO film that allows simultaneous observation of sample morphology and Kikuchi patterns in raster scan mode of scanning electron microscopy. This new experimental observation suggests potential mechanism beyond existing diffraction theories. We find by simulation that this material has a novel cylindrically symmetric rotational crystalline structure that can control the diffraction direction of electrons through a specific rotational distribution of crystal planes, while being independent of the angle and energy of incident electrons within a certain range.
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Submitted 14 November, 2022;
originally announced November 2022.
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Ferromagnetism in Magic-angle Twisted Bilayer Graphene: A Monte Carlo Study
Authors:
H. X. Zhang,
Y. X. Gao,
Z. J. Ding
Abstract:
Ferromagnetism emerges when the Moire superlattice formed by stacking two graphene monolayers in a magic twist angle are filled with integer number electrons. This work investigates the ferromagnetism based on the Ising models for a triangular lattice at one-quarter filling, a square lattice at half filling and a Kagome lattice at three-quarters filling of electrons. The temperature dependent heat…
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Ferromagnetism emerges when the Moire superlattice formed by stacking two graphene monolayers in a magic twist angle are filled with integer number electrons. This work investigates the ferromagnetism based on the Ising models for a triangular lattice at one-quarter filling, a square lattice at half filling and a Kagome lattice at three-quarters filling of electrons. The temperature dependent heat capacity, magnetic susceptibility, energy and magnetization curves are calculated at zero magnetic field with a Monte Carlo method, leading to derive the phase transition temperatures, T_c=0.76, 1.33 and 4.75 K, respectively. Magnetization curves at finite magnetic field show strong hysteresis at temperature below 0.5 K for all the fillings considered, indicating the ferromagnetism of the system; the results are in agreement with experimental observations.
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Submitted 29 June, 2022;
originally announced June 2022.
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Banach fixed-point between SEM image and EBSD diffraction pattern from a cylindrically symmetric rotating crystal
Authors:
contribute equally,
K. Tsukagoshi,
T. Nabatame,
Z. J. Ding,
Y. Sun,
J. Hu,
J. W. Liu,
D. M. Tang,
H. Zhang,
Z. S. Gao,
H. X. Guo,
H. Yoshikawa,
S. Tanuma
Abstract:
The Kikuchi bands arise from Bragg diffraction of incoherent electrons scattered within a crystalline specimen and can be observed in both the transmission and reflection modes of scanning electron microscopy (SEM). Converging, rocking, or grazing incidence beams must be used to generate divergent electron sources to obtain the Kikuchi pattern. This paper report the observation of Kikuchi pattern…
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The Kikuchi bands arise from Bragg diffraction of incoherent electrons scattered within a crystalline specimen and can be observed in both the transmission and reflection modes of scanning electron microscopy (SEM). Converging, rocking, or grazing incidence beams must be used to generate divergent electron sources to obtain the Kikuchi pattern. This paper report the observation of Kikuchi pattern from SEM images of an exceptional rotating crystal with continuous rotation in the local crystal direction and satisfying cylindrical symmetry, named a cylindrically symmetric rotating crystal. SEM images of cylindrically symmetric rotating crystals reflect the interactions between electrons and the sample in both the real- and momentum-space. Furthermore, we identify an unexpected mathematical relationship between the electron backscattered diffraction (EBSD) Kikuchi pattern matrix map and the SEM image of the present sample which can be rationalized as a concrete example of the Banach fixed-point theorems in the field of EBSD technique.
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Submitted 2 August, 2022; v1 submitted 26 May, 2022;
originally announced May 2022.
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A Comparative Study on Monte Carlo Simulations of Electron Emission from Liquid Water
Authors:
M. Mehnaz,
L. H. Yang,
Y. B. Zou,
B. Da,
S. F. Mao,
Z. J. Ding
Abstract:
Liquid water has been proved to be an excellent medium for specimen structure imaging by a scanning electron microscope. Knowledge of electron-water interaction physics and particularly the secondary electron yield is essential to the interpretation of the imaging contrast. However, very little is known up to now experimentally on the low energy electron interaction with liquid water because of ce…
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Liquid water has been proved to be an excellent medium for specimen structure imaging by a scanning electron microscope. Knowledge of electron-water interaction physics and particularly the secondary electron yield is essential to the interpretation of the imaging contrast. However, very little is known up to now experimentally on the low energy electron interaction with liquid water because of certain practical limitations. It is then important to gain some useful information about electron emission from water by a Monte Carlo (MC) simulation technique that can numerically model electron transport trajectories in water. In this study, we have performed MC simulations of electron emission from liquid water in the primary energy range of 50 eV-30 keV by using two different codes, i.e. a classical MC (CMC) code developed in our laboratory and the Geant4-DNA (G4DNA) code. The calculated secondary electron yield and electron backscattering coefficient are compared with experimental results wherever applicable to verify the validity of physical models for the electron-water interaction. The secondary electron yield vs. primary energy curves calculated by the two codes present the same generic curve shape as that of metals but in rather different absolute values. G4DNA yields the underestimated absolute values due to the application of one step thermalization model by setting a cutoff energy at 7.4 eV so that the low energy losses due to phonon excitations are omitted. Our CMC calculation of secondary electron yield is closer to the experimental data and the energy distribution is reasonable. It is concluded that a full dielectric function data at low energy loss values below 7.4 eV shall be employed in G4DNA model for the modeling of low energy electrons.
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Submitted 26 March, 2019;
originally announced March 2019.
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Competition Induced Spontaneous Resonant Annihilation of Turing Pattern
Authors:
C. Cong,
Z. J. Ding
Abstract:
Including an extra reactant in the Gray-Scott reaction-diffusion model, the dynamical competition between different chemical species during the Turing pattern formation can lead to species territory invasion phenomenon among different patterns of respective species. We report a peculiar oscillatory change on respective mass of a 2D pattern under competition condition by numerical simulation. The i…
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Including an extra reactant in the Gray-Scott reaction-diffusion model, the dynamical competition between different chemical species during the Turing pattern formation can lead to species territory invasion phenomenon among different patterns of respective species. We report a peculiar oscillatory change on respective mass of a 2D pattern under competition condition by numerical simulation. The invaded Turing spot pattern can turn from a steady fading mode into a spontaneous resonant oscillation mode, the firefly lighting mode, which occurs synchronously among nearest neighboring spots, until the largest spot is annihilated finally. Such resonant oscillation behavior for annihilation can continue but in a more chaotic way towards final dying of the pattern by invasion of another pattern. The resonant frequency is found to be intrinsic character of the invaded pattern, depending on its control parameters.
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Submitted 21 September, 2017;
originally announced September 2017.
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Absolute Determination of Optical Constants by a Direct Physical Modeling of Reflection Electron Energy Loss Spectra
Authors:
H. Xu,
B. Da,
J. Toth,
K. Tokesi,
Z. J. Ding
Abstract:
We present an absolute extraction method of optical constants of metal from the measured reflection electron energy loss (REELS) spectra by using the recently developed reverse Monte Carlo (RMC) technique. The method is based on a direct physical modeling of electron elastic and electron inelastic scattering near the surface region where the surface excitation becomes important to fully describe t…
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We present an absolute extraction method of optical constants of metal from the measured reflection electron energy loss (REELS) spectra by using the recently developed reverse Monte Carlo (RMC) technique. The method is based on a direct physical modeling of electron elastic and electron inelastic scattering near the surface region where the surface excitation becomes important to fully describe the spectrum loss feature intensity in relative to the elastic peak intensity. An optimization procedure of oscillator parameters appeared in the energy loss function (ELF) for describing electron inelastic scattering due to the bulk- and surface-excitations was performed with the simulated annealing method by a successive comparison between the measured and Monte Carlo simulated REELS spectra. The ELF and corresponding optical constants of Fe were obtained from the REELS spectra measured at incident energies of 1000, 2000 and 3000 eV. The validity of the present optical data has been verified with the f- and ps-sum rules showing the accuracy and applicability of the present approach. Our data are also compared with previous optical data from other sources.
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Submitted 8 September, 2016;
originally announced September 2016.
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Irreversible Temperature Quenching and Antiquenching of Photoluminescence of ZnS/CdS:Mn/ZnS Quantum Well Quantum Dots
Authors:
X. Ding,
R. C. Dai,
Z. Zhao,
Z. P. Wang,
Z. Q. Sun,
Z. M. Zhang,
Z. J. Ding
Abstract:
An experimental observation on irreversible thermal quenching and antiquenching behavior is reported for photoluminescence (PL) of ZnS/CdS:Mn/ZnS quantum well quantum dots (QWQDs) prepared with a reverse micelle method. The dual-color emissions, a blue emission band centered at 430 nm and a Mn2+ 4T1 -> 6A1 orange emission peak at 600 nm, were found to have different dependences of emission intensi…
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An experimental observation on irreversible thermal quenching and antiquenching behavior is reported for photoluminescence (PL) of ZnS/CdS:Mn/ZnS quantum well quantum dots (QWQDs) prepared with a reverse micelle method. The dual-color emissions, a blue emission band centered at 430 nm and a Mn2+ 4T1 -> 6A1 orange emission peak at 600 nm, were found to have different dependences of emission intensity on temperature in the range of 8-290 K. Depending on Mn2+ do** concentration, they can both show strong antiquenching behavior in a certain temperature range in addition to the usual thermal quenching when lowering down temperature while it is very prominent for orange emission but weaker for blue emission. Moreover, the antiquenching behavior is weakened with rise of temperature, giving rise to a hysteretic PL temperature dependence for the QWQDs.
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Submitted 19 September, 2013;
originally announced September 2013.
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Ballistic Thermal Rectification in Asymmetric Three-Terminal Mesoscopic Dielectric Systems
Authors:
Yi Ming,
Zhe Xian Wang,
Ze Jun Ding,
Hui Min Li
Abstract:
By coupling the asymmetric three-terminal mesoscopic dielectric system with a temperature probe, at low temperature, the ballistic heat flux flow through the other two asymmetric terminals in the nonlinear response regime is studied based on the Landauer formulation of transport theory. The thermal rectification is attained at the quantum regime. It is a purely quantum effect and is determined by…
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By coupling the asymmetric three-terminal mesoscopic dielectric system with a temperature probe, at low temperature, the ballistic heat flux flow through the other two asymmetric terminals in the nonlinear response regime is studied based on the Landauer formulation of transport theory. The thermal rectification is attained at the quantum regime. It is a purely quantum effect and is determined by the dependence of the ratio $τ_{RC}(ω)/τ_{RL}(ω)$ on $ω$, the phonon's frequency. Where $τ_{RC}(ω)$ and $τ_{RL}(ω)$ are respectively the transmission coefficients from two asymmetric terminals to the temperature probe, which are determined by the inelastic scattering of ballistic phonons in the temperature probe. Our results are confirmed by extensive numerical simulations.
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Submitted 26 October, 2010; v1 submitted 19 October, 2009;
originally announced October 2009.
