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Transfer printing micro-assembly of silicon photonic crystal cavity arrays: beating the fabrication tolerance limit
Authors:
Sean P. Bommer,
Christopher Panuski,
Benoit Guilhabert,
Zhongyi Xia,
Jack A. Smith,
Martin D. Dawson,
Dirk Englund,
Michael J. Strain
Abstract:
Photonic crystal cavities (PhCCs) can confine optical fields in ultra-small volumes, enabling efficient light-matter interactions for quantum and non-linear optics, sensing and all-optical signal processing. The inherent nanometric tolerances of micro-fabrication platforms can induce cavity resonant wavelength shifts two-orders of magnitude larger than cavity linewidths, prohibiting fabrication of…
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Photonic crystal cavities (PhCCs) can confine optical fields in ultra-small volumes, enabling efficient light-matter interactions for quantum and non-linear optics, sensing and all-optical signal processing. The inherent nanometric tolerances of micro-fabrication platforms can induce cavity resonant wavelength shifts two-orders of magnitude larger than cavity linewidths, prohibiting fabrication of arrays of nominally identical devices. We address this device variability by fabricating PhCCs as releasable pixels that can be transferred from their native substrate to a receiver where ordered micro-assembly can overcome the inherent fabrication variance. We demonstrate the measurement, binning and transfer of 119 PhCCs in a single session, producing spatially ordered arrays of PhCCs, sorted by resonant wavelength. Furthermore, the rapid in-situ measurement of the devices enables measurements of the PhCCs dynamic response to the print process for the first time, showing plastic and elastic effects in the seconds to hours range.
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Submitted 28 June, 2024;
originally announced June 2024.
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Additive GaN solid immersion lenses for enhanced photon extraction efficiency from diamond color centers
Authors:
Xingrui Cheng,
Nils Kolja Wessling,
Saptarsi Ghosh,
Andrew R. Kirkpatrick,
Menno J. Kappers,
Yashna N. D. Lekhai,
Gavin W. Morley,
Rachel A. Oliver,
Jason M. Smith,
Martin D. Dawson,
Patrick S. Salter,
Michael J. Strain
Abstract:
Effective light extraction from optically active solid-state spin centres inside high-index semiconductor host crystals is an important factor in integrating these pseudo-atomic centres in wider quantum systems. Here we report increased fluorescent light collection efficiency from laser-written nitrogen vacancy centers (NV) in bulk diamond facilitated by micro-transfer printed GaN solid immersion…
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Effective light extraction from optically active solid-state spin centres inside high-index semiconductor host crystals is an important factor in integrating these pseudo-atomic centres in wider quantum systems. Here we report increased fluorescent light collection efficiency from laser-written nitrogen vacancy centers (NV) in bulk diamond facilitated by micro-transfer printed GaN solid immersion lenses. Both laser-writing of NV centres and transfer printing of micro-lens structures are compatible with high spatial resolution, enabling deterministic fabrication routes towards future scalable systems development. The micro-lenses are integrated in a non-invasive manner, as they are added on top of the unstructured diamond surface and bond by Van-der-Waals forces. For emitters at 5 micrometer depth, we find approximately 2x improvement of fluorescent light collection using an air objective with a numerical aperture of NA = 0.95 in good agreement with simulations. Similarly, the solid immersion lenses strongly enhance light collection when using an objective with NA = 0.5, significantly improving the signal-to-noise ratio of the NV center emission while maintaining the NV's quantum properties after integration.
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Submitted 20 June, 2023;
originally announced June 2023.
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Photonic integration of lithium niobate micro-ring resonators onto silicon nitride waveguide chips by transfer-printing
Authors:
Zhibo Li,
Jack A. Smith,
Mark Scullion,
Nils Kolja Wessling,
Loyd J. McKnight,
Martin D. Dawson,
Michael J. Strain
Abstract:
The heterogeneous integration of lithium niobate photonic waveguide devices onto a silicon nitride waveguide platform via a transfer-printing approach has been demonstrated for the first time. A fabrication process was developed to make free-standing lithium niobate membrane devices compatible with back-end integration onto photonic integrated circuits. Micro-ring resonators in membrane format wer…
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The heterogeneous integration of lithium niobate photonic waveguide devices onto a silicon nitride waveguide platform via a transfer-printing approach has been demonstrated for the first time. A fabrication process was developed to make free-standing lithium niobate membrane devices compatible with back-end integration onto photonic integrated circuits. Micro-ring resonators in membrane format were lithographically defined by using laser direct writing and plasma dry etching. The lithium niobate micro-ring resonators were then transferred from their host substrate and released onto a silicon nitride waveguide chip. An all-pass ring resonator transmission spectrum was obtained in the 1.5 μm to 1.6 μm wavelength range, with a measured loaded Q-factor larger than 32000.
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Submitted 8 September, 2022; v1 submitted 25 August, 2022;
originally announced August 2022.
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Fabrication and transfer print based integration of free-standing GaN membrane micro-lenses onto semiconductor chips
Authors:
Nils Kolja Wessling,
Saptarsi Ghosh,
Benoit Guilhabert,
Menno Kappers,
Miles Toon,
Rachel A. Oliver,
Martin D. Dawson,
Michael J. Strain
Abstract:
We demonstrate the back-end integration of broadband, high-NA GaN micro-lenses by micro-assembly onto non-native semiconductor substrates. We developed a highly parallel micro-fabrication process flow to suspend micron scale plano-convex lens platelets from 6" Si growth wafers and show their subsequent transfer-printing integration. A growth process targeted at producing unbowed epitaxial wafers w…
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We demonstrate the back-end integration of broadband, high-NA GaN micro-lenses by micro-assembly onto non-native semiconductor substrates. We developed a highly parallel micro-fabrication process flow to suspend micron scale plano-convex lens platelets from 6" Si growth wafers and show their subsequent transfer-printing integration. A growth process targeted at producing unbowed epitaxial wafers was combined with optimisation of the etching volume in order to produce flat devices for printing. Lens structures were fabricated with 6 to 11 $μ$m diameter, 2 $μ$m height and root-mean-squared surface roughness below 2 nm. The lenses were printed in a vertically coupled geometry on a single crystalline diamond substrate and with $μ$m-precise placement on a horizontally coupled photonic integrated circuit waveguide facet. Optical performance analysis shows that these lenses could be used to couple to diamond nitrogen vacancy centres at micron scale depths and demonstrates their potential for visible to infrared light-coupling applications.
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Submitted 19 September, 2022; v1 submitted 10 August, 2022;
originally announced August 2022.
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A full degree-of-freedom photonic crystal spatial light modulator
Authors:
Christopher L. Panuski,
Ian R. Christen,
Momchil Minkov,
Cole J. Brabec,
Sivan Trajtenberg-Mills,
Alexander D. Griffiths,
Jonathan J. D. McKendry,
Gerald L. Leake,
Daniel J. Coleman,
Cung Tran,
Jeffrey St Louis,
John Mucci,
Cameron Horvath,
Jocelyn N. Westwood-Bachman,
Stefan F. Preble,
Martin D. Dawson,
Michael J. Strain,
Michael L. Fanto,
Dirk R. Englund
Abstract:
Harnessing the full complexity of optical fields requires complete control of all degrees-of-freedom within a region of space and time -- an open goal for present-day spatial light modulators (SLMs), active metasurfaces, and optical phased arrays. Here, we solve this challenge with a programmable photonic crystal cavity array enabled by four key advances: (i) near-unity vertical coupling to high-f…
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Harnessing the full complexity of optical fields requires complete control of all degrees-of-freedom within a region of space and time -- an open goal for present-day spatial light modulators (SLMs), active metasurfaces, and optical phased arrays. Here, we solve this challenge with a programmable photonic crystal cavity array enabled by four key advances: (i) near-unity vertical coupling to high-finesse microcavities through inverse design, (ii) scalable fabrication by optimized, 300 mm full-wafer processing, (iii) picometer-precision resonance alignment using automated, closed-loop "holographic trimming", and (iv) out-of-plane cavity control via a high-speed micro-LED array. Combining each, we demonstrate near-complete spatiotemporal control of a 64-resonator, two-dimensional SLM with nanosecond- and femtojoule-order switching. Simultaneously operating wavelength-scale modes near the space- and time-bandwidth limits, this work opens a new regime of programmability at the fundamental limits of multimode optical control.
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Submitted 21 April, 2022;
originally announced April 2022.
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Ultra-high frame rate digital light projector using chipscale LED-on-CMOS technology
Authors:
Navid Bani Hassan,
Fahimeh Dehkhoda,
Enyuan Xie,
Johannes Herrnsdorf,
Michael J Strain,
Robert Henderson,
Martin D Dawson
Abstract:
Digital light projector systems are crucial components in applications including computational imaging, fluorescence microscopy and highly parallel data communications. Here we present a chip-scale projector system based on emissive micro-LED pixels directly bonded to a smart pixel CMOS drive chip. Enabled by the high modulation bandwidth of the LED devices, the 128x128 pixel array can project bin…
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Digital light projector systems are crucial components in applications including computational imaging, fluorescence microscopy and highly parallel data communications. Here we present a chip-scale projector system based on emissive micro-LED pixels directly bonded to a smart pixel CMOS drive chip. Enabled by the high modulation bandwidth of the LED devices, the 128x128 pixel array can project binary patterns at up to 0.5 Mfps and toggle between two stored frames at MHz rates. The projector has a 5-bit grayscale resolution that can be updated at rates up to 83 kfps, and can be held in memory as a constant bias for the binary pattern projection. Finally, the projector can be operated in a pulsed mode, with individual pixels emitting pulses down to a few nanoseconds in duration. Again, this mode can be used in conjunction with the high-speed spatial pattern projection. The design of the smart pixels and LED devices are presented along with measurements of each mode of operation. As a demonstration of the data throughput achievable with this system we present an optical camera communications application, exhibiting data rates of >5 Gbps, over three orders of magnitude improvement on current demonstrations.
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Submitted 24 November, 2021;
originally announced November 2021.
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Characterisation, Selection and Micro-Assembly of Nanowire Laser Systems
Authors:
Dimitars Jevtics,
John McPhillimy,
Benoit Guilhabert,
Juan A. Alanis,
Hark Hoe Tan,
Chennupati Jagadish,
Martin D. Dawson,
Antonio Hurtado,
Patrick Parkinson,
Michael J. Strain
Abstract:
Semiconductor nanowire (NW) lasers are a promising technology for the realisation of coherent optical sources with extremely small footprint. To fully realize their potential as building blocks in on-chip photonic systems, scalable methods are required for dealing with large populations of inhomogeneous devices that are typically randomly distributed on host substrates. In this work two complement…
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Semiconductor nanowire (NW) lasers are a promising technology for the realisation of coherent optical sources with extremely small footprint. To fully realize their potential as building blocks in on-chip photonic systems, scalable methods are required for dealing with large populations of inhomogeneous devices that are typically randomly distributed on host substrates. In this work two complementary, high-throughput techniques are combined: the characterisation of nanowire laser populations using automated optical microscopy, and a high accuracy transfer printing process with automatic device spatial registration and transfer. In this work a population of NW lasers is characterised, binned by threshold energy density and subsequently printed in arrays onto a secondary substrate. Statistical analysis of the transferred and control devices show that the transfer process does not incur measurable laser damage and the threshold binning can be maintained. Analysis is provided on the threshold and mode spectra of the device populations to investigate the potential for using NW lasers for integrated systems fabrication.
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Submitted 7 January, 2020;
originally announced January 2020.
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All-optical tuning of a diamond micro-disk resonator on silicon
Authors:
Paul Hill,
Charalambos Klitis,
Benoit Guilhabert,
Marc Sorel,
Erdan Gu,
Martin D. Dawson,
Michael J. Strain
Abstract:
High quality integrated diamond photonic devices have previously been demonstrated in applications from non-linear photonics to on-chip quantum optics. However, the small sample sizes of single crystal material available, and the difficulty in tuning its optical properties, are barriers to the scaling of these technologies. Both of these issues can be addressed by integrating micron scale diamond…
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High quality integrated diamond photonic devices have previously been demonstrated in applications from non-linear photonics to on-chip quantum optics. However, the small sample sizes of single crystal material available, and the difficulty in tuning its optical properties, are barriers to the scaling of these technologies. Both of these issues can be addressed by integrating micron scale diamond devices onto host photonic integrated circuits using a highly accurate micro-assembly method. In this work a diamond micro-disk resonator is integrated with a standard single mode silicon-on-insulator waveguide, exhibiting an average loaded Q-factor of 3.1x10^4 across a range of spatial modes, with a maximum loaded Q-factor of 1.05x10^5. The micron scale device size and high thermal impedance of the silica interface layer allow for significant thermal loading and continuous resonant wavelength tuning across a 450 pm range using a mW level optical pump. This diamond-on-demand integration technique paves the way for tunable devices coupled across large scale photonic circuits.
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Submitted 11 July, 2019;
originally announced July 2019.
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High-sensitivity free space optical communications using low size, weight and power hardware
Authors:
Alexander D. Griffiths,
Johannes Herrnsdorf,
Oscar Almer,
Robert K. Henderson,
Michael J. Strain,
Martin D. Dawson
Abstract:
Free space optical communication systems with extremely high detector sensitivities are attractive for various applications with low size, weight and power requirements. For these practical systems, integrated hardware elements with small form factor are needed. Here, we demonstrate a communication link using a CMOS integrated micro-LED and array of single-photon avalanche diodes. These integrated…
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Free space optical communication systems with extremely high detector sensitivities are attractive for various applications with low size, weight and power requirements. For these practical systems, integrated hardware elements with small form factor are needed. Here, we demonstrate a communication link using a CMOS integrated micro-LED and array of single-photon avalanche diodes. These integrated systems provide a data rate of 100 Mb/s at a sensitivity of -55.2 dBm, corresponding to 7.5 detected photons per bit.
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Submitted 22 January, 2019;
originally announced February 2019.
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Poissonian communications: free space optical data transfer at the few-photon level
Authors:
Alexander D. Griffiths,
Johannes Herrnsdorf,
Christopher Lowe,
Malcolm Macdonald,
Robert Henderson,
Michael J. Strain,
Martin D. Dawson
Abstract:
Communicating information at the few photon level typically requires some complexity in the transmitter or receiver in order to operate in the presence of noise. This in turn incurs expense in the necessary spatial volume and power consumption of the system. In this work we present a self-synchronised free-space optical communications system based on simple, compact and low power consumption semic…
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Communicating information at the few photon level typically requires some complexity in the transmitter or receiver in order to operate in the presence of noise. This in turn incurs expense in the necessary spatial volume and power consumption of the system. In this work we present a self-synchronised free-space optical communications system based on simple, compact and low power consumption semiconductor devices. A temporal encoding method, implemented using a gallium nitride micro-LED source and a silicon single photon avalanche photo-detector (SPAD) demonstrates data transmission at rates up to 100 kb/s for 8.25 pW received power, corresponding to 27 photons per bit. Furthermore, the signals can be decoded in the presence of both constant and modulated background noise at levels significantly exceeding the signal power. The systems low power consumption and modest electronics requirements are demonstrated employing it as a communications channel between two nano-satellite simulator systems.
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Submitted 24 January, 2018;
originally announced January 2018.
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GaN directional couplers for integrated quantum photonics
Authors:
Yanfeng Zhang,
Loyd McKnight,
Erman Engin,
Ian M. Watson,
Martin J. Cryan,
Erdan Gu,
Mark G. Thompson,
Stephane Calvez,
Jeremy L. O'Brien,
Martin D. Dawson
Abstract:
Large cross-section GaN waveguides are proposed as a suitable architecture to achieve integrated quantum photonic circuits. Directional couplers with this geometry have been designed with aid of the beam propagation method and fabricated using inductively coupled plasma etching. Scanning electron microscopy inspection shows high quality facets for end coupling and a well defined gap between rib pa…
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Large cross-section GaN waveguides are proposed as a suitable architecture to achieve integrated quantum photonic circuits. Directional couplers with this geometry have been designed with aid of the beam propagation method and fabricated using inductively coupled plasma etching. Scanning electron microscopy inspection shows high quality facets for end coupling and a well defined gap between rib pairs in the coupling region. Optical characterization at 800 nm shows single-mode operation and coupling-length-dependent splitting ratios. Two photon interference of degenerate photon pairs has been observed in the directional coupler by measurement of the Hong-Ou-Mandel dip with 96% visibility.
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Submitted 20 February, 2012;
originally announced February 2012.
