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Room-temperature silicon platform for GHz-frequency nano-electro-opto-mechanical systems
Authors:
D. Navarro-Urrios,
M. F. Colombano,
G. Arregui,
G. Madiot,
A. Pitanti,
A. Griol,
T. Makkonen,
J. Ahopelto,
C. M. Sotomayor-Torres,
A. Martínez
Abstract:
Nano-electro-opto-mechanical systems enable the synergistic coexistence of electrical, mechanical, and optical signals on a chip to realize new functions. Most of the technology platforms proposed for the fabrication of these systems so far are not fully compatible with the mainstream CMOS technology, thus hindering mass-scale utilization. We have developed a CMOS technology platform for nano-elec…
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Nano-electro-opto-mechanical systems enable the synergistic coexistence of electrical, mechanical, and optical signals on a chip to realize new functions. Most of the technology platforms proposed for the fabrication of these systems so far are not fully compatible with the mainstream CMOS technology, thus hindering mass-scale utilization. We have developed a CMOS technology platform for nano-electro-opto-mechanical systems that includes piezoelectric interdigitated transducers for electronic driving of mechanical signals and nanocrystalline silicon nanobeams for enhanced optomechanical interaction. Room temperature operation of devices at 2 GHz and with peak sensitivity down to 2.6 cavity phonons is demonstrated. Our proof-of-principle technology platform can be integrated and interfaced with silicon photonics, electronics, and MEMS devices and may enable multiple functions for coherent signal processing in the classical and quantum domains.
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Submitted 18 October, 2021;
originally announced October 2021.
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Thermal properties of nanocrystalline silicon nanobeams
Authors:
Jeremie Maire,
Emigdio Chavez-Angel,
Guillermo Arregui,
Martin F. Colombano,
Nestor E. Capuj,
Amadeu Griol,
Alejandro Martinez,
Daniel Navarro-Urrios,
Jouni Ahopelto,
Clivia M. Sotomayor-Torres
Abstract:
Controlling thermal energy transfer at the nanoscale has become critically important in many applications and thermal properties since it often limits device performance. In this work, we study the effects on thermal conductivity arising from the nanoscale structure of free-standing nanocrystalline silicon films and the increasing surface-to-volume ratio when fabricated into suspended optomechanic…
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Controlling thermal energy transfer at the nanoscale has become critically important in many applications and thermal properties since it often limits device performance. In this work, we study the effects on thermal conductivity arising from the nanoscale structure of free-standing nanocrystalline silicon films and the increasing surface-to-volume ratio when fabricated into suspended optomechanical nanobeams. We characterize thermal transport in structures with different grain sizes and elucidate the relative impact of grain size and geometrical dimensions on thermal conductivity. We use a micro-time-domain thermoreflectance method to study the impact of the grain size distribution, from 10 to 400 nm, on the thermal conductivity in free-standing nanocrystalline silicon films considering surface phonon and grain boundary scattering. We find a drastic reduction in the thermal conductivity, down to values of 10 W.m^{-1}.K^{-1} and below, which is just a fraction of the conductivity of single crystalline silicon. Decreasing the grain size further decreases the thermal conductivity. We also observe that this effect is smaller in OM nanostructures than in membranes due to the competition of surface scattering in decreasing thermal conductivity. Finally, we introduce a novel versatile contactless characterization technique that can be adapted to any structure supporting a thermally shifted optical resonance and use it to evaluate the thermal conductivity. This method can be used with optical resonances exhibiting different mode profiles and the data is shown to agrees quantitatively with the thermoreflectance measurements. This work opens the way to a more generalized thermal characterization of optomechanical cavities and to create hot-spots with engineered shapes at desired position in the structures as a means to study thermal transport in coupled photon-phonon structures.
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Submitted 6 June, 2021;
originally announced June 2021.
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Optomechanical crystals for spatial sensing of submicron sized analytes
Authors:
D. Navarro-Urrios,
E. Kang,
P. Xiao,
M. F. Colombano,
G. Arregui,
B. Graczykowski,
N. E. Capuj,
M. Sledzinska,
C. M. Sotomayor-Torres,
G. Fytas
Abstract:
Optomechanical crystal cavities have rich perspectives for detecting and indirectly analysing biological particles, such as proteins, bacteria and viruses. In this work we demonstrate the working principle of an optomechanical crystal cavity operating under ambient conditions as a sensor of submicrometer analytes by optically monitoring the frequency shift of thermally activated mechanical modes.…
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Optomechanical crystal cavities have rich perspectives for detecting and indirectly analysing biological particles, such as proteins, bacteria and viruses. In this work we demonstrate the working principle of an optomechanical crystal cavity operating under ambient conditions as a sensor of submicrometer analytes by optically monitoring the frequency shift of thermally activated mechanical modes. The resonator has been specifically designed so that the cavity region supports a particular family of low modal-volume mechanical modes, commonly known as -pinch modes-. These involve the oscillation of only a couple of adjacent cavity cells that are relatively insensitive to perturbations in other parts of the resonator. The eigenfrequency of these modes decreases as the deformation is localized closer to the centre of the resonator. Thus, by identifying specific modes that undergo a frequency shift that amply exceeds the mechanical linewidth, it is possible to infer if there are particles deposited on the resonator, how many are there and their approximate position within the cavity region.
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Submitted 6 November, 2020;
originally announced November 2020.
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Injection locking in an optomechanical coherent phonon source
Authors:
Guillermo Arregui,
Martin Facundo Colombano,
Jérémie Maire,
Alessandro Pitanti,
Nestor Eduardo Capuj,
Amadeu Griol,
Alejandro Martínez,
Clivia Marfa Sotomayor Torres,
Daniel Navarro Urrios
Abstract:
Spontaneous locking of the phase of a coherent phonon source to an external reference is demonstrated in an optomechanical oscillator based on a self-triggered free-carrier/temperature limit cycle. Synchronization is observed when the pump laser driving the mechanical oscillator to a self-sustained state is modulated by a radiofrequency tone. We employ a pump-probe phonon detection scheme based on…
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Spontaneous locking of the phase of a coherent phonon source to an external reference is demonstrated in an optomechanical oscillator based on a self-triggered free-carrier/temperature limit cycle. Synchronization is observed when the pump laser driving the mechanical oscillator to a self-sustained state is modulated by a radiofrequency tone. We employ a pump-probe phonon detection scheme based on an independent optical cavity to observe only the mechanical oscillator dynamics. The lock range of the oscillation frequency, i.e., the Arnold tongue, is experimentally determined over a range of external reference strengths, evidencing the possibility to tune the oscillator frequency for a range up to 350 kHz. The stability of the coherent phonon source is evaluated via its phase noise, with a maximum achieved suppression of 44 dBc/Hz at 1kHz offset for a 100 MHz mechanical resonator. Introducing a weak modulation in the excitation laser reveals as a further knob to trigger, control and stabilise the dynamical solutions of self-pulsing based optomechanical oscillators, thus enhancing their potential as acoustic wave sources in a single layer silicon platform.
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Submitted 24 September, 2020; v1 submitted 18 September, 2020;
originally announced September 2020.
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High frequency mechanical excitation of a silicon nanostring with piezoelectric aluminum nitride layers
Authors:
A. Pitanti,
T. Makkonen,
M. F. Colombano,
S. Zanotto,
L. Vicarelli,
M. Cecchini,
A. Griol,
D. Navarro-Urrios,
C. Sotomayor-Torres,
A. Martinez,
J. Ahopelto
Abstract:
A strong trend for quantum based technologies and applications follows the avenue of combining different platforms to exploit their complementary technological and functional advantages. Micro and nano-mechanical devices are particularly suitable for hybrid integration due to the easiness of fabrication at multi-scales and their pervasive coupling with electrons and photons. Here, we report on a n…
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A strong trend for quantum based technologies and applications follows the avenue of combining different platforms to exploit their complementary technological and functional advantages. Micro and nano-mechanical devices are particularly suitable for hybrid integration due to the easiness of fabrication at multi-scales and their pervasive coupling with electrons and photons. Here, we report on a nanomechanical technological platform where a silicon chip is combined with an aluminum nitride layer. Exploiting the AlN piezoelectricity, Surface Acoustic Waves are injected in the Si layer where the material has been localy patterned and etched to form a suspended nanostring. Characterizing the nanostring vertical displacement induced by the SAW, we found an external excitation peak efficiency in excess of 500 pm/V at 1 GHz mechanical frequency. Exploiting the long term expertise in silicon photonic and electronic devices as well as the SAW robustness and versatility, our technological platform represents a strong candidate for hybrid quantum systems.
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Submitted 22 May, 2020; v1 submitted 26 March, 2020;
originally announced March 2020.
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Ferromagnetic resonance assisted optomechanical magnetometer
Authors:
M. F. Colombano,
G. Arregui,
F. Bonell,
N. E. Capuj,
E. Chavez-Angel,
A. Pitanti,
S. O. Valenzuela,
C. M. Sotomayor-Torres,
D. Navarro-Urrios,
M. V. Costache
Abstract:
The resonant enhancement of mechanical and optical interaction in optomechanical cavities enables their use as extremely sensitive displacement and force detectors. In this work we demonstrate a hybrid magnetometer that exploits the coupling between the resonant excitation of spin waves in a ferromagnetic insulator and the resonant excitation of the breathing mechanical modes of a glass microspher…
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The resonant enhancement of mechanical and optical interaction in optomechanical cavities enables their use as extremely sensitive displacement and force detectors. In this work we demonstrate a hybrid magnetometer that exploits the coupling between the resonant excitation of spin waves in a ferromagnetic insulator and the resonant excitation of the breathing mechanical modes of a glass microsphere deposited on top. The interaction is mediated by magnetostriction in the ferromagnetic material and the consequent mechanical driving of the microsphere. The magnetometer response thus relies on the spectral overlap between the ferromagnetic resonance and the mechanical modes of the sphere, leading to a peak sensitivity better than 900 pT Hz$^{-1/2}$ at 206 MHz when the overlap is maximized. By externally tuning the ferromagnetic resonance frequency with a static magnetic field we demonstrate sensitivity values at resonance around a few nT Hz$^{-1/2}$ up to the GHz range. Our results show that our hybrid system can be used to build high-speed sensor of oscillating magnetic fields.
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Submitted 3 September, 2020; v1 submitted 9 September, 2019;
originally announced September 2019.
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Properties of Nanocrystalline Silicon Probed by Optomechanics
Authors:
Daniel Navarro-Urrios,
Martin F. Colombano,
Jeremie Maire,
Emigdio Chavez-Angel,
Guillermo Arregui,
Nestor E. Capuj,
Arnaud Devos,
Amadeu Griol,
Laurent Bellieres,
Alejandro Martinez,
Kestutis Grigoras,
Teija Hakkinen,
Jaakko Saarilahti,
Tapani Makkonen,
Clivia M. Sotomayor-Torres,
Jouni Ahopelto
Abstract:
Nanocrystalline materials exhibit properties that can differ substantially from those of their single crystal counterparts. As such, they provide ways to enhance and optimise their functionality for devices and applications. Here we report on the optical, mechanical and thermal properties of nanocrystalline silicon probed by means of optomechanical nanobeams to extract information of the dynamics…
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Nanocrystalline materials exhibit properties that can differ substantially from those of their single crystal counterparts. As such, they provide ways to enhance and optimise their functionality for devices and applications. Here we report on the optical, mechanical and thermal properties of nanocrystalline silicon probed by means of optomechanical nanobeams to extract information of the dynamics of optical absorption, mechanical losses, heat generation and dissipation. The optomechanical nanobeams are fabricated using nanocrystalline films prepared by annealing amorphous silicon layers at different temperatures. The resulting crystallite sizes and the stress in the films can be controlled by the annealing temperature and time and, consequently, the properties of the films can be tuned relatively freely, as demonstrated here by means of electron microscopy and Raman scattering. We show that the nanocrystallite size and the volume fraction of the grain boundaries play a key role in the dissipation rates through non-linear optical and thermal processes. Promising optical (13000) and mechanical (1700) quality factors were found in the optomechanical cavity realised in the nanocrystalline Si resulting from annealing at 950 C. The enhanced absorption and recombination rates via the intra-gap states and the reduced thermal conductivity boost the potential to exploit these non-linear effects in applications, including NEMS, phonon lasing and chaos-based devices.
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Submitted 2 September, 2020; v1 submitted 9 July, 2019;
originally announced July 2019.
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Synchronization of optomechanical cavities by mechanical interaction
Authors:
M. F. Colombano,
G. Arregui,
N. E. Capuj,
A. Pitanti,
J. Maire,
A. Griol,
B. Garrido,
A. Martinez,
C. M. Sotomayor-Torres,
D. Navarro-Urrios
Abstract:
The synchronization of coupled oscillators is a phenomenon found throughout nature. Mechanical oscillators are paradigmatic among such systems, but realising them at the nanoscale is challenging. We report synchronization of the mechanical dynamics of a pair of optomechanical crystal cavities that are intercoupled with a mechanical link and support independent optical modes. In this regime they os…
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The synchronization of coupled oscillators is a phenomenon found throughout nature. Mechanical oscillators are paradigmatic among such systems, but realising them at the nanoscale is challenging. We report synchronization of the mechanical dynamics of a pair of optomechanical crystal cavities that are intercoupled with a mechanical link and support independent optical modes. In this regime they oscillate in anti-phase, which is in agreement with the predictions of our numerical model that considers reactive coupling. Finally, we show how to temporarily disable synchronization of the coupled system by actuating one of the cavities with a heating laser, so that both cavities oscillate independently. Our results can be upscaled to more than two cavities and are thus the first step towards realizing integrated networks of synchronized optomechanical oscillators. Such networks promise unparalleled performances for time-kee** and sensing purposes and unveil a new route for neuromorphic computing applications.
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Submitted 14 October, 2018;
originally announced October 2018.
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Optical modulation of coherent phonon emission in optomechanical cavities
Authors:
J. Maire,
N. E. Capuj,
M. F. Colombano,
A. Griol,
A. Martinez,
C. M. Sotomayor-Torres,
D. Navarro-Urrios
Abstract:
Optomechanical structures are well suited to study photon-phonon interactions, and they also turn out to be potential building blocks for phononic circuits and quantum computing. In phononic circuits, in which information is carried and processed by phonons, optomechanical structures could be used as interfaces to photons and electrons thanks to their excellent coupling efficiency. Among the compo…
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Optomechanical structures are well suited to study photon-phonon interactions, and they also turn out to be potential building blocks for phononic circuits and quantum computing. In phononic circuits, in which information is carried and processed by phonons, optomechanical structures could be used as interfaces to photons and electrons thanks to their excellent coupling efficiency. Among the components required for phononic circuits, such structures could be used to create coherent phonon sources and detectors. Complex functions other than emission or detection remain challenging and addressing a single structure in a full network proves a formidable challenge. Here, we propose and demonstrate a way to modulate the coherent emission from optomechanical crystals by external optical pum**, effectively creating a phonon switch working at ambient conditions of pressure and temperature and the working speed of which (5 MHz) is only limited by the mechanical motion of the optomechanical structure. We additionally demonstrate two other switching schemes: harmonic switching in which the mechanical mode remains active but different harmonics of the optical force are used, and switching to- and from the chaotic regime. Furthermore, the method presented here allows to select any single structure without affecting its surroundings, which is an important step towards freely controllable networks of optomechanical phonon emitters.
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Submitted 4 February, 2018;
originally announced February 2018.
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Nonlinear dynamics and chaos in an optomechanical beam
Authors:
D. Navarro-Urrios,
N. E. Capuj,
M. F. Colombano,
P. D. Garcia,
M. Sledzinska,
F. Alzina,
A. Griol,
A. Martinez,
C. M. Sotomayor-Torres
Abstract:
Optical non-linearities, such as thermo-optic effects and free-carrier-dispersion, are often considered as undesired effects in silicon-based resonators and, more specifically, optomechanical (OM) cavities, affecting the relative detuning between an optical resonance and the excitation laser. However, the interplay between such mechanisms could also enable unexpected physical phenomena to be used…
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Optical non-linearities, such as thermo-optic effects and free-carrier-dispersion, are often considered as undesired effects in silicon-based resonators and, more specifically, optomechanical (OM) cavities, affecting the relative detuning between an optical resonance and the excitation laser. However, the interplay between such mechanisms could also enable unexpected physical phenomena to be used in new applications. In the present work, we exploit those non-linearities and their intercoupling with the mechanical degrees of freedom of a silicon OM nanobeam to unveil a rich set of fundamentally different complex dynamics. By smoothly changing the parameters of the excitation laser, namely its power and wavelength, we demonstrate accurate control for activating bi-dimensional and tetra-dimensional limit-cycles, a period doubling route and chaos. In addition, by scanning the laser parameters in opposite senses we demonstrate bistability and hysteresis between bi-dimensional and tetra-dimensional limit-cycles, between different coherent mechanical states and between tetra-dimensional limit-cycles and chaos. As a result of implementing the Rosenstein algorithm to the experimental time series we have extracted a Largest Lyapunov Exponent of LLE=1.3x10^5 s-1, which is between one and two orders of magnitude lower than the typical oscillating frequencies of the system. Most of the experimental features can be well reproduced with a model of first-order non-linear differential equations coupled through the number of intracavity photons. Our findings open several routes towards exploiting silicon-based OM photonic crystals for systems with memory and, more specifically, for chaos based applications such as secure information transfer or sensing.
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Submitted 15 September, 2016; v1 submitted 14 September, 2016;
originally announced September 2016.