Phase composition and transformations in magnetron-sputtered (Al,V)2O3 coatings
Authors:
L. Landälv,
C-F. Carlström,
J. Lu,
Daniel Primetzhofer,
M. J. Jõesaar,
M. Ahlgren,
E. Göthelid,
B. Alling,
L. Hultman,
P. Eklund
Abstract:
Coatings of (Al1-xVx)2O3, with x ranging from 0 to 1, were deposited by pulsed DC reactive sputter deposition on Si(100) at a temperature of 550 °C. XRD showed three different crystal structures depending on V-metal fraction in the coating: α-V2O3 rhombohedral structure for 100 at.% V, a defect spinel structure for the intermediate region, 63 - 42 at.% V. At lower V-content, 18 and 7 at.%, a gamma…
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Coatings of (Al1-xVx)2O3, with x ranging from 0 to 1, were deposited by pulsed DC reactive sputter deposition on Si(100) at a temperature of 550 °C. XRD showed three different crystal structures depending on V-metal fraction in the coating: α-V2O3 rhombohedral structure for 100 at.% V, a defect spinel structure for the intermediate region, 63 - 42 at.% V. At lower V-content, 18 and 7 at.%, a gamma-alumina-like solid solution was observed, shifted to larger d-spacing compared to pure γ-Al2O3. The microstructure changes from large columnar faceted grains for α-V2O3 to smaller equiaxed grains when lowering the vanadium content toward pure γ-Al2O3. Annealing in air resulted in formation of V2O5 crystals on the surface of the coating after annealing to 500 °C for 42 at.% V and 700 °C for 18 at.% V metal fraction respectively. The highest thermal stability was shown for pure γ-Al2O3-coating, which transformed to α-Al2O3 after annealing to 1100° C. Highest hardness was observed for the Al-rich oxides, ~24 GPa. The latter decreased with increasing V-content, larger than 7 at.% V metal fraction. The measured hardness after annealing in air decreased in conjunction with the onset of further oxidation of the coatings.
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Submitted 20 August, 2019; v1 submitted 16 May, 2019;
originally announced May 2019.
InP-based two-dimensional photonic crystals filled with polymers
Authors:
R. van der Heijden,
C. F. Carlstrom,
J. A. P. Snijders,
R. W. van der Heijden,
F. Karouta,
R. Notzel,
H. W. M. Salemink,
B. K. C. Kjellander,
C. W. M. Bastiaansen,
D. J. Broer,
E. van der Drift
Abstract:
Polymer filling of the air holes of Indium Phosphide based two-dimensional photonic crystals is reported. After infiltration of the holes with a liquid monomer and solidification of the infill in situ by thermal polymerization, complete filling is proven using scanning electron microscopy. Optical transmission measurements of a filled photonic crystal structure exhibit a redshift of the air band…
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Polymer filling of the air holes of Indium Phosphide based two-dimensional photonic crystals is reported. After infiltration of the holes with a liquid monomer and solidification of the infill in situ by thermal polymerization, complete filling is proven using scanning electron microscopy. Optical transmission measurements of a filled photonic crystal structure exhibit a redshift of the air band, confirming the complete filling.
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Submitted 16 March, 2006;
originally announced March 2006.
