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Discovering deposition process regimes: leveraging unsupervised learning for process insights, surrogate modeling, and sensitivity analysis
Authors:
Geremy Loachamín Suntaxi,
Paris Papavasileiou,
Eleni D. Koronaki,
Dimitrios G. Giovanis,
Georgios Gakis,
Ioannis G. Aviziotis,
Martin Kathrein,
Gabriele Pozzetti,
Christoph Czettl,
Stéphane P. A. Bordas,
Andreas G. Boudouvis
Abstract:
This work introduces a comprehensive approach utilizing data-driven methods to elucidate the deposition process regimes in Chemical Vapor Deposition (CVD) reactors and the interplay of physical mechanism that dominate in each one of them. Through this work, we address three key objectives. Firstly, our methodology relies on process outcomes, derived by a detailed CFD model, to identify clusters of…
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This work introduces a comprehensive approach utilizing data-driven methods to elucidate the deposition process regimes in Chemical Vapor Deposition (CVD) reactors and the interplay of physical mechanism that dominate in each one of them. Through this work, we address three key objectives. Firstly, our methodology relies on process outcomes, derived by a detailed CFD model, to identify clusters of "outcomes" corresponding to distinct process regimes, wherein the relative influence of input variables undergoes notable shifts. This phenomenon is experimentally validated through Arrhenius plot analysis, affirming the efficacy of our approach. Secondly, we demonstrate the development of an efficient surrogate model, based on Polynomial Chaos Expansion (PCE), that maintains accuracy, facilitating streamlined computational analyses. Finally, as a result of PCE, sensitivity analysis is made possible by means of Sobol' indices, that quantify the impact of process inputs across identified regimes. The insights gained from our analysis contribute to the formulation of hypotheses regarding phenomena occurring beyond the transition regime. Notably, the significance of temperature even in the diffusion-limited regime, as evidenced by the Arrhenius plot, suggests activation of gas phase reactions at elevated temperatures. Importantly, our proposed methods yield insights that align with experimental observations and theoretical principles, aiding decision-making in process design and optimization. By circumventing the need for costly and time-consuming experiments, our approach offers a pragmatic pathway towards enhanced process efficiency. Moreover, this study underscores the potential of data-driven computational methods for innovating reactor design paradigms.
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Submitted 24 May, 2024;
originally announced May 2024.
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Integrating supervised and unsupervised learning approaches to unveil critical process inputs
Authors:
Paris Papavasileiou,
Dimitrios G. Giovanis,
Gabriele Pozzetti,
Martin Kathrein,
Christoph Czettl,
Ioannis G. Kevrekidis,
Andreas G. Boudouvis,
Stéphane P. A. Bordas,
Eleni D. Koronaki
Abstract:
This study introduces a machine learning framework tailored to large-scale industrial processes characterized by a plethora of numerical and categorical inputs. The framework aims to (i) discern critical parameters influencing the output and (ii) generate accurate out-of-sample qualitative and quantitative predictions of production outcomes. Specifically, we address the pivotal question of the sig…
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This study introduces a machine learning framework tailored to large-scale industrial processes characterized by a plethora of numerical and categorical inputs. The framework aims to (i) discern critical parameters influencing the output and (ii) generate accurate out-of-sample qualitative and quantitative predictions of production outcomes. Specifically, we address the pivotal question of the significance of each input in sha** the process outcome, using an industrial Chemical Vapor Deposition (CVD) process as an example. The initial objective involves merging subject matter expertise and clustering techniques exclusively on the process output, here, coating thickness measurements at various positions in the reactor. This approach identifies groups of production runs that share similar qualitative characteristics, such as film mean thickness and standard deviation. In particular, the differences of the outcomes represented by the different clusters can be attributed to differences in specific inputs, indicating that these inputs are critical for the production outcome. Leveraging this insight, we subsequently implement supervised classification and regression methods using the identified critical process inputs. The proposed methodology proves to be valuable in scenarios with a multitude of inputs and insufficient data for the direct application of deep learning techniques, providing meaningful insights into the underlying processes.
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Submitted 13 May, 2024;
originally announced May 2024.
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From partial data to out-of-sample parameter and observation estimation with Diffusion Maps and Geometric Harmonics
Authors:
Eleni D. Koronaki,
Nikolaos Evangelou,
Yorgos M. Psarellis,
Andreas G. Boudouvis,
Ioannis G. Kevrekidis
Abstract:
A data-driven framework is presented, that enables the prediction of quantities, either observations or parameters, given sufficient partial data. The framework is illustrated via a computational model of the deposition of Cu in a Chemical Vapor Deposition (CVD) reactor, where the reactor pressure, the deposition temperature and feed mass flow rate are important process parameters that determine t…
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A data-driven framework is presented, that enables the prediction of quantities, either observations or parameters, given sufficient partial data. The framework is illustrated via a computational model of the deposition of Cu in a Chemical Vapor Deposition (CVD) reactor, where the reactor pressure, the deposition temperature and feed mass flow rate are important process parameters that determine the outcome of the process. The sampled observations are high-dimensional vectors containing the outputs of a detailed CFD steady-state model of the process, i.e. the values of velocity, pressure, temperature, and species mass fractions at each point in the discretization. A machine learning workflow is presented, able to predict out-of-sample (a) observations (e.g. mass fraction in the reactor) given process parameters (e.g. inlet temperature); (b) process parameters given observation data; and (c) partial observations (e.g. temperature in the reactor) given other partial observations (e.g. mass fraction in the reactor). The proposed workflow relies on the manifold learning schemes Diffusion Maps and the associated Geometric Harmonics. Diffusion Maps is used for discovering a reduced representation of the available data, and Geometric Harmonics for extending functions defined on the manifold. In our work a special use case of Geometric Harmonics is formulated and implemented, which we call Double Diffusion Maps, to map from the reduced representation back to (partial) observations and process parameters. A comparison of our manifold learning scheme to the traditional Gappy-POD approach is provided: ours can be thought of as a "Gappy DMAP" approach. The presented methodology is easily transferable to application domains beyond reactor engineering.
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Submitted 27 January, 2023;
originally announced January 2023.
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On the performance of various parallel GMRES implementations on CPU and GPU clusters
Authors:
E. I. Ioannidis,
N. Cheimarios,
A. N. Spyropoulos,
A. G. Boudouvis
Abstract:
As the need for computational power and efficiency rises, parallel systems become increasingly popular among various scientific fields. While multiple core-based architectures have been the center of attention for many years, the rapid development of general purposes GPU-based architectures takes high performance computing to the next level. In this work, different implementations of a parallel ve…
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As the need for computational power and efficiency rises, parallel systems become increasingly popular among various scientific fields. While multiple core-based architectures have been the center of attention for many years, the rapid development of general purposes GPU-based architectures takes high performance computing to the next level. In this work, different implementations of a parallel version of the preconditioned GMRES - an established iterative solver for large and sparse linear equation sets - are presented, each of them on different computing architectures: From distributed and shared memory core-based to GPU-based architectures. The computational experiments emanate from the dicretization of a benchmark boundary value problem with the finite element method. Major advantages and drawbacks of the various implementations are addressed in terms of parallel speedup, execution time and memory issues. Among others, comparison of the results in the different architectures, show the high potentials of GPU-based architectures.
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Submitted 10 June, 2019;
originally announced June 2019.
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Optimization of Patterned Surfaces for Improved Superhydrophobicity Through Cost-Effective Large-Scale Computations
Authors:
V. Krokos,
G. Pashos,
A. N. Spyropoulos,
G. Kokkoris,
A. G. Papathanasiou,
A. G. Boudouvis
Abstract:
The growing need for creating surfaces with specific wetting properties, such as superhyrdophobic behavior, asks for novel methods for their efficient design. In this work, a fast computational method for the evaluation of patterned superhyrdophobic surfaces is introduced. The hydrophobicity of a surface is quantified in energy terms through an objective function. The increased computational cost…
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The growing need for creating surfaces with specific wetting properties, such as superhyrdophobic behavior, asks for novel methods for their efficient design. In this work, a fast computational method for the evaluation of patterned superhyrdophobic surfaces is introduced. The hydrophobicity of a surface is quantified in energy terms through an objective function. The increased computational cost led to the parallelization of the method with the Message Passing Interface (MPI) communication protocol that enables calculations on distributed memory systems allowing for parametric investigations at acceptable time frames. The method is demonstrated for a surface consisting of an array of pillars with inverted conical (frustum) geometry. The parallel speedup achieved allows for low cost parametric investigations on the effect of the fine features (curvature and slopes) of the pillars on the superhydophobicity of the surface and consequently for the optimization of superhyrdophobic surfaces.
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Submitted 24 January, 2019;
originally announced January 2019.
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Effect of cell heterogeneity on isogenic populations with the synthetic genetic toggle switch network: bifurcation analysis of two-dimensional Cell Population Balance Models
Authors:
Panagiotis Chrysinas,
Michail E. Kavousanakis,
Andreas G. Boudouvis
Abstract:
The dynamics of gene regulatory networks are often modeled with the assumption of cellular homogeneity. However, this assumption contradicts the plethora of experimental results in a variety of systems, which designates that cell populations are heterogeneous systems in the sense that properties such as size, shape, and DNA/RNA content are unevenly distributed amongst their individuals. In order t…
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The dynamics of gene regulatory networks are often modeled with the assumption of cellular homogeneity. However, this assumption contradicts the plethora of experimental results in a variety of systems, which designates that cell populations are heterogeneous systems in the sense that properties such as size, shape, and DNA/RNA content are unevenly distributed amongst their individuals. In order to address the implications of heterogeneity, we utilize the so-called cell population balance (CPB) models. Here, we solve numerically multivariable CPB models to study the effect of heterogeneity on populations carrying the toggle switch network, which features nonlinear behavior at the single-cell level. In order to answer whether this nonlinear behavior is inherited to the heterogeneous population level, we perform bifurcation analysis on the steady-state solutions of the CPB model. We show that bistability is present at the population level with the pertinent bistability region shrinking when the impact of heterogeneity is enhanced.
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Submitted 22 August, 2017;
originally announced August 2017.
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Droplet spreading on rough surfaces: tackling the contact line boundary condition
Authors:
Nikolaos T. Chamakos,
Michail E. Kavousanakis,
Andreas G. Boudouvis,
Athanasios G. Papathanasiou
Abstract:
The complicated dynamics of the contact line of a moving droplet on a solid substrate often hamper the efficient modeling of microfluidic systems. In particular, the selection of the effective boundary conditions, specifying the contact line motion, is a controversial issue since the microscopic physics that gives rise to this displacement is still unknown. Here, a sharp interface, continuum-level…
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The complicated dynamics of the contact line of a moving droplet on a solid substrate often hamper the efficient modeling of microfluidic systems. In particular, the selection of the effective boundary conditions, specifying the contact line motion, is a controversial issue since the microscopic physics that gives rise to this displacement is still unknown. Here, a sharp interface, continuum-level, novel modeling approach, accounting for liquid/solid micro-scale interactions assembled in a disjoining pressure term, is presented. By following a unified conception (the model applies both to the liquid/solid and the liquid/ambient interfaces), the friction forces at the contact line, as well as the dynamic contact angle are derived implicitly as a result of the disjoining pressure and viscous effects interplay in the vicinity of the substrate's intrinsic roughness. Previous hydrodynamic model limitations, of imposing the contact line boundary condition to an unknown number and reconfigurable contact lines, when modeling the spreading dynamics on textured substrates, are now overcome. The validity of our approach is tested against experimental data of a droplet impacting on a horizontal solid surface. The study of the early spreading stage on hierarchically structured and chemically patterned solid substrates reveal an inertial regime where the contact radius grows according to a universal power law, perfectly agreeing with recently published experimental findings.
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Submitted 25 January, 2016;
originally announced January 2016.
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Evaluating the robustness of top coatings comprising plasma-deposited fluorocarbons in electrowetting systems
Authors:
Dimitrios P. Papageorgiou,
Elias P. Koumoulos,
Costas A. Charitidis,
Andreas G. Boudouvis,
Athanasios G. Papathanasiou
Abstract:
Thin dielectric stacks comprising a main insulating layer and a hydrophobic top coating are commonly used in low voltage electrowetting systems. However, in most cases, thin dielectrics fail to endure persistent electrowetting testing at high voltages, namely beyond the saturation onset, as electrolysis indicates dielectric failure. Careful sample inspection via optical microscopy revealed possibl…
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Thin dielectric stacks comprising a main insulating layer and a hydrophobic top coating are commonly used in low voltage electrowetting systems. However, in most cases, thin dielectrics fail to endure persistent electrowetting testing at high voltages, namely beyond the saturation onset, as electrolysis indicates dielectric failure. Careful sample inspection via optical microscopy revealed possible local delamination of the top coating under high electric fields. Thus, improvement of the adhesion strength of the hydrophobic top coating to the main dielectric is attempted through a plasma-deposited fluorocarbon interlayer. Interestingly enough the proposed dielectric stack exhibited a) resistance to dielectric breakdown, b) higher contact angle modulation range, and c) electrowetting cycle reversibility. Appearance of electrolysis in the saturation regime is inhibited, suggesting the use of this hydrophobic dielectric stack for the design of more efficient electrowetting systems. The possible causes of the improved performance are investigated by nanoscratch characterization.
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Submitted 19 October, 2011;
originally announced October 2011.
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Superior performance of multilayered fluoropolymer films in low voltage electrowetting
Authors:
Dimitrios P. Papageorgiou,
Angeliki Tserepi,
Andreas G. Boudouvis,
Athanasios G. Papathanasiou
Abstract:
The requirement for low operational voltage in electrowetting devices, met using thin dielectrics, is usually connected with serious material failure issues. Dielectric breakdown (visible as electrolysis) is frequently evident slightly beyond the onset of the contact angle saturation. Here, plasma enhanced chemical vapor deposition (PECVD) is used to deposit thin fluorocarbon films prior to the sp…
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The requirement for low operational voltage in electrowetting devices, met using thin dielectrics, is usually connected with serious material failure issues. Dielectric breakdown (visible as electrolysis) is frequently evident slightly beyond the onset of the contact angle saturation. Here, plasma enhanced chemical vapor deposition (PECVD) is used to deposit thin fluorocarbon films prior to the spin-coating of Teflon\textregistered amorphous fluoropolymer on tetraethoxysilane (TEOS) substrates. The resulting multilayered hydrophobic top coating improves the electrowetting performance of the stack, by showing high resistance to dielectric breakdown at high applied voltages and for continuous long term application of DC and AC voltage. Leakage current measurements during electrowetting experiments with the proposed composite coating showed that current remains fairly constant at consecutive electrowetting tests in contrast to plain Teflon\textregistered coating in which material degradation is evident by a progressive increase of the leakage current after multiple electrowetting tests. Since the proposed composite coating demonstrates increased resistance to material failure and to dielectric breakdown even at thin configurations, its integration in electrowetting devices may impact their reliability, robustness and lifetime.
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Submitted 18 October, 2011;
originally announced October 2011.
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A Hybrid Boundary Element Method for Elliptic Problems with Singularities
Authors:
George Pashos,
Athanasios G. Papathanasiou,
Andreas G. Boudouvis
Abstract:
The singularities that arise in elliptic boundary value problems are treated locally by a singular function boundary integral method. This method extracts the leading singular coefficients from a series expansion that describes the local behavior of the singularity. The method is fitted into the framework of the widely used boundary element method (BEM), forming a hybrid technique, with the BEM co…
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The singularities that arise in elliptic boundary value problems are treated locally by a singular function boundary integral method. This method extracts the leading singular coefficients from a series expansion that describes the local behavior of the singularity. The method is fitted into the framework of the widely used boundary element method (BEM), forming a hybrid technique, with the BEM computing the solution away from the singularity. Results of the hybrid technique are reported for the Motz problem and compared with the results of the standalone BEM and Galerkin/finite element method (GFEM). The comparison is made in terms of the total flux (i.e. the capacitance in the case of electrostatic problems) on the Dirichlet boundary adjacent to the singularity, which is essentially the integral of the normal derivative of the solution. The hybrid method manages to reduce the error in the computed capacitance by a factor of 10, with respect to the BEM and GFEM.
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Submitted 18 June, 2010;
originally announced June 2010.
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The normal field instability under side-wall effects: comparison of experiments and computations
Authors:
C Gollwitzer,
A N Spyropoulos,
A G Papathanasiou,
A G Boudouvis,
R Richter
Abstract:
We consider a single spike of ferrofluid, arising in a small cylindrical container, when a vertically oriented magnetic field is applied. The height of the spike as well as the surface topography is measured experimentally by two different technologies and calculated numerically using the finite element method. As a consequence of the finite size of the container, the numerics uncovers an imperf…
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We consider a single spike of ferrofluid, arising in a small cylindrical container, when a vertically oriented magnetic field is applied. The height of the spike as well as the surface topography is measured experimentally by two different technologies and calculated numerically using the finite element method. As a consequence of the finite size of the container, the numerics uncovers an imperfect bifurcation to a single spike solution, which is forward. This is in contrast to the standard transcritical bifurcation to hexagons, common for rotational symmetric systems with broken up-down symmetry. The numerical findings are corroborated in the experiments. The small hysteresis observed is explained in terms of a hysteretic wetting of the side wall.
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Submitted 24 April, 2009;
originally announced April 2009.
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A timestepper approach for the systematic bifurcation and stability analysis of polymer extrusion dynamics
Authors:
M. E. Kavousanakis,
L. Russo,
C. I. Siettos,
A. G. Boudouvis,
G. C. Georgiou
Abstract:
We discuss how matrix-free/timestepper algorithms can efficiently be used with dynamic non-Newtonian fluid mechanics simulators in performing systematic stability/bifurcation analysis. The timestepper approach to bifurcation analysis of large scale systems is applied to the plane Poiseuille flow of an Oldroyd-B fluid with non-monotonic slip at the wall, in order to further investigate a mechanis…
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We discuss how matrix-free/timestepper algorithms can efficiently be used with dynamic non-Newtonian fluid mechanics simulators in performing systematic stability/bifurcation analysis. The timestepper approach to bifurcation analysis of large scale systems is applied to the plane Poiseuille flow of an Oldroyd-B fluid with non-monotonic slip at the wall, in order to further investigate a mechanism of extrusion instability based on the combination of viscoelasticity and nonmonotonic slip. Due to the nonmonotonicity of the slip equation the resulting steady-state flow curve is nonmonotonic and unstable steady-states appear in the negative-slope regime. It has been known that self-sustained oscillations of the pressure gradient are obtained when an unstable steady-state is perturbed [Fyrillas et al., Polymer Eng. Sci. 39 (1999) 2498-2504].
Treating the simulator of a distributed parameter model describing the dynamics of the above flow as an input-output black-box timestepper of the state variables, stable and unstable branches of both equilibrium and periodic oscillating solutions are computed and their stability is examined. It is shown for the first time how equilibrium solutions lose stability to oscillating ones through a subcritical Hopf bifurcation point which generates a branch of unstable limit cycles and how the stable periodic solutions lose their stability through a critical point which marks the onset of the unstable limit cycles. This implicates the coexistence of stable equilibria with stable and unstable periodic solutions in a narrow range of volumetric flow rates.
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Submitted 25 July, 2007;
originally announced July 2007.
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Projective and Coarse Projective Integration for Problems with Continuous Symmetries
Authors:
Michail E. Kavousanakis,
Radek Erban,
Andreas G. Boudouvis,
C. William Gear,
Ioannis G. Kevrekidis
Abstract:
Temporal integration of equations possessing continuous symmetries (e.g. systems with translational invariance associated with traveling solutions and scale invariance associated with self-similar solutions) in a ``co-evolving'' frame (i.e. a frame which is co-traveling, co-collapsing or co-exploding with the evolving solution) leads to improved accuracy because of the smaller time derivative in…
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Temporal integration of equations possessing continuous symmetries (e.g. systems with translational invariance associated with traveling solutions and scale invariance associated with self-similar solutions) in a ``co-evolving'' frame (i.e. a frame which is co-traveling, co-collapsing or co-exploding with the evolving solution) leads to improved accuracy because of the smaller time derivative in the new spatial frame. The slower time behavior permits the use of {\it projective} and {\it coarse projective} integration with longer projective steps in the computation of the time evolution of partial differential equations and multiscale systems, respectively. These methods are also demonstrated to be effective for systems which only approximately or asymptotically possess continuous symmetries. The ideas of projective integration in a co-evolving frame are illustrated on the one-dimensional, translationally invariant Nagumo partial differential equation (PDE). A corresponding kinetic Monte Carlo model, motivated from the Nagumo kinetics, is used to illustrate the coarse-grained method. A simple, one-dimensional diffusion problem is used to illustrate the scale invariant case. The efficiency of projective integration in the co-evolving frame for both the macroscopic diffusion PDE and for a random-walker particle based model is again demonstrated.
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Submitted 4 August, 2006;
originally announced August 2006.