-
Probing defectivity beneath the hydrocarbon blanket in 2D hBN using TEM-EELS
Authors:
Dana O. Byrne,
Jim Ciston,
Frances I. Allen
Abstract:
The controlled creation and manipulation of defects in 2D materials has become increasingly popular as a means to design and tune new material functionalities. However, defect characterization by direct atomic imaging is often severely limited by surface contamination due to a blanket of hydrocarbons. Thus, analysis techniques are needed that can characterize atomic scale defects despite the conta…
▽ More
The controlled creation and manipulation of defects in 2D materials has become increasingly popular as a means to design and tune new material functionalities. However, defect characterization by direct atomic imaging is often severely limited by surface contamination due to a blanket of hydrocarbons. Thus, analysis techniques are needed that can characterize atomic scale defects despite the contamination. In this work we use electron energy loss spectroscopy to probe beneath the hydrocarbon blanket, characterizing defect structures in 2D hexagonal boron nitride (hBN) based on fine structure in the boron K-edge. Since this technique is performed in a transmission electron microscope, imaging can also be used to assess contamination levels and other factors such as tears in the fragile 2D sheets, which can affect the spectroscopic analysis. Furthermore, by locally probing individual areas, multiple regions on the same specimen that have undergone different defect engineering treatments can be investigated for systematic studies at increased throughput. For 2D hBN samples irradiated with different ions for a range doses, we find spectral signatures indicative of boron-oxygen bonding that can be used as a measure of sample defectiveness depending on the ion beam treatment.
△ Less
Submitted 5 December, 2023;
originally announced December 2023.
-
Focused helium ion and electron beam induced deposition of organometallic tips for dynamic AFM of biomolecules in liquid
Authors:
Frances I. Allen,
José María De Teresa,
Bibiana Onoa
Abstract:
We demonstrate the fabrication of sharp nanopillars of high aspect ratio onto specialized atomic force microscopy (AFM) microcantilevers and their use for high-speed AFM of DNA and nucleoproteins in liquid. The fabrication technique uses localized charged-particle-induced deposition with either a focused beam of helium ions or electrons in a helium ion microscope (HIM) or scanning electron microsc…
▽ More
We demonstrate the fabrication of sharp nanopillars of high aspect ratio onto specialized atomic force microscopy (AFM) microcantilevers and their use for high-speed AFM of DNA and nucleoproteins in liquid. The fabrication technique uses localized charged-particle-induced deposition with either a focused beam of helium ions or electrons in a helium ion microscope (HIM) or scanning electron microscope (SEM). This approach enables customized growth onto delicate substrates with nanometer-scale placement precision and in-situ imaging of the final tip structures using the HIM or SEM. Tip radii of <10 nm are obtained and the underlying microcantilever remains intact. Instead of the more commonly used organic precursors employed for bio-AFM applications, we use an organometallic precursor (tungsten hexacarbonyl) resulting in tungsten-containing tips. Transmission electron microscopy reveals a thin layer of carbon on the tips. Consequently, the interaction of the new tips with biological specimens is likely very similar to that of standard carbonaceous tips, with the added benefit of robustness. A further advantage of the organometallic tips is that compared to carbonaceous tips they better withstand UV-ozone cleaning treatments to remove residual organic contaminants between experiments. Such contaminants are unavoidable during the scanning of soft biomolecules in liquid. Our tips can also be grown onto the blunted tips of previously-used cantilevers, thus providing a means to recycle specialized cantilevers and restore their performance to the original manufacturer specifications. Finally, a focused helium ion beam milling technique to reduce the tip radii and thus further improve lateral spatial resolution in the AFM scans is demonstrated.
△ Less
Submitted 3 November, 2023;
originally announced November 2023.
-
Iterative Phase Retrieval Algorithms for Scanning Transmission Electron Microscopy
Authors:
Georgios Varnavides,
Stephanie M. Ribet,
Steven E. Zeltmann,
Yue Yu,
Benjamin H. Savitzky,
Dana O. Byrne,
Frances I. Allen,
Vinayak P. Dravid,
Mary C. Scott,
Colin Ophus
Abstract:
Scanning transmission electron microscopy (STEM) has been extensively used for imaging complex materials down to atomic resolution. The most commonly employed STEM modality, annular dark-field imaging, produces easily-interpretable contrast, but is dose-inefficient and produces little to no discernible contrast for light elements and weakly-scattering samples. An alternative is to use STEM phase r…
▽ More
Scanning transmission electron microscopy (STEM) has been extensively used for imaging complex materials down to atomic resolution. The most commonly employed STEM modality, annular dark-field imaging, produces easily-interpretable contrast, but is dose-inefficient and produces little to no discernible contrast for light elements and weakly-scattering samples. An alternative is to use STEM phase retrieval imaging, enabled by high speed detectors able to record full images of a diffracted STEM probe over a grid of scan positions. Phase retrieval imaging in STEM is highly dose-efficient, enabling the measurement of the structure of beam-sensitive materials such as biological samples. Here, we comprehensively describe the theoretical background, algorithmic implementation details, and perform both simulated and experimental tests for three iterative phase retrieval STEM methods: focused-probe differential phase contrast, defocused-probe parallax imaging, and a generalized ptychographic gradient descent method implemented in two and three dimensions. We discuss the strengths and weaknesses of each of these approaches by comparing the transfer of information using analytical expressions and numerical results for a white-noise model. This presentation of STEM phase retrieval methods aims to make these methods more approachable, reproducible, and more readily adoptable for many classes of samples.
△ Less
Submitted 20 May, 2024; v1 submitted 11 September, 2023;
originally announced September 2023.
-
Roadmap for focused ion beam technologies
Authors:
Katja Höflich,
Gerhard Hobler,
Frances I. Allen,
Tom Wirtz,
Gemma Rius,
Lisa McElwee-White,
Arkady V. Krasheninnikov,
Matthias Schmidt,
Ivo Utke,
Nico Klingner,
Markus Osenberg,
Rosa Córdoba,
Flyura Djurabekova,
Ingo Manke,
Philip Moll,
Mariachiara Manoccio,
José Marıa De Teresa,
Lothar Bischoff,
Johann Michler,
Olivier De Castro,
Anne Delobbe,
Peter Dunne,
Oleksandr V. Dobrovolskiy,
Natalie Frese,
Armin Gölzhäuser
, et al. (7 additional authors not shown)
Abstract:
The focused ion beam (FIB) is a powerful tool for the fabrication, modification and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was originally intended for photomask repair in the semiconductor industry, there are now many different types of FIB that are commercially available. These instruments use a range of ion species and are applied broadly in mat…
▽ More
The focused ion beam (FIB) is a powerful tool for the fabrication, modification and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was originally intended for photomask repair in the semiconductor industry, there are now many different types of FIB that are commercially available. These instruments use a range of ion species and are applied broadly in materials science, physics, chemistry, biology, medicine, and even archaeology. The goal of this roadmap is to provide an overview of FIB instrumentation, theory, techniques and applications. By viewing FIB developments through the lens of the various research communities, we aim to identify future pathways for ion source and instrumentation development as well as emerging applications, and the scope for improved understanding of the complex interplay of ion-solid interactions. We intend to provide a guide for all scientists in the field that identifies common research interests and will support future fruitful interactions connecting tool development, experiment and theory. While a comprehensive overview of the field is sought, it is not possible to cover all research related to FIB technologies in detail. We give examples of specific projects within the broader context, referencing original works and previous review articles throughout.
△ Less
Submitted 6 October, 2023; v1 submitted 31 May, 2023;
originally announced May 2023.
-
Fabrication of Specimens for Atom Probe Tomography Using a Combined Gallium and Neon Focused Ion Beam Milling Approach
Authors:
Frances I. Allen,
Paul T. Blanchard,
Russell Lake,
David Pappas,
Deying Xia,
John A. Notte,
Ruopeng Zhang,
Andrew M. Minor,
Norman A. Sanford
Abstract:
We demonstrate a new focused ion beam sample preparation method for atom probe tomography. The key aspect of the new method is that we use a neon ion beam for the final tip-sha** after conventional annulus milling using gallium ions. This dual-ion approach combines the benefits of the faster milling capability of the higher current gallium ion beam with the chemically inert and higher precision…
▽ More
We demonstrate a new focused ion beam sample preparation method for atom probe tomography. The key aspect of the new method is that we use a neon ion beam for the final tip-sha** after conventional annulus milling using gallium ions. This dual-ion approach combines the benefits of the faster milling capability of the higher current gallium ion beam with the chemically inert and higher precision milling capability of the noble gas neon ion beam. Using a titanium-aluminum alloy and a layered aluminum/aluminum oxide material as test cases, we show that atom probe tips prepared using the combined gallium and neon ion approach are free from the gallium contamination that typically frustrates composition analysis of these materials due to implantation, diffusion, and embrittlement effects. We propose that by using a focused ion beam from a noble gas species, such as the neon ions demonstrated here, atom probe tomography can be more reliably performed on a larger range of materials than is currently possible using conventional techniques.
△ Less
Submitted 3 August, 2023; v1 submitted 18 February, 2023;
originally announced February 2023.
-
Defect engineering of silicon with ion pulses from laser acceleration
Authors:
Walid Redjem,
Ariel J. Amsellem,
Frances I. Allen,
Gabriele Benndorf,
Jianhui Bin,
Stepan Bulanov,
Eric Esarey,
Leonard C. Feldman,
Javier Ferrer Fernandez,
Javier Garcia Lopez,
Laura Geulig,
Cameron R. Geddes,
Hussein Hijazi,
Qing Ji,
Vsevolod Ivanov,
Boubacar Kante,
Anthony Gonsalves,
Jan Meijer,
Kei Nakamura,
Arun Persaud,
Ian Pong,
Lieselotte Obst-Huebl,
Peter A. Seidl,
Jacopo Simoni,
Carl Schroeder
, et al. (5 additional authors not shown)
Abstract:
Defect engineering is foundational to classical electronic device development and for emerging quantum devices. Here, we report on defect engineering of silicon single crystals with ion pulses from a laser accelerator with ion flux levels up to 10^22 ions/cm^2/s. Low energy ions from plasma expansion of the laser-foil target are implanted near the surface and then diffuse into silicon samples that…
▽ More
Defect engineering is foundational to classical electronic device development and for emerging quantum devices. Here, we report on defect engineering of silicon single crystals with ion pulses from a laser accelerator with ion flux levels up to 10^22 ions/cm^2/s. Low energy ions from plasma expansion of the laser-foil target are implanted near the surface and then diffuse into silicon samples that were locally pre-heated by high energy ions. We observe low energy ion fluences of ~10^16 cm^-2, about four orders of magnitude higher than the fluence of high energy (MeV) ions. In the areas of highest energy deposition, silicon crystals exfoliate from single ion pulses. Color centers, predominantly W and G-centers, form directly in response to ion pulses without a subsequent annealing step. We find that the linewidth of G-centers increase in areas with high ion flux much more than the linewidth of W-centers, consistent with density functional theory calculations of their electronic structure. Laser ion acceleration generates aligned pulses of high and low energy ions that expand the parameter range for defect engineering and do** of semiconductors with tunable balances of ion flux, damage rates and local heating.
△ Less
Submitted 25 March, 2022;
originally announced March 2022.
-
Fast Grain Map** with Sub-Nanometer Resolution Using 4D-STEM with Grain Classification by Principal Component Analysis and Non-Negative Matrix Factorization
Authors:
Frances I Allen,
Thomas C Pekin,
Arun Persaud,
Steven J Rozeveld,
Gregory F Meyers,
Jim Ciston,
Colin Ophus,
Andrew M Minor
Abstract:
High-throughput grain map** with sub-nanometer spatial resolution is demonstrated using scanning nanobeam electron diffraction (also known as 4D scanning transmission electron microscopy, or 4D-STEM) combined with high-speed direct electron detection. An electron probe size down to 0.5 nm in diameter is implemented and the sample investigated is a gold-palladium nanoparticle catalyst. Computatio…
▽ More
High-throughput grain map** with sub-nanometer spatial resolution is demonstrated using scanning nanobeam electron diffraction (also known as 4D scanning transmission electron microscopy, or 4D-STEM) combined with high-speed direct electron detection. An electron probe size down to 0.5 nm in diameter is implemented and the sample investigated is a gold-palladium nanoparticle catalyst. Computational analysis of the 4D-STEM data sets is performed using a disk registration algorithm to identify the diffraction peaks followed by feature learning to map the individual grains. Two unsupervised feature learning techniques are compared: Principal component analysis (PCA) and non-negative matrix factorization (NNMF). The characteristics of the PCA versus NNMF output are compared and the potential of the 4D-STEM approach for statistical analysis of grain orientations at high spatial resolution is discussed.
△ Less
Submitted 11 March, 2021;
originally announced March 2021.
-
Key mechanistic features of swelling and blistering of helium-ion-irradiated tungsten
Authors:
Frances I. Allen,
Peter Hosemann,
Mehdi Balooch
Abstract:
Helium-ion-induced swelling and blistering of single-crystal tungsten is investigated using a Helium Ion Microscope for site-specific dose-controlled irradiation (at 25 keV) with analysis by Helium Ion Microscopy, Atomic Force Microscopy and Transmission Electron Microscopy (cross-sectioning by Focused Ion Beam milling). Our measurements show that the blister cavity forms at the depth of the heliu…
▽ More
Helium-ion-induced swelling and blistering of single-crystal tungsten is investigated using a Helium Ion Microscope for site-specific dose-controlled irradiation (at 25 keV) with analysis by Helium Ion Microscopy, Atomic Force Microscopy and Transmission Electron Microscopy (cross-sectioning by Focused Ion Beam milling). Our measurements show that the blister cavity forms at the depth of the helium peak and that nanobubbles coalesce to form nanocracks within the envelope of the ion stop** range, causing swelling of the blister shell. These results provide the first direct experimental evidence for the interbubble fracture mechanism proposed in the framework of the gas pressure model for blister formation.
△ Less
Submitted 4 September, 2019;
originally announced September 2019.
-
Nanoimprint of a 3D structure on an optical fiber for light wavefront manipulation
Authors:
Giuseppe Calafiore,
Alexander Koshelev,
Frances I. Allen,
Scott Dhuey,
Simone Sassolini,
Edward Wong,
Paul Lum,
Keiko Munechika,
Stefano Cabrini
Abstract:
Integration of complex photonic structures onto optical fiber facets enables powerful platforms with unprecedented optical functionalities. Conventional nanofabrication technologies, however, do not permit viable integration of complex photonic devices onto optical fibers owing to their low throughput and high cost. In this paper we report the fabrication of a three dimensional structure achieved…
▽ More
Integration of complex photonic structures onto optical fiber facets enables powerful platforms with unprecedented optical functionalities. Conventional nanofabrication technologies, however, do not permit viable integration of complex photonic devices onto optical fibers owing to their low throughput and high cost. In this paper we report the fabrication of a three dimensional structure achieved by direct Nanoimprint Lithography on the facet of an optical fiber. Nanoimprint processes and tools were specifically developed to enable a high lithographic accuracy and coaxial alignment of the optical device with respect to the fiber core. To demonstrate the capability of this new approach, a 3D beam splitter has been designed, imprinted and optically characterized. Scanning electron microscopy and optical measurements confirmed the excellent lithographic capabilities of the proposed approach as well as the desired optical performance of the imprinted structure. The inexpensive solution presented here should enable advancements in areas such as integrated optics and sensing, achieving enhanced portability and versatility of fiber optic components.
△ Less
Submitted 20 May, 2016;
originally announced May 2016.